Concentricity evaluating system
    3.
    发明授权
    Concentricity evaluating system 失效
    同心评估系统

    公开(公告)号:US4441026A

    公开(公告)日:1984-04-03

    申请号:US315731

    申请日:1981-10-28

    摘要: A concentricity evaluating system has a stage supported by a hydrostatic bearing in at least one of radial and thrust directions. The angle of rotation of the stage is detected by a rotation angle detector. On the stage a hollow cylindrical member is fixed coaxially. Onto the upper end face of the hollow cylindrical member or into the hole thereof a light beam is applied from a light emitting means, whereby a clear image of the profile of the hole is formed. The image thus formed is enlarged by an optical system. The light beam passing through the optical system reaches a photodiode array which is positioned across a part of the enlarged image. The hollow cylindrical member is rotated, and a displacement meter is detected how the circumference of the hollow cylindrical member varies as the member rotates. Data from the displacement meter, photodiode array and the rotation angle detector are fed to an interface and processed. The data thus processed are fed to a computer, which perform arithmetic operations on these data, thus evaluating the concentricity of the hollow cylindrical member.

    摘要翻译: 同心度评估系统具有在径向和推力方向中的至少一个中由静压轴承支撑的台阶。 通过旋转角度检测器检测台的旋转角度。 在舞台上,中空圆柱形构件被同轴地固定。 在中空圆柱形构件的上端面或其孔中,从发光装置施加光束,由此形成孔的轮廓的清晰图像。 这样形成的图像被光学系统放大。 通过光学系统的光束到达位于放大图像的一部分的光电二极管阵列。 中空圆柱形构件旋转,并且检测位移计如何随着构件旋转而中空圆柱形构件的圆周变化。 来自位移计,光电二极管阵列和旋转角度检测器的数据被馈送到接口并进行处理。 将这样处理的数据送入计算机,对这些数据执行算术运算,从而评估中空圆柱形构件的同心度。