Method for Manufacturing Image Sensor
    2.
    发明申请
    Method for Manufacturing Image Sensor 审中-公开
    图像传感器制造方法

    公开(公告)号:US20080293182A1

    公开(公告)日:2008-11-27

    申请号:US12125635

    申请日:2008-05-22

    IPC分类号: H01L31/0232

    摘要: Disclosed are methods of manufacturing an image sensor. The method can include forming a microlens by depositing photoresist bubbles on a substrate. The photoresist bubbles can be formed and deposited using an inkjet scheme. A curing process of the photoresist can be performed during formation of the photoresist bubbles before the photoresist bubbles are deposited on the substrate. In one embodiment, the photoresist bubbles can be color photoresist bubbles to form a color microlens that can function as a color filter and a microlens.

    摘要翻译: 公开了制造图像传感器的方法。 该方法可以包括通过在衬底上沉积光致抗蚀剂气泡来形成微透镜。 可以使用喷墨方案来形成和沉积光致抗蚀剂气泡。 在光致抗蚀剂气泡沉积在基板上之前,可以在形成光致抗蚀剂气泡期间执行光致抗蚀剂的固化过程。 在一个实施例中,光致抗蚀剂气泡可以是彩色光致抗蚀剂气泡,以形成可用作滤色器和微透镜的彩色微透镜。