公开(公告)号：US20090324824A1

公开(公告)日：2009-12-31

申请号：US12417231

申请日：2009-04-02

申请人： Young Joon BAIK ,  Won Mok KIM ,  Kyeong Seok LEE ,  Jong-Keuk PARK ,  Jeung-hyun JEONG ,  Suyoun LEE ,  Taek Sung LEE

发明人： Young Joon BAIK ,  Won Mok KIM ,  Kyeong Seok LEE ,  Jong-Keuk PARK ,  Jeung-hyun JEONG ,  Suyoun LEE ,  Taek Sung LEE

IPC分类号： C23C16/00 ,  B05D1/36

CPC分类号： C30B29/16 ,  C23C16/407 ,  C30B25/02 ,  C30B28/12

摘要： Disclosed is a method for growing a thin film, which includes modifying a surface grain size and surface roughness on a thin film to improve the mobility of a carrier and a light scattering effect. The method for growing a thin film includes: forming nuclei of grains having various grain orientations on a substrate; causing first grains having a first specific grain orientation to grow predominantly among the grains having various grain orientations, thereby forming a first preferred texture comprised of the predominantly grown first grains; and then causing second grains having a second grain orientation to grow predominantly, thereby forming a second preferred texture comprised of the predominantly grown second grains, wherein the surface grain size of each of the second grains forming the second texture is larger than that of each of the first grains forming the first texture.

摘要翻译： 公开了一种用于生长薄膜的方法，其包括改变薄膜上的表面粒径和表面粗糙度以提高载体的迁移率和光散射效应。 生长薄膜的方法包括：在基板上形成具有各种晶粒取向的晶粒的核; 使得具有第一特定晶粒取向的第一晶粒主要在具有各种晶粒取向的晶粒中生长，由此形成由主要生长的第一晶粒组成的第一优选纹理; 然后使具有第二晶粒取向的第二晶粒主要生长，从而形成由主要生长的第二晶粒组成的第二优选纹理，其中形成第二纹理的每个第二晶粒的表面粒径大于 第一颗粒形成第一纹理。