公开(公告)号：US20060030095A1

公开(公告)日：2006-02-09

申请号：US10913214

申请日：2004-08-06

申请人： Yin-Min Goh ,  Simon Chooi ,  Teck Lim ,  Vincent Sih ,  Chian Sin ,  Ping Ee ,  Zainab Ismail ,  Cher Chua

发明人： Yin-Min Goh ,  Simon Chooi ,  Teck Lim ,  Vincent Sih ,  Chian Sin ,  Ping Ee ,  Zainab Ismail ,  Cher Chua

IPC分类号： H01L21/8238 ,  H01L21/4763

CPC分类号： H01L21/02057 ,  H01L21/02068 ,  H01L21/28518 ,  H01L21/76237 ,  H01L21/823814 ,  H01L21/823878 ,  H01L29/665 ,  H01L29/7833

摘要： Methods of preparing conductive regions such as source/drain regions for silicidation procedures, has been developed. The methods feature removal of native oxide as well as removal of deposited arsenic based defects from conductive surfaces prior to deposition of a metal component of subsequently formed metal silicide regions. Arsenic ions implanted for N type source/drain regions are also implanted into insulator regions such as insulator filled shallow trench isolation regions. A hydrofluoric acid cycle used as a component of the pre-silicidation preparation procedure can release arsenic from the shallow trench isolation regions in the form of arsenic based defects, which in turn can re-deposit on the surface of source/drain region. Therefore pre-silicidation preparation treatments described in this invention feature removal of both native oxide and arsenic based defects from conductive surfaces prior to metal silicide formation. Methods include wet etch procedures featuring hydrofluoric acid and hydrogen peroxide, as well as spin dry and dry etch procedures both employed post hydrofluoric acid treatment to remove re-deposited arsenic based defects.

摘要翻译： 已经开发了制备用于硅化程序的源极/漏极区域的导电区域的方法。 该方法在沉积随后形成的金属硅化物区域的金属组分之前，特征在于去除自然氧化物以及从导电表面去除沉积的基于砷的缺陷。 注入用于N型源极/漏极区域的砷离子也被注入绝缘体区域，例如绝缘体填充的浅沟槽隔离区域。 用作预硅化物制备方法的组分的氢氟酸循环可以以基于砷的缺陷的形式从浅沟槽隔离区释放砷，其又可以沉积在源极/漏极区的表面上。 因此，本发明中描述的预硅化制备处理在金属硅化物形成之前特征是从导电表面除去天然氧化物和砷的缺陷。 方法包括以氢氟酸和过氧化氢为特征的湿法蚀刻程序，以及在氢氟酸处理之后采用的旋转干燥和干蚀刻方法，以去除重新沉积的基于砷的缺陷。

公开(公告)号：US20070192060A1

公开(公告)日：2007-08-16

申请号：US11353739

申请日：2006-02-14

申请人： Hongsee Yam ,  Teck Lim ,  Hwaliang Ng ,  Timothy Yoap

发明人： Hongsee Yam ,  Teck Lim ,  Hwaliang Ng ,  Timothy Yoap

IPC分类号： G06F19/00

CPC分类号： G05B23/0221 ,  G05B2219/1112 ,  G05B2223/02 ,  G06K9/6226 ,  G06K9/6284

摘要： A data analysis system analyzes data sets that are characterized by a wide variety of probability density functions (PDFs), and also analyzes mixed populations, i.e., a single data set containing subsets of data that each fit a different distribution. The data analysis system receives quality control data from a product manufacturing or product testing floor, determines whether the data is a mixed population, and fits the data with a variety of PDFs. The data analysis system selects the best fitting PDF based on statistical characteristics calculated for each fitted PDF. The data analysis system generates performance capability parameters based on the best fitting PDF, and may generate reports illustrating the performance capability parameters. The data analysis system also adjusts statistical control limits to provide a more reliable process trigger and control plan. In this manner, the data analysis system may more accurately report product performance.

摘要翻译： 数据分析系统分析以各种各样的概率密度函数（PDF）为特征的数据集，并且还分析混合群体，即包含各自适合不同分布的数据子集的单个数据集。 数据分析系统从产品制造或产品测试层接收质量控制数据，确定数据是否为混合人口，并将数据与各种PDF进行匹配。 数据分析系统根据为每个拟合PDF计算的统计特征选择最佳拟合PDF。 数据分析系统基于最佳拟合PDF生成性能能力参数，并可生成说明性能能力参数的报告。 数据分析系统还调整统计控制限制，提供更可靠的过程触发和控制计划。 以这种方式，数据分析系统可以更准确地报告产品性能。

公开(公告)号：US20050041321A1

公开(公告)日：2005-02-24

申请号：US10642909

申请日：2003-08-18

申请人： Chris Settje ,  David Schell ,  Daniel Hobson ,  Teck Lim ,  Patrick Wong ,  Beng Quak ,  Ming Ding ,  Soon Leow

发明人： Chris Settje ,  David Schell ,  Daniel Hobson ,  Teck Lim ,  Patrick Wong ,  Beng Quak ,  Ming Ding ,  Soon Leow

IPC分类号： G11B5/55 ,  G11B5/596 ,  G11B15/12

CPC分类号： G11B5/59627 ,  G11B5/5526

摘要： An apparatus and method for selecting physical cylinders (cylinders accessible for read/write operations) in a disc drive is provided. The disc drive includes at least one rotatable disc. The disc drive also includes a first head, which is positionable adjacent a first disc surface, and a second head, which is positionable adjacent a second disc surface. The first disc surface has a first plurality of greycode tracks and the second disc surface has a second plurality of greycode tracks. Each greycode track of the second plurality of greycode tracks corresponds to a different greycode track of the first plurality of greycode tracks, thereby forming a plurality of greycode cylinders, with each greycode cylinder of the plurality of greycode cylinders including a pair of corresponding greycode tracks. The physical cylinders are a subset (less than all) of the plurality of the greycode cylinders. The method of selecting the physical cylinders includes determining whether the first plurality of greycode tracks or the second plurality of greycode tracks demonstrates greater track eccentricity, to thereby obtain a maximum track eccentricity surface and a corresponding maximum eccentricity head. The maximum track eccentricity surface is one of the first and second disc surfaces and the maximum eccentricity head is a corresponding one of the first and second heads. The maximum eccentricity head is used to locate at least one of the physical cylinders.