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公开(公告)号:US4428225A
公开(公告)日:1984-01-31
申请号:US352237
申请日:1982-02-25
申请人: Shunichi Kato , Tetsuo Aikawa
发明人: Shunichi Kato , Tetsuo Aikawa
CPC分类号: G01M1/12
摘要: A device for measuring the imbalance of a disc-like object has at least three load sensors having cantilevers for supporting the object at their corresponding measuring points selected, with a same angular distance therebetween, on a measuring circle which is concentric with a circular through-hole of the object. Each of the caltilevers is extended tangential to the measuring circle and directed perpendicular to the line of sight in the same sense when viewed from the center of the through-hole. A positioning device positions the center of the through-hole in the object relative to the load sensors, and a calculator device for calculating the imbalance of the object using the data supplied from the plural load sensors.
摘要翻译: 用于测量盘状物体的不平衡的装置具有至少三个负载传感器,所述负载传感器具有悬臂,用于在所选择的相应测量点处将物体以相同的角距离支撑在与环形通孔相同的测量圆上, 物体的孔。 当从通孔的中心观察时,每个所述加cal vers相对于测量圆延伸并且以相同的方向垂直于视线指向。 定位装置将通孔的中心相对于负载传感器定位在物体中,以及计算器装置,用于使用从多个负载传感器提供的数据来计算物体的不平衡。
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公开(公告)号:US4600492A
公开(公告)日:1986-07-15
申请号:US758505
申请日:1985-07-24
申请人: Hirosuke Ooshio , Tetsuo Aikawa , Hidetaka Jo , Haruo Okano , Takashi Yamazaki
发明人: Hirosuke Ooshio , Tetsuo Aikawa , Hidetaka Jo , Haruo Okano , Takashi Yamazaki
CPC分类号: H01J37/3455 , H01J37/3408
摘要: A plurality of bar-like magnets are arranged in a vacuum chamber at an equal space interval to form a plurality of strong magnetic fields in a stripe-pattern form and the magnets are moved reciprocally in the direction of arrangement of the magnetic fields while changing gradually the stop points of the magnets over a work to be processed by etching or sputtering in a step-like manner so that the integral effect of each magnetic field acting on the work is uniform over the entire region of the work.
摘要翻译: 多个棒状磁体以等间距布置在真空室中,以形成条纹图案形式的多个强磁场,并且磁体在磁场的排列方向上往复移动,同时逐渐变化 通过蚀刻或溅射以阶梯状方式处理的工件上的磁体的停止点,使得作用在工件上的每个磁场的整体效应在工件的整个区域上是均匀的。
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公开(公告)号:US4199996A
公开(公告)日:1980-04-29
申请号:US860433
申请日:1977-12-14
申请人: Yoshinaga Moriwaki , Masashi Kamiya , Katsunobu Ueda , Masaharu Terashima , Tetsuo Aikawa , Tameyasu Tsukada , Hirosuke Ohshio
发明人: Yoshinaga Moriwaki , Masashi Kamiya , Katsunobu Ueda , Masaharu Terashima , Tetsuo Aikawa , Tameyasu Tsukada , Hirosuke Ohshio
IPC分类号: H01J37/20 , B23Q1/00 , B23Q1/26 , B23Q1/38 , B23Q1/62 , B23Q5/40 , B23Q11/00 , F16C29/02 , F16C32/06 , F16H27/02 , F16H29/02 , F16H29/20
CPC分类号: F16C32/0692 , B23Q1/38 , B23Q1/621 , B23Q11/0032 , F16C29/025 , Y10T74/18648 , Y10T74/20207
摘要: A precise feeding table apparatus which comprises an XY-table assembly including a Y-table and an X-table mounted thereon. Electric motors for supplying a driving force to feed the X- and Y-tables are set on a base of the table apparatus. A driving shaft of the electric motor for the Y-table takes the form of a ball screw to cause a guide carriage supported by the driving shaft to make a minute reciprocation. A moment derived from the reciprocation of the guide carraige is not directly transmitted to the Y-table. A connection rod moving jointly with the guide carriage is connected to an output shaft fitted to the Y-table by means of a coupling including a fluid bearing. The fluid bearing supports the connecting rod in contactless relationship, thereby preventing the vibrations and moments of the connecting rod from being transmitted to the output shaft.
摘要翻译: 一种精确的进给台装置,包括:XY台组件,其包括安装在其上的Y台和X台。 用于提供驱动力以馈送X和Y表的电动机设置在桌子装置的基座上。 用于Y台的电动机的驱动轴为滚珠丝杠的形式,使得由驱动轴支撑的导向滑架进行微小的往复运动。 来自导轨的往复运动的时刻不会直接发送到Y表。 与导向滑架一起移动的连接杆通过包括流体轴承的联轴器连接到安装到Y工作台的输出轴上。 流体轴承以非接触的方式支撑连杆,从而防止连杆的振动和力矩传递到输出轴。
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