公开(公告)号：US08114256B2

公开(公告)日：2012-02-14

申请号：US11948118

申请日：2007-11-30

申请人： Yu Chang ,  William Kuang ,  Ronald D Dedore ,  Jitendra R. Bhimjiyani ,  Wesley W Zhang

发明人： Yu Chang ,  William Kuang ,  Ronald D Dedore ,  Jitendra R. Bhimjiyani ,  Wesley W Zhang

IPC分类号： C23C14/35

CPC分类号： C23C14/35 ,  C23C14/54 ,  H01J37/3408 ,  H01J37/3455

摘要： A control system and method for controlling two motors determining the azimuthal and circumferential position of a magnetron rotating about the central axis of the sputter chamber in back of its target sputtering and capable of a nearly arbitrary scan path, e.g., with a planetary gear mechanism. A system controller periodically sends commands to the motion controller which closely controls the motors. Each command includes a command ticket, which may be one of several values. The motion controller accepts only commands having a command ticket of a different value from the immediately preceding command. One command selects a scan profile stored in the motion controller, which calculates motor signals from the selected profile. Another command instructs a dynamic homing command which interrogates sensors of the position of two rotating arms to determine if the arms in the expected positions. If not, the arms are rehomed.

摘要翻译： 一种用于控制两个电动机的控制系统和方法，所述两个电动机确定围绕其目标溅射背面的溅射室的中心轴线旋转的磁控管的方位角和圆周位置，并且能够以几乎任意的扫描路径，例如用行星齿轮机构。 系统控制器周期性地向控制电机的运动控制器发送命令。 每个命令包括一个命令票证，它可以是几个值之一。 运动控制器仅接受具有与前一个命令不同的命令票证的命令。 一个命令选择存储在运动控制器中的扫描轮廓，其从所选轮廓计算马达信号。 另一个命令指示动态归位命令，其询问两个旋转臂的位置的传感器以确定臂在预期位置。 如果没有，武器被重新安置。