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公开(公告)号：US07364349B2
公开(公告)日：2008-04-29
申请号：US11439303
申请日：2006-05-22
IPC分类号： B01F15/04
CPC分类号： H01L21/67253 , G05D11/133
摘要： A dilution stage is adapted to supply a dilute chemistry to a semiconductor device processing apparatus. The dilution stage includes a first vessel adapted to store the chemistry after dilution and a second vessel adapted to store the chemistry prior to dilution. The dilution stage may also include a control mechanism which is adapted to selectively control flowing of the chemistry and a dilutant to the first vessel. The control mechanism may be operative to fill the second vessel with the chemistry, and to flow the dilutant to the first vessel via the second vessel.
摘要翻译： 稀释阶段适于向半导体器件处理设备提供稀释化学物质。 稀释阶段包括适于在稀释后储存化学物质的第一容器和适于在稀释之前储存化学物质的第二容器。 稀释阶段还可以包括适于选择性地控制化学物质和稀释剂流向第一容器的控制机构。 控制机构可操作以用化学物质填充第二容器，并且通过第二容器将稀释剂流经第一容器。
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公开(公告)号：US20060211344A1
公开(公告)日：2006-09-21
申请号：US11439303
申请日：2006-05-22
IPC分类号： B24B1/00
CPC分类号： H01L21/67253 , G05D11/133
摘要： A dilution stage is adapted to supply a dilute chemistry to a semiconductor device processing apparatus. The dilution stage includes a first vessel adapted to store the chemistry after dilution and a second vessel adapted to store the chemistry prior to dilution. The dilution stage may also include a control mechanism which is adapted to selectively control flowing of the chemistry and a dilutant to the first vessel. The control mechanism may be operative to fill the second vessel with the chemistry, and to flow the dilutant to the first vessel via the second vessel.
摘要翻译： 稀释阶段适于向半导体器件处理设备提供稀释化学物质。 稀释阶段包括适于在稀释后储存化学物质的第一容器和适于在稀释之前储存化学物质的第二容器。 稀释阶段还可以包括适于选择性地控制化学物质和稀释剂流向第一容器的控制机构。 控制机构可操作以用化学物质填充第二容器，并且通过第二容器将稀释剂流经第一容器。
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公开(公告)号：US07063455B2
公开(公告)日：2006-06-20
申请号：US10338249
申请日：2003-01-06
IPC分类号： B01F15/04
CPC分类号： H01L21/67253 , G05D11/133
摘要： A dilution stage is adapted to supply a dilute chemistry to a semiconductor device processing apparatus. The dilution stage includes a first vessel adapted to store the chemistry after dilution and a second vessel adapted to store the chemistry prior to dilution. The dilution stage may also include a control mechanism which is adapted to selectively control flowing of the chemistry and a dilutant to the first vessel. The control mechanism may be operative to fill the second vessel with the chemistry, and to flow the dilutant to the first vessel via the second vessel.
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公开(公告)号：US07160637B2
公开(公告)日：2007-01-09
申请号：US10445736
申请日：2003-05-27
申请人： Mu Chiao , Liwei Lin , Kien-Bang Lam
发明人： Mu Chiao , Liwei Lin , Kien-Bang Lam
CPC分类号： H01M8/0206 , H01M8/0215 , H01M8/0228 , H01M8/16 , Y02E60/527
摘要： A miniaturized microbial fuel cell is described deriving electrical power from the biological activity of microbes, typically the metabolism of glucose by baker's yeast. Microfabrication techniques are used to miniaturize the components as well as the overall fuel cell and are capable of integration with other biomedical and implantable devices. Substantial reductions in both the size and the cost of implantable systems are thereby achievable. Electrode structures are used that facilitate electron transfer and power production giving favorable power densities in a miniature fuel cell. In addition, the microbial fuel cell of the present invention extracts glucose or other metabolite(s) from the ambient body fluids as its fuel, thus achieving a renewable, long-term power source for implantable biomedical devices.
摘要翻译： 描述了一种微型化的微生物燃料电池，其通过微生物的生物活性导出电功率，通常是面包酵母的葡萄糖代谢。 微加工技术用于使组件以及总体燃料电池小型化，并且能够与其他生物医学和可植入装置集成。 因此可实现可植入式系统的大小和成本的大幅度降低。 使用电极结构，其促进电子转移和功率产生，从而在微型燃料电池中提供有利的功率密度。 此外，本发明的微生物燃料电池从周围体液中提取葡萄糖或其它代谢物作为其燃料，从而实现用于可植入的生物医学装置的可再生的长期电源。
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