摘要:
A high precision temperature detecting circuit is disclosed. The temperature detecting circuit includes a first voltage source circuit for generating a voltage VPN that has a negative temperature coefficient using a work function difference of gate electrodes of two field effect transistors, a second voltage source circuit for generating a reference voltage VREF1 that is independent of temperature change using a work function difference of gate electrodes of two or more field effect transistors, an impedance conversion circuit for converting impedance of the voltage VPN and the reference voltage VREF1, and a subtracter circuit, to which the impedance converted voltages VPN and VREF1 are provided, for obtaining a difference voltage between the voltage VPN and the reference voltage VREF1, and for amplifying the difference voltage.
摘要:
An illumination control module, which enables one diffraction optical element (DOE) to be applied to various photolithography processes, and a diffraction illumination system and a photolithography system including the same are provided. The illumination control module includes a convex-ring-shaped upper lens, and a concave-ring-shaped lower lens.
摘要:
Disclosed is a synthetic fiber, including hollow sphere-shaped particles each formed of any one selected from among an inorganic material, an organic material, or combinations thereof, which is advantageous in terms of a low specific gravity, thereby effectively solving conventional wearing problems.