-
1.发明授权A method of image-wise exposing and developing halogen-containing polyacrylate derivatives 失效一种成像曝光和开发含卤素的聚丙烯酸酯衍生物的方法
公开(公告)号：US4822721A
公开(公告)日：1989-04-18
申请号：US123799
申请日：1987-11-23
摘要： Halogen-containing polyacrylate derivatives having the formula: ##STR1## wherein A is a structural unit derived from a copolymeriazable monomer having a double bond; R is ##STR2## wherein each of R.sub.1 and R.sub.2 is a hydrogen atom or a fluorinated methyl group, provided R.sub.1 and R.sub.2 are not hydrogen atoms at the same time, and R.sub.3 is a hydrogen atom or a lower alkyl group; X is a halogen atom or a methyl group; and m is a positive integer, n is 0 or a positive integer, and n/m from 0 to 2, preferably from 0 to 1 are disclosed.Also disclosed are methods for forming a resist pattern by using the halogen-containing polyacrylate derivatives as a resist material.
-
公开(公告)号：US4752635A
公开(公告)日：1988-06-21
申请号：US946055
申请日：1986-12-24
摘要： A halogen-containing polyacrylate derivative having the formula: ##STR1## wherein A is a structural unit derived from a copolymerizable monomer having a double bond; R is ##STR2## wherein each of R.sub.1 and R.sub.2 is a hydrogen atom or a fluorinated methyl group, provided R.sub.1 and R.sub.2 are not hydrogen atoms at the same time, and R.sub.3 is a hydrogen atom or a lower alkyl group; X is a halogen atom or a methyl group; and m is a positive integer, n is 0 or a positive integer, and n/m is from 0 to 2, preferably from 0 to 1.
摘要翻译： 具有下式的含卤素聚丙烯酸酯衍生物：其中A是衍生自具有双键的可共聚单体的结构单元; R为
，其中R1和R2各自为氢原子或氟化甲基，其中R1和R2不同时为氢原子，R3为氢原子或低级烷基; X是卤素原子或甲基; m为正整数，n为0或正整数，n / m为0〜2，优选为0〜1。
-
搜索结果
2 条记录 (耗时 0.015 秒)