公开(公告)号：US20070039944A1

公开(公告)日：2007-02-22

申请号：US11498378

申请日：2006-08-03

申请人： Hisakazu Okajima ,  Yoshinobu Goto

发明人： Hisakazu Okajima ,  Yoshinobu Goto

IPC分类号： H05B3/68

CPC分类号： H05B3/143 ,  H01L21/67103

摘要： A heater comprises a heating member formed in a plate shape that includes a substrate-heating surface on which a substrate is mounted and a heating member rear surface which is on the opposite side of the substrate-heating surface, has a resistance heating element embedded therein; and an auxiliary member that is placed on the side of the heating member rear surface of the heating member and has an opposing surface which opposes the heating member rear surface. A planar gas path that is a path for gas ejected on the substrate-heating surface is formed between the heating member rear surface and the opposing surface.

摘要翻译： 加热器包括形成为板状的加热构件，该加热构件包括其上安装有基板的基板加热面和位于基板加热面相反侧的加热构件后表面，其内嵌有电阻加热元件 ; 以及辅助部件，其设置在加热部件的加热部件背面的一侧，并具有与加热部件背面相对的相对面。 作为在基板加热面上喷出的气体的路径的平面气体路径形成在加热部件背面与相对面之间。

公开(公告)号：US07544916B2

公开(公告)日：2009-06-09

申请号：US11498413

申请日：2006-08-03

申请人： Hisakazu Okajima ,  Yoshinobu Goto

发明人： Hisakazu Okajima ,  Yoshinobu Goto

IPC分类号： H05B3/68 ,  C23C16/00

CPC分类号： H01L21/67103 ,  H01L21/67109

摘要： A heating device is provided, including a ceramic base in which a resistance heating body is embedded, gas flow passages formed in an inside portion of the base, and adjustment members which vary flow rates of a gas provided in the gas flow passages.

摘要翻译： 提供了一种加热装置，包括：陶瓷基体，其中嵌入有电阻加热体，形成在基部的内部的气体流路;以及调节构件，其改变设置在气体流路中的气体的流量。

公开(公告)号：US08294069B2

公开(公告)日：2012-10-23

申请号：US12053791

申请日：2008-03-24

申请人： Yoshinobu Goto ,  Hisakazu Okajima

发明人： Yoshinobu Goto ,  Hisakazu Okajima

IPC分类号： H05B3/44

CPC分类号： H05B3/283 ,  H01L21/67103 ,  H01L21/68785 ,  H01L21/68792 ,  H05B2203/014

摘要： A heating device made of ceramics includes: a plate-like heating base having a heating surface; and a hollow cylindrical support member bonded to a back surface of the heating base. A concave surface portion that connects the back surface of the heating base and an outer surface of the support member smoothly to each other is formed in the vicinity of an outer end of a bonding interface between the heating base and the support member. On a cross section including an axis of the support member, the concave surface portion has a curved line of an arc of a ellipsoid in which a minor axis direction is parallel to an axis direction of the support member.

摘要翻译： 由陶瓷制成的加热装置包括：具有加热面的板状加热基体; 以及结合到加热基座的后表面的中空圆柱形支撑构件。 在加热基座和支撑部件之间的接合界面的外端附近形成有将加热基板的后表面和支撑部件的外表面平滑连接的凹面部。 在包括支撑构件的轴线的横截面上，凹面部分具有短轴方向平行于支撑构件的轴线方向的椭圆弧的曲线。

公开(公告)号：US20080237221A1

公开(公告)日：2008-10-02

申请号：US12053791

申请日：2008-03-24

申请人： Yoshinobu Goto ,  Hisakazu Okajima

发明人： Yoshinobu Goto ,  Hisakazu Okajima

IPC分类号： H05B3/44

CPC分类号： H05B3/283 ,  H01L21/67103 ,  H01L21/68785 ,  H01L21/68792 ,  H05B2203/014

摘要： A heating device made of ceramics includes: a plate-like heating base having a heating surface; and a hollow cylindrical support member bonded to a back surface of the heating base. A concave surface portion that connects the back surface of the heating base and an outer surface of the support member smoothly to each other is formed in the vicinity of an outer end of a bonding interface between the heating base and the support member. On a cross section including an axis of the support member, the concave surface portion has a curved line of an arc of a ellipsoid in which a minor axis direction is parallel to an axis direction of the support member.

摘要翻译： 由陶瓷制成的加热装置包括：具有加热面的板状加热基体; 以及结合到加热基座的后表面的中空圆柱形支撑构件。 在加热基座和支撑部件之间的接合界面的外端附近形成有将加热基板的后表面和支撑部件的外表面平滑连接的凹面部。 在包括支撑构件的轴线的横截面上，凹面部分具有短轴方向平行于支撑构件的轴线方向的椭圆弧的曲线。

公开(公告)号：US07274006B2

公开(公告)日：2007-09-25

申请号：US11498378

申请日：2006-08-03

申请人： Hisakazu Okajima ,  Yoshinobu Goto

发明人： Hisakazu Okajima ,  Yoshinobu Goto

IPC分类号： H05B3/68 ,  C23C16/00

CPC分类号： H05B3/143 ,  H01L21/67103

摘要： A heater includes a heating member formed in a plate shape that includes a substrate-heating surface on which a substrate is mounted and a heating member rear surface which is on the opposite side of the substrate-heating surfaces. The heater also has a resistance heating element embedded therein. An auxiliary member is placed on the side of the heating member rear surface of the heating member and has an opposing surface which opposes the heating member rear surface. A planar gas path for gas ejected on the substrate-heating surface is formed between the heating member rear surface and the opposing surface.

摘要翻译： 加热器包括形成为板状的加热构件，该加热构件包括其上安装有基板的基板加热面和位于基板加热面相反一侧的加热构件背面。 加热器还具有嵌入其中的电阻加热元件。 辅助构件放置在加热构件的加热构件背面的一侧，并且具有与加热构件后表面相对的相对表面。 在加热构件后表面和相对表面之间形成用于喷射在基板加热表面上的气体的平面气体路径。

公开(公告)号：US20070215597A1

公开(公告)日：2007-09-20

申请号：US11687919

申请日：2007-03-19

申请人： Yoshinobu Goto ,  Hisakazu Okajima

发明人： Yoshinobu Goto ,  Hisakazu Okajima

IPC分类号： H05B3/68

CPC分类号： H05B3/143 ,  H01L21/67103

摘要： A heating device includes: a plate-shaped heating substrate; and a hollow rod material an end face of which is joined to one surface of the heating substrate, and the heating substrate includes a lateral surface portion and a concave surface portion in the vicinity of a joint with the hollow rod material. The lateral surface portion forms a same plane surface with an outer peripheral surface of the hollow rod material, and the concave surface portion connects to the lateral surface portion. Moreover, an edge of a joint interface of the heating substrate and the hollow rod material is located between the lateral surface portion of the heating substrate and the outer peripheral surface of the hollow rod material.

摘要翻译： 加热装置包括：板状加热基板; 以及中空棒材，其端面与所述加热基板的一个表面接合，所述加热基板在与所述中空棒材料的接合部附近具有侧面部和凹面部。 侧面部与中空棒材的外周面形成同一平面，凹面部与侧面部连接。 此外，加热基板和中空棒材料的接合界面的边缘位于加热基板的侧表面部分和中空棒材料的外周表面之间。

公开(公告)号：US20070033824A1

公开(公告)日：2007-02-15

申请号：US11498413

申请日：2006-08-03

申请人： Hisakazu Okajima ,  Yoshinobu Goto

发明人： Hisakazu Okajima ,  Yoshinobu Goto

IPC分类号： F26B17/30 ,  F26B25/18

CPC分类号： H01L21/67103 ,  H01L21/67109

摘要： A heating device includes: a base containing ceramics, in which a resistance heating body is embedded; gas flow passages formed in an inside of the base; and adjustment members which vary flow rates of gas in the gas flow passages.

摘要翻译： 一种加热装置，包括：包含陶瓷的基体，其中嵌有电阻加热体; 形成在基部内部的气流通道; 以及改变气体流动通道中的气体流量的调节构件。

公开(公告)号：US06875960B2

公开(公告)日：2005-04-05

申请号：US10244986

申请日：2002-09-17

申请人： Shinji Yamaguchi ,  Yoshinobu Goto ,  Hisakazu Okajima ,  Yutaka Unno

发明人： Shinji Yamaguchi ,  Yoshinobu Goto ,  Hisakazu Okajima ,  Yutaka Unno

IPC分类号： H05B3/20 ,  H01L21/00 ,  H01L21/324 ,  H05B3/00 ,  H05B3/16 ,  H05B3/18 ,  H05B3/68

CPC分类号： H01L21/67103

摘要： A heating system 25 has a main electric heat-generating element 3 and a heating surface 4a for heating an object, auxiliary electric heat-generating elements 5A to 5D, and a main power source 1 for supplying power to the main heating element. The system 25 further has an auxiliary power source 2 for supplying power to the auxiliary heating elements, and a power source controller for controlling the power supplied to the main heating element and to the auxiliary heating elements respectively and independently. Power supplied to the main heating element 3 is controlled by the controller within a first power range and power supplied to the auxiliary heating elements is controlled by the controller within a second power range. The second power range has a width smaller than that of the first power range so as to control temperature distribution on the heating surface 4a.

摘要翻译： 加热系统25具有主电热元件3和用于加热物体的加热面4a，辅助发热元件5A至5D和用于向主加热元件供电的主电源1。 系统25还具有用于向辅助加热元件供电的辅助电源2和分别独立地控制供给主加热元件和辅助加热元件的电力的电源控制器。 供给主加热元件3的电力由控制器在第一功率范围内控制，并且供给辅助加热元件的功率由控制器在第二功率范围内控制。 第二功率范围的宽度小于第一功率范围的宽度，以便控制加热表面4a上的温度分布。

公开(公告)号：US08794685B2

公开(公告)日：2014-08-05

申请号：US13468435

申请日：2012-05-10

申请人： Kenjiro Murakami ,  Kazuto Yoshimura ,  Yoshinobu Goto

发明人： Kenjiro Murakami ,  Kazuto Yoshimura ,  Yoshinobu Goto

IPC分类号： B25J15/08

CPC分类号： B25J15/10

摘要： A robot hand includes a palm section provided between a plurality of finger sections. The palm section may be brought into contact with an object while the object is gripped by the finger sections. The robot hand also includes a contact member that is detachably mounted on the palm section. The contact member may be brought into contact with the object instead of the palm section. Accordingly, even if an object is too small to be contacted by the palm section, it is possible to stably grip the small object since the contact member can be brought into contact with the object gripped by the finger sections instead of the palm section.

摘要翻译： 机器人手包括设置在多个指部之间的手掌部分。 当物体被手指部分夹住时，手掌部分可以与物体接触。 机器人手还包括可拆卸地安装在手掌部分上的接触构件。 接触构件可以与物体接触而不是掌状部分。 因此，即使物体太小而不能被手掌部分接触，也可以稳定地抓住小物体，因为接触构件可以与由手指部分夹持的物体而不是手掌部分接触。

公开(公告)号：US08748782B2

公开(公告)日：2014-06-10

申请号：US13190796

申请日：2011-07-26

申请人： Yoshinobu Goto

发明人： Yoshinobu Goto

IPC分类号： B23K10/00

CPC分类号： H05B3/143 ,  H01L21/67103 ,  H01L21/68792

摘要： The ceramic heater 20 includes the ceramic substrate 22 and a hollow shaft 40. The ceramic substrate 22 is disk-shaped, and a resistance heating element 24 is embedded in the ceramic substrate 22. The hollow shaft 40 is attached to the center of a lower surface of the ceramic substrate 22. The ceramic substrate 22 has a rail groove 26 to which a slide lid 28 is attached and a guide groove 30 that serves as a thermocouple conduit. Moreover, a tube 32 is disposed outside the shaft 40. The tube 32 extends in the up-down direction and is connected to the guide groove 30.

摘要翻译： 陶瓷加热器20包括陶瓷基板22和中空轴40.陶瓷基板22是盘状的，并且电阻加热元件24嵌入在陶瓷基板22中。中空轴40附接到下部的中心 陶瓷基板22的表面。陶瓷基板22具有轨道槽26，滑动盖28附接到该轨道槽26和用作热电偶管道的引导槽30。 此外，管32设置在轴40的外部。管32沿上下方向延伸并连接到引导槽30。