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公开(公告)号：US20140306301A1
公开(公告)日：2014-10-16
申请号：US13860560
申请日：2013-04-11
IPC分类号： B81B3/00
CPC分类号： B81B3/0021 , B41J2/1433 , B41J2/162 , B41J2/1626
摘要： A MEMS device includes a silicon substrate. The silicon substrate includes a plurality of dielectric material grooves spaced apart from each other. The silicon substrate also includes a through hole with a portion of the through hole being located between the plurality of dielectric material grooves when viewed from a direction perpendicular to a surface of the silicon substrate.
摘要翻译： MEMS器件包括硅衬底。 硅衬底包括彼此间隔开的多个电介质材料槽。 硅衬底还包括通孔，当从垂直于硅衬底的表面的方向观察时，通孔的一部分位于多个电介质材料沟槽之间。
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公开(公告)号：US08877605B1
公开(公告)日：2014-11-04
申请号：US13860557
申请日：2013-04-11
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1631 , B41J2/1642 , B41J2/1643 , B41J2/1645 , B41J2/1646
摘要： A method of etching a silicon substrate includes providing a silicon substrate including a first surface and a second surface. A plurality of grooves spaced apart from each other are etched from the first surface of the silicon substrate. A dielectric material is deposited on the first surface of the silicon substrate and into the plurality of grooves. A hole through the silicon substrate is etched from the second surface of the substrate to the dielectric material. A portion of the hole is located between the plurality of grooves.
摘要翻译： 蚀刻硅衬底的方法包括提供包括第一表面和第二表面的硅衬底。 从硅衬底的第一表面蚀刻彼此间隔开的多个沟槽。 电介质材料沉积在硅衬底的第一表面上并进入多个槽。 通过硅衬底的孔从衬底的第二表面被蚀刻到电介质材料。 孔的一部分位于多个凹槽之间。
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公开(公告)号：US20140308765A1
公开(公告)日：2014-10-16
申请号：US13860557
申请日：2013-04-11
IPC分类号： B41J2/16
CPC分类号： B41J2/1603 , B41J2/1628 , B41J2/1631 , B41J2/1642 , B41J2/1643 , B41J2/1645 , B41J2/1646
摘要： A method of etching a silicon substrate includes providing a silicon substrate including a first surface and a second surface. A plurality of grooves spaced apart from each other are etched from the first surface of the silicon substrate. A dielectric material is deposited on the first surface of the silicon substrate and into the plurality of grooves. A hole through the silicon substrate is etched from the second surface of the substrate to the dielectric material. A portion of the hole is located between the plurality of grooves.
摘要翻译： 蚀刻硅衬底的方法包括提供包括第一表面和第二表面的硅衬底。 从硅衬底的第一表面蚀刻彼此间隔开的多个沟槽。 电介质材料沉积在硅衬底的第一表面上并进入多个槽。 通过硅衬底的孔从衬底的第二表面被蚀刻到电介质材料。 孔的一部分位于多个凹槽之间。
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公开(公告)号：US08328334B2
公开(公告)日：2012-12-11
申请号：US12911750
申请日：2010-10-26
申请人： Yonglin Xie , Joseph Jech, Jr. , Qing Yang , Carolyn R. Ellinger
发明人： Yonglin Xie , Joseph Jech, Jr. , Qing Yang , Carolyn R. Ellinger
IPC分类号： B41J2/04
CPC分类号： B41J2/14112 , B41J2002/14387 , B41J2002/14403 , B41J2002/14475 , B41J2202/12
摘要： Each liquid dispensing element of an array includes liquid supply, dispensing, and return channels positioned on a substrate. The liquid dispensing channel, in communication with the supply and return channels, includes an outlet opening and is associated with a diverter member. Liquid supply and return passages, in communication with liquid supply and return channels, respectively, extend through the substrate. Liquid supply and return ducts of a liquid manifold are in communication with each liquid supply passage and liquid return passage, respectively. Liquid flows from the liquid supply duct through each liquid dispensing element to the liquid return duct. A liquid drop is ejected from the outlet opening of the liquid dispensing channel of one of the liquid dispensing elements by selectively actuating the associated diverter member to divert a portion of the flowing liquid through the outlet opening of the liquid dispensing channel.
摘要翻译： 阵列的每个液体分配元件包括位于基底上的液体供应，分配和返回通道。 与供应和返回通道连通的液体分配通道包括出口开口并与分流器构件相关联。 与液体供应和返回通道分开的液体供应和返回通道分别延伸通过基板。 液体歧管的液体供应和返回管道分别与每个液体供应通道和液体返回通道连通。 液体从液体供应管道通过每个液体分配元件流到液体返回管道。 通过选择性地致动相关联的分流器构件将液滴从其中一个液体分配元件的液体分配通道的出口开口排出，以使一部分流动的液体通过液体分配通道的出口开口。
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公开(公告)号：US08235505B2
公开(公告)日：2012-08-07
申请号：US12494331
申请日：2009-06-30
CPC分类号： B41J2/18 , B41J2/14 , B41J2002/14403 , B41J2202/12
摘要： A liquid dispenser includes a liquid supply channel, a liquid dispensing channel that includes an outlet opening, and a liquid return channel that includes a porous member located therein. A liquid supply provides liquid under pressure from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A diverter member is selectively actuatable to divert a portion of the liquid toward outlet opening of the liquid dispensing channel.
摘要翻译： 液体分配器包括液体供应通道，包括出口开口的液体分配通道和包括位于其中的多孔构件的液体返回通道。 液体供应源通过液体分配通道将液体从液体供应通道提供到液体返回通道。 分流器构件可选择性地致动以将一部分液体转向液体分配通道的出口。
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公开(公告)号：US20120098907A1
公开(公告)日：2012-04-26
申请号：US12911751
申请日：2010-10-26
CPC分类号： B41J2/1404 , B41J2/1433 , B41J2002/14403 , B41J2202/12
摘要： A liquid dispenser includes a liquid supply channel, a liquid return channel, and a liquid dispensing channel. The liquid dispensing channel includes a wall. The wall includes a surface. A portion of the wall defines an outlet opening. A drain is located in the wall downstream from the outlet opening. The drain includes a radius of curvature as viewed from a direction perpendicular to the wall. A liquid supply provides liquid that flows from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A diverter member selectively diverts a portion of the flowing liquid through the outlet opening of the liquid dispensing channel.
摘要翻译： 液体分配器包括液体供应通道，液体返回通道和液体分配通道。 液体分配通道包括壁。 墙壁包括一个表面。 壁的一部分限定出口开口。 排水口位于出口开口下游的墙壁中。 漏极包括从垂直于壁的方向观察的曲率半径。 液体供应液体从液体供应通道通过液体分配通道流到液体返回通道。 分流器构件选择性地将流动的液体的一部分转过液体分配通道的出口。
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公开(公告)号：US20120098890A1
公开(公告)日：2012-04-26
申请号：US12911750
申请日：2010-10-26
申请人： Yonglin Xie , Joseph Jech, JR. , Qing Yang , Carolyn R. Ellinger
发明人： Yonglin Xie , Joseph Jech, JR. , Qing Yang , Carolyn R. Ellinger
IPC分类号： B41J2/04
CPC分类号： B41J2/14112 , B41J2002/14387 , B41J2002/14403 , B41J2002/14475 , B41J2202/12
摘要： A liquid dispenser includes an array of liquid dispensing elements positioned on a substrate is provided. Each liquid dispensing element includes a liquid dispensing channel positioned on the substrate. The liquid dispensing channel includes an outlet opening positioned on a wall opposite the substrate. A diverter member is associated with the liquid dispensing channel. A liquid return channel is positioned on the substrate in fluid communication with the liquid dispensing channel. A liquid supply channel is positioned on the substrate in fluid communication with the liquid dispensing channel. A liquid supply passage extends through the substrate and is in fluid communication with the liquid supply channel. A liquid return passage extends through the substrate and is in fluid communication with the liquid return channel. A liquid manifold is provided that includes a liquid supply duct and a liquid return duct. The liquid supply duct is in fluid communication with each liquid supply passage of each liquid dispensing element. The liquid return duct is in fluid communication with each liquid return passage of each liquid dispensing element. A liquid flows from the liquid supply duct of the liquid manifold through each liquid dispensing element to the liquid return duct of the liquid manifold. A liquid drop is ejected from the outlet opening of the liquid dispensing channel of one of the liquid dispensing elements by selectively actuating the diverter member of the liquid dispensing element to divert a portion of the flowing liquid through the outlet opening of the liquid dispensing channel of the liquid dispensing element.
摘要翻译： 液体分配器包括设置在基板上的液体分配元件阵列。 每个液体分配元件包括位于基底上的液体分配通道。 液体分配通道包括位于与衬底相对的壁上的出口。 分流器构件与液体分配通道相关联。 液体返回通道定位在与液体分配通道流体连通的基板上。 液体供应通道定位在与液体分配通道流体连通的基板上。 液体供应通道延伸穿过基底并且与液体供应通道流体连通。 液体返回通道延伸穿过基底并与液体返回通道流体连通。 提供了一种液体歧管，其包括液体供应管道和液体回流管道。 液体供应管道与每个液体分配元件的每个液体供应通道流体连通。 液体返回管道与每个液体分配元件的每个液体返回通道流体连通。 液体从液体歧管的液体供应管道通过每个液体分配元件流到液体歧管的液体返回管道。 通过选择性地致动液体分配元件的分流器件将液滴从其中一个液体分配元件的液体分配通道的出口开口排出，以将流动的液体的一部分通过液体分配通道的液体分配通道的出口 液体分配元件。
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公开(公告)号：US20100328407A1
公开(公告)日：2010-12-30
申请号：US12494331
申请日：2009-06-30
IPC分类号： B41J2/18
CPC分类号： B41J2/18 , B41J2/14 , B41J2002/14403 , B41J2202/12
摘要： A liquid dispenser includes a liquid supply channel, a liquid dispensing channel that includes an outlet opening, and a liquid return channel that includes a porous member located therein. A liquid supply provides liquid under pressure from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A diverter member is selectively actuatable to divert a portion of the liquid toward outlet opening of the liquid dispensing channel.
摘要翻译： 液体分配器包括液体供应通道，包括出口开口的液体分配通道和包括位于其中的多孔构件的液体返回通道。 液体供应源通过液体分配通道将液体从液体供应通道提供到液体返回通道。 分流器构件可选择性地致动以将一部分液体转向液体分配通道的出口。
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公开(公告)号：US08328335B2
公开(公告)日：2012-12-11
申请号：US12911758
申请日：2010-10-26
申请人： Yonglin Xie , Joseph Jech, Jr. , Carolyn R. Ellinger , Maria J. Lehmann , Ali G. Lopez , Qing Yang
发明人： Yonglin Xie , Joseph Jech, Jr. , Carolyn R. Ellinger , Maria J. Lehmann , Ali G. Lopez , Qing Yang
IPC分类号： B41J2/04
CPC分类号： B41J2/14016 , B41J2002/14403 , B41J2002/14475 , B41J2202/12
摘要： A liquid dispenser is provided that includes a liquid supply channel, a liquid dispensing channel, and a liquid return channel. The liquid dispensing channel includes a wall. The wall includes a surface. A portion of the wall defines an outlet opening that includes a downstream edge relative to a direction of liquid flow through the liquid dispensing channel. The downstream edge is sloped relative to the surface of the wall of the liquid dispensing channel. A liquid is provided that flows from the liquid supply channel through the liquid dispensing channel to the liquid return channel. A liquid drop is caused to be ejected from the outlet opening of the liquid dispensing channel by selectively actuating a diverter member to divert a portion of the flowing liquid through the outlet opening of the liquid dispensing channel.
摘要翻译： 提供了一种液体分配器，其包括液体供应通道，液体分配通道和液体返回通道。 液体分配通道包括壁。 墙壁包括一个表面。 壁的一部分限定出口开口，其包括相对于流过液体分配通道的液体流动方向的下游边缘。 下游边缘相对于液体分配通道的壁的表面倾斜。 提供从液体供应通道通过液体分配通道流到液体返回通道的液体。 通过选择性地致动分流器构件以使流动的液体的一部分通过液体分配通道的出口开口而使液滴从液体分配通道的出口开口排出。
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公开(公告)号：US08382254B2
公开(公告)日：2013-02-26
申请号：US12911754
申请日：2010-10-26
申请人： Yonglin Xie , Joseph Jech, Jr. , Qing Yang , Carolyn R. Ellinger
发明人： Yonglin Xie , Joseph Jech, Jr. , Qing Yang , Carolyn R. Ellinger
IPC分类号： B41J2/05
CPC分类号： B41J2/17596 , B41J2/1404 , B41J2/185 , B41J2002/14403 , B41J2002/14475 , B41J2202/11 , B41J2202/12
摘要： A liquid dispenser includes an array of liquid dispensing elements positioned on a substrate. Each liquid dispensing element includes a liquid dispensing channel including an outlet opening. Liquid supply and return channels are positioned on the substrate in fluid communication with the liquid dispensing channel. Liquid supply and return passages extend through the substrate in fluid communication with the liquid supply and return channels, respectively. A liquid manifold includes liquid supply and return ducts in fluid communication with each liquid supply and return passage of each liquid dispensing element, respectively. A liquid supply provides liquid that flows from the liquid supply duct of the liquid manifold through each liquid dispensing element to the liquid return duct of the liquid manifold. A selectively activated diverter member, associated with the liquid dispensing channel, diverts a portion of the liquid flowing through the dispensing channel through the outlet opening.
摘要翻译： 液体分配器包括定位在基底上的液体分配元件阵列。 每个液体分配元件包括包括出口开口的液体分配通道。 液体供应和返回通道定位在与液体分配通道流体连通的基板上。 液体供应和返回通道分别延伸通过衬底与液体供应和返回通道流体连通。 液体歧管包括分别与每个液体分配元件的每个液体供应和返回通道流体连通的液体供应和返回管道。 液体供应液体从液体歧管的液体供应管道通过每个液体分配元件流到液体歧管的液体返回管道。 与液体分配通道相关联的选择性激活的转向器构件将流过分配通道的液体的一部分转过出口。
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