公开(公告)号：US20100147793A1

公开(公告)日：2010-06-17

申请号：US12635083

申请日：2009-12-10

申请人： Tadanobu Nagami ,  Junichi Kobayashi ,  Takeshi Terada ,  Makoto Watanabe ,  Hiroyuki Abo ,  Mitsunori Toshishige ,  Yoshinori Tagawa ,  Shuji Koyama ,  Kenji Fujii ,  Masaki Ohsumi ,  Jun Yamamuro ,  Hiroyuki Murayama ,  Yoshinobu Urayama ,  Taichi Yonemoto

发明人： Tadanobu Nagami ,  Junichi Kobayashi ,  Takeshi Terada ,  Makoto Watanabe ,  Hiroyuki Abo ,  Mitsunori Toshishige ,  Yoshinori Tagawa ,  Shuji Koyama ,  Kenji Fujii ,  Masaki Ohsumi ,  Jun Yamamuro ,  Hiroyuki Murayama ,  Yoshinobu Urayama ,  Taichi Yonemoto

IPC分类号： G11B5/127

CPC分类号： B41J2/1603 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1639 ,  Y10T29/49401

摘要： The present invention provides a method for producing a liquid discharge head including a silicon substrate having, on a first surface, energy generating elements, and a supply port penetrating the substrate from the first surface to a second surface, which is a rear surface of the first surface of the substrate. The method includes the steps of: preparing the silicon substrate having a sacrifice layer at a portion on the first surface where the ink supply port is to be formed and an etching mask layer having a plurality of openings on the second surface, the volume of a portion of the sacrifice layer at a position corresponding to a portion between two adjacent said openings being smaller than the volume of a portion of the sacrifice layer at a position corresponding to the opening; etching the silicon substrate from the plurality of openings and etching the sacrifice layer.

摘要翻译： 本发明提供了一种液体排出头的制造方法，该液体排出头包括硅基板，该第一表面在第一表面上具有能量产生元件和从第一表面穿过该基板的供给口， 基片的第一表面。 该方法包括以下步骤：在要形成供墨口的第一表面上的一部分制备具有牺牲层的硅衬底和在第二表面上具有多个开口的蚀刻掩模层， 牺牲层的与相邻的两个开口之间的部分相对应的位置处的部分比对应于开口的位置处的牺牲层的一部分的体积小; 从多个开口蚀刻硅衬底并蚀刻牺牲层。

公开(公告)号：US08329047B2

公开(公告)日：2012-12-11

申请号：US12635083

申请日：2009-12-10

申请人： Tadanobu Nagami ,  Junichi Kobayashi ,  Takeshi Terada ,  Makoto Watanabe ,  Hiroyuki Abo ,  Mitsunori Toshishige ,  Yoshinori Tagawa ,  Shuji Koyama ,  Kenji Fujii ,  Masaki Ohsumi ,  Jun Yamamuro ,  Hiroyuki Murayama ,  Yoshinobu Urayama ,  Taichi Yonemoto

发明人： Tadanobu Nagami ,  Junichi Kobayashi ,  Takeshi Terada ,  Makoto Watanabe ,  Hiroyuki Abo ,  Mitsunori Toshishige ,  Yoshinori Tagawa ,  Shuji Koyama ,  Kenji Fujii ,  Masaki Ohsumi ,  Jun Yamamuro ,  Hiroyuki Murayama ,  Yoshinobu Urayama ,  Taichi Yonemoto

IPC分类号： G01D15/00

CPC分类号： B41J2/1603 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1639 ,  Y10T29/49401

摘要： The present invention provides a method for producing a liquid discharge head including a silicon substrate having, on a first surface, energy generating elements, and a supply port penetrating the substrate from the first surface to a second surface, which is a rear surface of the first surface of the substrate. The method includes the steps of: preparing the silicon substrate having a sacrifice layer at a portion on the first surface where the ink supply port is to be formed and an etching mask layer having a plurality of openings on the second surface, the volume of a portion of the sacrifice layer at a position corresponding to a portion between two adjacent said openings being smaller than the volume of a portion of the sacrifice layer at a position corresponding to the opening; etching the silicon substrate from the plurality of openings and etching the sacrifice layer.

摘要翻译： 本发明提供了一种液体排出头的制造方法，该液体排出头包括硅基板，该第一表面在第一表面上具有能量产生元件和从第一表面穿过该基板的供给口， 基片的第一表面。 该方法包括以下步骤：在要形成供墨口的第一表面上的一部分制备具有牺牲层的硅衬底和在第二表面上具有多个开口的蚀刻掩模层， 牺牲层的与相邻的两个开口之间的部分相对应的位置处的部分比对应于开口的位置处的牺牲层的一部分的体积小; 从多个开口蚀刻硅衬底并蚀刻牺牲层。

公开(公告)号：US20090303289A1

公开(公告)日：2009-12-10

申请号：US12476541

申请日：2009-06-02

申请人： Yoshinori Tagawa ,  Junichi Kobayashi ,  Kenji Fujii ,  Hiroyuki Murayama ,  Makoto Watanabe ,  Taichi Yonemoto

发明人： Yoshinori Tagawa ,  Junichi Kobayashi ,  Kenji Fujii ,  Hiroyuki Murayama ,  Makoto Watanabe ,  Taichi Yonemoto

IPC分类号： B41J2/14

CPC分类号： B41J2/1603 ,  B41J2/1433 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1635 ,  B41J2/1639 ,  B41J2/1645

摘要： A liquid discharge recording head includes a flow passage forming member having discharge ports and a flow passage, the discharge ports configured to discharge droplets, the flow passage communicating with the discharge ports. The flow passage forming member also has a first opening and a second opening, the first opening provided at a surface of the flow passage forming member with the discharge ports, the second opening causing the inside of the first opening to communicate with the outside of the flow passage forming member through a communication passage.

摘要翻译： 液体排出记录头包括具有排出口和流路的流路形成构件，排出口构成为排出液滴，流路与排出口连通。 流路形成构件还具有第一开口和第二开口，第一开口设置在流路形成构件的表面具有排出口，第二开口使第一开口的内部与第二开口的外部连通 流路形成构件。

公开(公告)号：US08147034B2

公开(公告)日：2012-04-03

申请号：US12476541

申请日：2009-06-02

申请人： Yoshinori Tagawa ,  Junichi Kobayashi ,  Kenji Fujii ,  Hiroyuki Murayama ,  Makoto Watanabe ,  Taichi Yonemoto

发明人： Yoshinori Tagawa ,  Junichi Kobayashi ,  Kenji Fujii ,  Hiroyuki Murayama ,  Makoto Watanabe ,  Taichi Yonemoto

IPC分类号： B41J2/135

CPC分类号： B41J2/1603 ,  B41J2/1433 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1635 ,  B41J2/1639 ,  B41J2/1645

摘要： A liquid discharge recording head includes a flow passage forming member having discharge ports and a flow passage, the discharge ports configured to discharge droplets, the flow passage communicating with the discharge ports. The flow passage forming member also has a first opening and a second opening, the first opening provided at a surface of the flow passage forming member with the discharge ports, the second opening causing the inside of the first opening to communicate with the outside of the flow passage forming member through a communication passage.

摘要翻译： 液体排出记录头包括具有排出口和流路的流路形成构件，排出口构成为排出液滴，流路与排出口连通。 流路形成构件还具有第一开口和第二开口，第一开口设置在流路形成构件的表面具有排出口，第二开口使第一开口的内部与第二开口的外部连通 流路形成构件。

公开(公告)号：US08128204B2

公开(公告)日：2012-03-06

申请号：US13009709

申请日：2011-01-19

申请人： Noriyasu Ozaki ,  Junichi Kobayashi ,  Shuji Koyama ,  Tadanobu Nagami ,  Yoshinori Tagawa ,  Kenji Fujii ,  Hiroyuki Murayama ,  Masaki Ohsumi ,  Jun Yamamuro ,  Yoshinobu Urayama ,  Hiroyuki Abo ,  Takeshi Terada ,  Masahisa Watanabe ,  Taichi Yonemoto

发明人： Noriyasu Ozaki ,  Junichi Kobayashi ,  Shuji Koyama ,  Tadanobu Nagami ,  Yoshinori Tagawa ,  Kenji Fujii ,  Hiroyuki Murayama ,  Masaki Ohsumi ,  Jun Yamamuro ,  Yoshinobu Urayama ,  Hiroyuki Abo ,  Takeshi Terada ,  Masahisa Watanabe ,  Taichi Yonemoto

IPC分类号： B41J2/05 ,  B41J2/04 ,  G11B5/127 ,  B21D53/76

CPC分类号： B41J2/14129 ,  B41J2202/11 ,  Y10T29/49401

摘要： A liquid ejection head and a method of forming the same. The liquid ejection head includes a substrate, an ejection port, a liquid channel, and a supply port. The substrate has, above one side thereof, an energy generating element configured to generate energy used to eject liquid. The ejection port, from which a liquid is ejected, is located at a position corresponding to the energy generating element. The liquid channel communicates with the ejection port and penetrates the substrate from the one side to another side of the substrate. The supply port communicates with the liquid channel. The substrate has a projecting layer extending inward of an inner peripheral portion of an opening in the supply port in the one side, and the projecting layer and the energy generating element are formed of the same material.

摘要翻译： 液体喷射头及其形成方法。 液体喷射头包括基板，喷射口，液体通道和供给口。 衬底在其一侧上具有被配置为产生用于喷射液体的能量的能量产生元件。 排出液体的喷射口位于与能量产生元件相对应的位置。 液体通道与喷射口连通并从衬底的一侧到另一侧穿透衬底。 供应口与液体通道连通。 基板具有从一侧的供给口的开口的内周部向内延伸的突出层，突出层和能量产生元件由相同的材料形成。

公开(公告)号：US20090007428A1

公开(公告)日：2009-01-08

申请号：US12145428

申请日：2008-06-24

申请人： Taichi Yonemoto ,  Junichi Kobayashi ,  Yoshinori Tagawa ,  Hideo Tamura ,  Hiroyuki Murayama ,  Kenji Fujii ,  Keiji Watanabe

发明人： Taichi Yonemoto ,  Junichi Kobayashi ,  Yoshinori Tagawa ,  Hideo Tamura ,  Hiroyuki Murayama ,  Kenji Fujii ,  Keiji Watanabe

IPC分类号： B21D53/76

CPC分类号： B41J2/1603 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1645 ,  B41J2002/14475 ,  Y10T29/42 ,  Y10T29/49401

摘要： A method of manufacturing a liquid discharge head including a plurality of passages on a substrate, the passages communicating with a plurality of discharge ports configured to discharge liquid. The method includes the step of forming first to fourth patterns, the first pattern having a shape of one passage of the passages, the second pattern having a shape of other passage of the passages, the third pattern being formed near the first pattern, the fourth pattern being formed near the second pattern, the first to fourth patterns being formed on the substrate. The method also includes coating the substrate with a cover layer covering the first to fourth patterns, removing the first pattern to form the one passage, and removing the second pattern to form the other passage.

摘要翻译： 一种制造在基板上具有多个通道的排液头的方法，所述通道与多个配置成排出液体的排出口连通。 该方法包括形成第一至第四图案的步骤，第一图案具有通道的一个通道的形状，第二图案具有通道的另一通道的形状，第三图案形成在第一图案附近，第四图案 图案形成在第二图案附近，第一至第四图案形成在基板上。 该方法还包括用覆盖第一至第四图案的覆盖层涂覆基板，移除第一图案以形成一个通道，以及移除第二图案以形成另一通道。

公开(公告)号：US08037603B2

公开(公告)日：2011-10-18

申请号：US11738782

申请日：2007-04-23

申请人： Kenji Fujii ,  Junichi Kobayashi ,  Yoshinori Tagawa ,  Hideo Tamura ,  Hiroyuki Murayama ,  Keiji Watanabe ,  Taichi Yonemoto ,  Isamu Horiuchi ,  Aya Yoshihira ,  Masamichi Yoshinari ,  Jun Kawai ,  Tamaki Sato

发明人： Kenji Fujii ,  Junichi Kobayashi ,  Yoshinori Tagawa ,  Hideo Tamura ,  Hiroyuki Murayama ,  Keiji Watanabe ,  Taichi Yonemoto ,  Isamu Horiuchi ,  Aya Yoshihira ,  Masamichi Yoshinari ,  Jun Kawai ,  Tamaki Sato

IPC分类号： B21D53/76 ,  B23P17/00 ,  B41J2/015 ,  B41J2/15 ,  B41J2/145 ,  B41J2/135

CPC分类号： B41J2/1603 ,  B41J2/1404 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1635 ,  B41J2/1639 ,  B41J2/1645 ,  B41J2002/14403 ,  Y10T29/49401

摘要： An ink jet head producing method includes forming a first flow path forming member in a portion constituting a flow path side wall, which constitutes at least a partitioning portion between flow paths on a substrate; forming a pattern as a mold for the flow path, the pattern being formed over the substrate and a portion of the first flow path forming member; forming a second flow path forming member on the first flow path forming member and the pattern, the second flow path forming member being formed of a material corresponding to the first flow path forming member; forming the discharge port in the second flow path forming member; and forming the flow path by removing the pattern.

摘要翻译： 喷墨头的制造方法包括：在构成流路侧壁的部分中形成第一流路形成部件，其至少构成在基板上的流路之间的分隔部; 形成作为流路的模具的图案，所述图案形成在所述基板的上方和所述第一流路形成部件的一部分上; 在所述第一流路形成部件和所述图案上形成第二流路形成部件，所述第二流路形成部件由与所述第一流路形成部件对应的材料形成; 在第二流路形成构件中形成排出口; 并通过去除图案形成流路。

公开(公告)号：US07891784B2

公开(公告)日：2011-02-22

申请号：US12019505

申请日：2008-01-24

申请人： Noriyasu Ozaki ,  Junichi Kobayashi ,  Shuji Koyama ,  Tadanobu Nagami ,  Yoshinori Tagawa ,  Kenji Fujii ,  Hiroyuki Murayama ,  Masaki Ohsumi ,  Jun Yamamuro ,  Yoshinobu Urayama ,  Hiroyuki Abo ,  Takeshi Terada ,  Masahisa Watanabe ,  Taichi Yonemoto

发明人： Noriyasu Ozaki ,  Junichi Kobayashi ,  Shuji Koyama ,  Tadanobu Nagami ,  Yoshinori Tagawa ,  Kenji Fujii ,  Hiroyuki Murayama ,  Masaki Ohsumi ,  Jun Yamamuro ,  Yoshinobu Urayama ,  Hiroyuki Abo ,  Takeshi Terada ,  Masahisa Watanabe ,  Taichi Yonemoto

IPC分类号： B41J2/045

CPC分类号： B41J2/14129 ,  B41J2202/11 ,  Y10T29/49401

摘要： A liquid ejection head and a method of forming the same. The liquid ejection head includes a substrate, an ejection port, a liquid channel, and a supply port. The substrate has, above one side thereof, an energy generating element configured to generate energy used to eject liquid. The ejection port, from which a liquid is ejected, is located at a position corresponding to the energy generating element. The liquid channel communicates with the ejection port and penetrates the substrate from the one side to another side of the substrate. The supply port communicates with the liquid channel. The substrate has a projecting layer extending inward of an inner peripheral portion of an opening in the supply port in the one side, and the projecting layer and the energy generating element are formed of the same material.

摘要翻译： 液体喷射头及其形成方法。 液体喷射头包括基板，喷射口，液体通道和供给口。 衬底在其一侧上具有被配置为产生用于喷射液体的能量的能量产生元件。 排出液体的喷射口位于与能量产生元件相对应的位置。 液体通道与喷射口连通并从衬底的一侧到另一侧穿透衬底。 供应口与液体通道连通。 基板具有从一侧的供给口的开口的内周部向内延伸的突出层，突出层和能量产生元件由相同的材料形成。

公开(公告)号：US08091233B2

公开(公告)日：2012-01-10

申请号：US12145428

申请日：2008-06-24

申请人： Taichi Yonemoto ,  Junichi Kobayashi ,  Yoshinori Tagawa ,  Hideo Tamura ,  Hiroyuki Murayama ,  Kenji Fujii ,  Keiji Watanabe

发明人： Taichi Yonemoto ,  Junichi Kobayashi ,  Yoshinori Tagawa ,  Hideo Tamura ,  Hiroyuki Murayama ,  Kenji Fujii ,  Keiji Watanabe

IPC分类号： B21D53/76 ,  B23P17/00 ,  H01L41/22 ,  H04R17/00

CPC分类号： B41J2/1603 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1645 ,  B41J2002/14475 ,  Y10T29/42 ,  Y10T29/49401

摘要： A method of manufacturing a liquid discharge head including a plurality of passages on a substrate, the passages communicating with a plurality of discharge ports configured to discharge liquid. The method includes the step of forming first, second, third, and fourth members, the first member having a shape of one passage, the second member having a shape of another member, the third member being formed near the first member, the fourth member being formed near the second member, the first to fourth members being formed on a surface of the substrate. The method also includes coating the substrate with a cover layer covering the first to fourth members, removing the first member to form the one passage, and removing the second member to form the another passage.

摘要翻译： 一种制造在基板上具有多个通道的排液头的方法，所述通道与多个配置成排出液体的排出口连通。 该方法包括形成第一，第二，第三和第四构件的步骤，第一构件具有一个通道的形状，第二构件具有另一构件的形状，第三构件形成在第一构件附近，第四构件 在第二构件附近形成，第一至第四构件形成在基板的表面上。 该方法还包括用覆盖第一至第四构件的覆盖层涂覆基板，移除第一构件以形成一个通道，并且移除第二构件以形成另一通道。

公开(公告)号：US08148049B2

公开(公告)日：2012-04-03

申请号：US11680821

申请日：2007-03-01

申请人： Hiroyuki Murayama ,  Junichi Kobayashi ,  Yoshinori Tagawa ,  Kenji Fujii ,  Hideo Tamura ,  Taichi Yonemoto ,  Keiji Watanabe

发明人： Hiroyuki Murayama ,  Junichi Kobayashi ,  Yoshinori Tagawa ,  Kenji Fujii ,  Hideo Tamura ,  Taichi Yonemoto ,  Keiji Watanabe

IPC分类号： G03C5/00

CPC分类号： B41J2/1604 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1632 ,  B41J2/1635 ,  B41J2/1639 ,  B41J2/1645 ,  B41J2002/14475

摘要： A manufacturing method of an ink jet recording head includes steps of forming a liquid flow path mold material of a soluble resin on a substrate on which an energy generating element is formed, the energy generating element being configured to generate energy for use in discharging ink; forming a coating resin layer of a negative photosensitive resin on the substrate on which the mold material is formed; exposing and developing the coating resin layer to form an ink discharge port in the coating resin layer; and dissolving and removing the mold material to form a liquid flow path. During the exposing of the coating resin layer, a total amount of exposure energy per unit area applied to an exposure region other than a region of the coating resin layer positioned above the mold material is greater than that of exposure energy per unit area applied to the region of the coating resin layer positioned above the mold material.

摘要翻译： 喷墨记录头的制造方法包括以下步骤：在其上形成有能量产生元件的基板上形成可溶性树脂的液体流路模具材料，所述能量产生元件被配置为产生用于排出墨水的能量; 在其上形成有模具材料的基板上形成负型感光性树脂的涂布树脂层; 曝光和显影涂层树脂层以在涂布树脂层中形成墨水排出口; 并溶解和去除模具材料以形成液体流动路径。 在涂布树脂层的曝光期间，施加到位于模具材料上方的涂布树脂层以外的曝光区域的单位面积的曝光能量的总量大于施加到模具材料的每单位面积的曝光能量的总量 涂覆树脂层的位于模具材料上方的区域。