Device for detecting magnetism
    1.
    发明授权
    Device for detecting magnetism 失效
    用于检测磁性的装置

    公开(公告)号:US5005064A

    公开(公告)日:1991-04-02

    申请号:US233431

    申请日:1988-08-18

    IPC分类号: G01R33/09 H01L27/22 H01L43/08

    CPC分类号: G01R33/09 H01L27/22 H01L43/08

    摘要: According to this invention, a device for detecting magnetism comprises; a substrate, an interposed insulating layer containing impurities therein, formed on the substrate, and a ferromagnetic magnetoresistive element formed on the interposed layer, wherein at least a portion of the interposed layer on which the ferromagnetic magnetoresistive element is formed has a concentration of impurities of less than a predetermined value. Further, in the device of this invention, the surface of the layer interposed between the substrate and the ferromagnetic magnetoresistive element has a surface roughness of less than 120 and an angle between a contacting surface of a conductive wiring and the ferromagnetic magnetoresistive element and the surface of the interposed layer is less than 78 degrees. Therefore, a device wherein a deterioration of the quality film of the ferromagnetic magnetoresistive element can be avoided and a reduction of the ratio of the resistance variation of the ferromagnetic magnetoresistive element can be maintained at less than 10% can be obtained, and further, a device wherein the generation of noise can be effectively suppressed so that the device is highly sensitive to magnetism and has a high S/N ratio, and further, the breakdown ratio caused by wiring breakages is effectively reduced, can be obtained.

    Magnetic gear rotation sensor
    4.
    发明授权
    Magnetic gear rotation sensor 失效
    磁齿轮旋转传感器

    公开(公告)号:US5841276A

    公开(公告)日:1998-11-24

    申请号:US645261

    申请日:1996-05-13

    CPC分类号: G01D5/147 G01P3/488

    摘要: A noncontact type rotation sensor, which can detect the rotational movement of a gear with high sensitivity and precision without causing any erroneous output, is disclosed. To a magnetic gear is applied a bias magnetic field by a bias magnet from the direction of the teeth of the gear. A sensor part disposed within the bias magnetic field comprises a substrate and a plurality of magneto-resistive elements mounted on the substrate in parallel to the teeth of the gear and electrically connected in series one after another. The sensor part detects the magnetic vector of the bias magnetic field varying according to the rotation of the gear as the composite value of the variations of the resistance values of the plurality of magneto-resistive elements connected in series one after another. The plurality of magneto-resistive elements are arranged with interval and width that enable the plurality of magneto-resistive elements to absorb the erroneous output caused to the variation waveforms of the respective resistance values during power supply.

    摘要翻译: 公开了一种非接触式旋转传感器,其能够以高灵敏度和精度检测齿轮的旋转运动而不引起任何错误的输出。 磁齿轮通过偏置磁铁从齿轮的齿的方向施加偏置磁场。 设置在偏置磁场内的传感器部分包括基板和多个安装在基板上的磁阻元件,平行于齿轮的齿并且彼此串联电连接。 传感器部分检测根据齿轮的旋转而变化的偏置磁场的磁矢量,作为多个磁阻元件的电阻值的变化的复合值一个接一个地串联连接。 多个磁阻元件以间隔和宽度布置,使得多个磁阻元件能够吸收由于在电源期间各个电阻值的变化波形引起的错误输出。