Sputtering target
    9.
    发明授权
    Sputtering target 失效
    溅射目标

    公开(公告)号:US5190630A

    公开(公告)日:1993-03-02

    申请号:US866116

    申请日:1992-04-07

    IPC分类号: C23C14/34

    CPC分类号: H01J37/3429 C23C14/3407

    摘要: The present invention consists of a sputtering target wherein target pieces made of at least two different kinds of materials are compositely arrayed in a manner as to be divided into the respective materials, characterized by having at least one irregular erosion region which is defined as a region enclosed with a circle having an erosion width as its diameter, located at a region farthest from the center of gravity of the sputtering target within a region to be eroded in a curvilinear shape, the irregular erosion region being formed at least partly of target pieces made of at least two kinds of materials having either shapes or surface areas thereof different from those of the target pieces lying outside the irregular erosion region and are compositely arrayed in a manner as to be divided into the respective materials.

    摘要翻译: 本发明由溅射靶构成,其中由至少两种不同种类的材料制成的靶片以分为各种材料的方式复合排列,其特征在于具有至少一个不规则侵蚀区域,其定义为区域 围绕具有侵蚀宽度作为其直径的圆,位于距离溅射靶的最重要的区域内,以被蚀刻的曲线形状的区域内,所述不规则侵蚀区域至少部分地由目标片形成 具有不同于位于不规则侵蚀区域外的目标片的形状或表面积的至少两种材料,并且以分为各种材料的方式复合排列。

    Instrument apparatus
    10.
    发明申请
    Instrument apparatus 有权
    仪器仪器

    公开(公告)号:US20110154897A1

    公开(公告)日:2011-06-30

    申请号:US12926871

    申请日:2010-12-15

    申请人: Hideo Ishihara

    发明人: Hideo Ishihara

    IPC分类号: G01D11/24

    摘要: An instrument apparatus, includes a tachometer having a chaptering plate provided at a front surface thereof; a display unit arranged at the front surface of the chaptering plate; a printed circuit board arranged at a rear surface of the chaptering plate and driving the display unit. The display unit includes a projecting portion projecting toward the chaptering plate and a male terminal provided at a top end of the projecting portion. The chaptering plate includes an insertion hole formed into a similar shape as an outline of the projecting portion, in which the projecting portion is inserted. The printed circuit board is arranged at a position, in which an insert direction of inserting the projecting portion through the insertion hole and the printed circuit board intersect, and includes a female terminal to be fitted and electrically connected with the male terminal.

    摘要翻译: 一种仪器装置,包括:转速计,具有设置在其前表面的分页板; 布置在所述章板的前表面的显示单元; 布置在所述章板的后表面并驱动所述显示单元的印刷电路板。 显示单元包括朝向章节板突出的突出部分和设置在突出部分的顶端的阳端子。 所述章节板包括形成为与所述突出部插入的所述突出部的轮廓相似形状的插入孔。 印刷电路板配置在通过插入孔和印刷电路板插入突出部的插入方向相交的位置,并且具有与阳端子嵌合并电连接的阴端子。