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公开(公告)号:US4963240A
公开(公告)日:1990-10-16
申请号:US174959
申请日:1988-03-29
CPC分类号: C23C14/3414 , C22C27/02
摘要: The present invention is a sputtering target for formation of an alloy film, which comprises 15 to 50 atomic percent of molybdenum or tungsten, the remaining atomic percent of tantalum, and concomitant impurities, which can provide electrical wiring having very low specific resistance as well as excellent workability and stability, whereby high definition and high integration of various elements such as semiconductor devices can be achieved. In consequence, it is fair to say that this invention is industrially very useful.
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公开(公告)号:US4842706A
公开(公告)日:1989-06-27
申请号:US162898
申请日:1988-03-02
IPC分类号: C23C14/34
CPC分类号: C23C14/3414
摘要: Disclosed is a sputtering target which comprises a single block composed of one or more of metals prepared by a melting process or an alloy thereof; a combined block of the plural single blocks; or a combined block of the single blocks and silicon blocks; an average size of the crystal grains of the metal or the alloy being between 1 .mu.m and 1 mm.
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公开(公告)号:US4891066A
公开(公告)日:1990-01-02
申请号:US219799
申请日:1988-07-15
IPC分类号: C22C29/02 , C22B9/22 , C22B34/12 , C22C14/00 , C23C14/34 , C25C3/28 , H01L21/768 , H01L23/532
CPC分类号: C22B34/129 , C22B34/1295 , C22B9/228 , C22C14/00 , H01L21/76841 , H01L23/53257 , H01L2924/0002
摘要: Disclosed is a highly pure titanium which comprises containing not more than 200 ppm of oxygen; not more than 30 ppm each of elements consisting of iron, nickel and chromium, and not more than 0.1 ppm each of elements consisting of sodium and potassium.Disclosed is also a process for preparing the above highly pure titanium which comprises melting a crude titanium obtained by molten salt electrolysis, in a high vacuum of 5.times.10.sup.-5 mbar or less.
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公开(公告)号:US4793854A
公开(公告)日:1988-12-27
申请号:US51772
申请日:1987-05-20
IPC分类号: C22C29/02 , C22B9/22 , C22B34/12 , C22C14/00 , C23C14/34 , C25C3/28 , H01L21/768 , H01L23/532
CPC分类号: C22B34/129 , C22B34/1295 , C22B9/228 , C22C14/00 , H01L21/76841 , H01L23/53257 , H01L2924/0002
摘要: Disclosed is a highly pure titanium which comprises containing not more than 200 ppm of oxygen; not more than 30 ppm each of elements consisting of iron, nickel and chromium, and not more than 0.1 ppm each of elements consisting of sodium and potassium.Disclosed is also a process for preparing the above highly pure titanium which comprises melting a crude titanium obtained by molten salt electrolysis, in a high vacuum of 5.times.10.sup.-5 mbar or less.
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公开(公告)号:USRE34598E
公开(公告)日:1994-05-03
申请号:US815762
申请日:1992-01-02
IPC分类号: C22C29/02 , C22B9/22 , C22B34/12 , C22C14/00 , C23C14/34 , C25C3/28 , H01L21/768 , H01L23/532
CPC分类号: C22B34/129 , C22B34/1295 , C22B9/228 , C22C14/00 , H01L21/76841 , H01L23/53257 , H01L2924/0002
摘要: Disclosed is a highly pure titanium which comprises containing not more than 200 ppm of oxygen; not more than 30 ppm each of elements consisting of iron, nickel and chromium, and not more than 0.1 ppm each of elements consisting of sodium and potassium.Disclosed is also a process for preparing the above highly pure titanium which comprises melting a crude titanium obtained by molten salt electrolysis, in a high vacuum of 5.times.10.sup.-5 mbar or less.
摘要翻译: 公开了一种高纯钛,其包含不超过200ppm的氧; 不超过30ppm的由铁,镍和铬组成的元素,以及不超过0.1ppm的由钠和钾组成的元素。 还公开了一种制备上述高纯钛的方法,该方法包括在5×10 -5 mbar或更低的高真空度下熔融通过熔融盐电解获得的粗钛。
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公开(公告)号:US5370837A
公开(公告)日:1994-12-06
申请号:US180314
申请日:1994-01-12
申请人: Masanori Kibata , Noboru Kitamori , Shigeki Kajima , Kazunori Yokosu , Mituo Kawai , Hideo Ishihara , Noriaki Yagi
发明人: Masanori Kibata , Noboru Kitamori , Shigeki Kajima , Kazunori Yokosu , Mituo Kawai , Hideo Ishihara , Noriaki Yagi
CPC分类号: C23C30/00 , Y10T428/12833
摘要: A high temperature heat-treating jig characterized by forming a tungsten layer or a tungsten alloy layer on the surface of a heat-resistant base to avoid discoloration and color shading during the heat treatment at a high temperature.
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公开(公告)号:US5288561A
公开(公告)日:1994-02-22
申请号:US784179
申请日:1991-10-30
申请人: Masanori Kibata , Noboru Kitamori , Shigeki Kajima , Kazunori Yokosu , Mituo Kawai , Hideo Ishihara , Noriaki Yagi
发明人: Masanori Kibata , Noboru Kitamori , Shigeki Kajima , Kazunori Yokosu , Mituo Kawai , Hideo Ishihara , Noriaki Yagi
CPC分类号: C23C30/00 , Y10T428/12833
摘要: A high temperature heat-treating jig characterized by forming a tungsten layer or a tungsten alloy layer on the surface of a heat-resistant base to avoid discoloration and color shading during the heat treatment at a high temperature.
摘要翻译: 一种高温热处理夹具,其特征在于在耐热基材的表面上形成钨层或钨合金层,以避免高温热处理时的变色和着色。
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公开(公告)号:US4966676A
公开(公告)日:1990-10-30
申请号:US345175
申请日:1989-05-01
IPC分类号: C23C14/34
CPC分类号: C23C14/3414 , C23C14/3407
摘要: A sputtering target divided into respective target elements of two or more types arranged as a composite on a substrate, is disclosed. A thin sheet whose constituent material comprises one or more of the constituent materials of the target elements, and whose constituent material includes at least one metal material, is interposed between said substrate and target elements.
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公开(公告)号:US5190630A
公开(公告)日:1993-03-02
申请号:US866116
申请日:1992-04-07
IPC分类号: C23C14/34
CPC分类号: H01J37/3429 , C23C14/3407
摘要: The present invention consists of a sputtering target wherein target pieces made of at least two different kinds of materials are compositely arrayed in a manner as to be divided into the respective materials, characterized by having at least one irregular erosion region which is defined as a region enclosed with a circle having an erosion width as its diameter, located at a region farthest from the center of gravity of the sputtering target within a region to be eroded in a curvilinear shape, the irregular erosion region being formed at least partly of target pieces made of at least two kinds of materials having either shapes or surface areas thereof different from those of the target pieces lying outside the irregular erosion region and are compositely arrayed in a manner as to be divided into the respective materials.
摘要翻译: 本发明由溅射靶构成,其中由至少两种不同种类的材料制成的靶片以分为各种材料的方式复合排列,其特征在于具有至少一个不规则侵蚀区域,其定义为区域 围绕具有侵蚀宽度作为其直径的圆,位于距离溅射靶的最重要的区域内,以被蚀刻的曲线形状的区域内,所述不规则侵蚀区域至少部分地由目标片形成 具有不同于位于不规则侵蚀区域外的目标片的形状或表面积的至少两种材料,并且以分为各种材料的方式复合排列。
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公开(公告)号:US20110154897A1
公开(公告)日:2011-06-30
申请号:US12926871
申请日:2010-12-15
申请人: Hideo Ishihara
发明人: Hideo Ishihara
IPC分类号: G01D11/24
CPC分类号: G01D7/00 , B60K37/02 , B60K2350/1064 , B60K2350/302 , B60K2350/307 , B60K2350/402 , B60K2350/945 , B60K2350/948
摘要: An instrument apparatus, includes a tachometer having a chaptering plate provided at a front surface thereof; a display unit arranged at the front surface of the chaptering plate; a printed circuit board arranged at a rear surface of the chaptering plate and driving the display unit. The display unit includes a projecting portion projecting toward the chaptering plate and a male terminal provided at a top end of the projecting portion. The chaptering plate includes an insertion hole formed into a similar shape as an outline of the projecting portion, in which the projecting portion is inserted. The printed circuit board is arranged at a position, in which an insert direction of inserting the projecting portion through the insertion hole and the printed circuit board intersect, and includes a female terminal to be fitted and electrically connected with the male terminal.
摘要翻译: 一种仪器装置,包括:转速计,具有设置在其前表面的分页板; 布置在所述章板的前表面的显示单元; 布置在所述章板的后表面并驱动所述显示单元的印刷电路板。 显示单元包括朝向章节板突出的突出部分和设置在突出部分的顶端的阳端子。 所述章节板包括形成为与所述突出部插入的所述突出部的轮廓相似形状的插入孔。 印刷电路板配置在通过插入孔和印刷电路板插入突出部的插入方向相交的位置,并且具有与阳端子嵌合并电连接的阴端子。
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