公开(公告)号：US06140232A

公开(公告)日：2000-10-31

申请号：US386673

申请日：1999-08-31

Applicant: Yu-Tsai Lin ,  Kun-Lin Wu

Inventor： Yu-Tsai Lin ,  Kun-Lin Wu

IPC: H01L21/28 ,  H01L21/285 ,  H01L21/336 ,  H01L21/283

CPC classification number: H01L29/66515 ,  H01L21/28052 ,  H01L21/28518

Abstract: A method for forming narrow line width silicide having reduced sheet resistance is disclosed by the present invention. The method includes: firstly, providing a semiconductor substrate, whereon there formed at least a source/drain region and a gate region, as well as a spacer formed on a sidewall of the gate region; then, depositing a titanium metal layer overlying the semiconductor substrate and the resulting structure; next, carrying out rapid thermal processing and RCA cleaning to form a first titanium silicide layer; consequentially, forming a selective polysilicon layer over the first titanium silicide layer; and, depositing a second titanium metal layer over the selective polysilicon layer and overlying the exposed surface of spacer; finally, carrying out rapid thermal processing and RCA cleaning once again to form a second titanium silicide layer. The overall thickness of titanium silicide is depending on the requiring resistance of titanium silicide under a certain line width.

Abstract translation: 通过本发明公开了一种形成具有降低的薄层电阻的窄线宽度硅化物的方法。 该方法包括：首先提供半导体衬底，其中至少形成源极/漏极区域和栅极区域，以及形成在栅极区域的侧壁上的间隔物; 然后沉积覆盖半导体衬底的钛金属层和所得结构; 接下来，进行快速热处理和RCA清洗以形成第一硅化钛层; 从而在第一钛硅化物层上形成选择性多晶硅层; 并且在所述选择性多晶硅层上沉积第二钛金属层并且覆盖所述间隔物的暴露表面; 最后进行快速热处理和RCA清洗再次形成第二硅化钛层。 硅化钛的总厚度取决于一定线宽度下硅化钛的要求电阻。

公开(公告)号：US06881108B2

公开(公告)日：2005-04-19

申请号：US10633527

申请日：2003-08-05

Applicant: Yu-Tsai Lin

Inventor： Yu-Tsai Lin

IPC: B60F3/00 ,  B63B35/85 ,  B63B43/02 ,  B63C1/00

CPC classification number: B60F3/0038

Abstract: The present invention relates to a system to float an automobile on water. The system comprises holder assemblies, a detecting sensor, a pneumatic system, envelopes, a propulsive system, and a steering system. The holder assemblies are fixed on the beams of the automobile. The pneumatic system is connected to air inlets of the envelopes with pipes and to a battery with a circuit. The envelopes are fixed at the holder assemblies. When the pneumatic system operates, the envelopes expand to float the automobile on water. The detecting sensor connects to the pneumatic system, the battery, and a first switch with circuits. The propulsive system connects to the battery and a second switch with circuits. The steering system comprises two steering boards that are fixed on fellies of the automobile.

Abstract translation: 本发明涉及将汽车浮在水面上的系统。 该系统包括保持器组件，检测传感器，气动系统，信封，推进系统和转向系统。 保持器组件固定在汽车的梁上。 气动系统通过管道和带有电路的电池连接到信封的空气入口。 信封固定在支架组件上。 当气动系统运行时，信封膨胀以将汽车浮在水面上。 检测传感器连接到气动系统，电池和具有电路的第一开关。 推进系统连接到电池和带电路的第二个开关。 转向系统包括固定在汽车兜里的两个转向板。

公开(公告)号：US5704667A

公开(公告)日：1998-01-06

申请号：US728053

申请日：1996-10-09

Applicant: Yu-Tsai Lin

Inventor： Yu-Tsai Lin

IPC: H01L21/677 ,  B65D25/28

CPC classification number: H01L21/67778

Abstract: A high-strength transportation frame for carrying wafer boats between processing stations in a semiconductor fabrication facility includes a pair of transporting rods each having a corresponding grip portion, a number of fixing elements, and a pair of connecting rods. The connecting rods extend parallel to each other and are connected to each of the pair of transporting rods at remote ends thereof, the connections being secured by the fixing elements.

Abstract translation: 用于在半导体制造设备中的处理站之间承载晶片舟的高强度运输框架包括一对输送杆，每个输送杆具有对应的握持部分，多个固定元件和一对连接杆。 连接杆彼此平行延伸，并且在其远端处连接到一对传送杆中的每一个，连接件通过固定元件固定。

公开(公告)号：US20050032443A1

公开(公告)日：2005-02-10

申请号：US10633527

申请日：2003-08-05

Applicant: Yu-Tsai Lin

Inventor： Yu-Tsai Lin

IPC: B60F3/00 ,  B63B35/85 ,  B63B43/02 ,  B63C1/00

CPC classification number: B60F3/0038

Abstract: The present invention relates to a system to float an automobile on water. The system comprises holder assemblies, a detecting sensor, a pneumatic system, envelopes, a propulsive system, and a steering system. The holder assemblies are fixed on the beams of the automobile. The pneumatic system is connected to air inlets of the envelopes with pipes and to a battery with a circuit. The envelopes are fixed at the holder assemblies. When the pneumatic system operates, the envelopes expand to float the automobile on water. The detecting sensor connects to the pneumatic system, the battery, and a first switch with circuits. The propulsive system connects to the battery and a second switch with circuits. The steering system comprises two steering boards that are fixed on fellies of the automobile.

Abstract translation: 本发明涉及将汽车浮在水面上的系统。 该系统包括保持器组件，检测传感器，气动系统，信封，推进系统和转向系统。 保持器组件固定在汽车的梁上。 气动系统通过管道和带有电路的电池连接到信封的空气入口。 信封固定在支架组件上。 当气动系统运行时，信封膨胀以将汽车浮在水面上。 检测传感器连接到气动系统，电池和具有电路的第一开关。 推进系统连接到电池和带电路的第二个开关。 转向系统包括固定在汽车兜里的两个转向板。

公开(公告)号：US5669768A

公开(公告)日：1997-09-23

申请号：US616369

申请日：1996-03-15

Applicant: Yu-Tsai Lin ,  Edward Houn ,  Ben Chen

Inventor： Yu-Tsai Lin ,  Edward Houn ,  Ben Chen

IPC: C30B31/16 ,  C30B33/00 ,  F27D3/16 ,  F27B5/04

CPC classification number: C30B31/16 ,  C30B33/005 ,  F27D3/16

Abstract: An improved apparatus is provided for adjusting a gas injector of a furnace in connection with oxidation, diffusion and heat treating in semiconductor processing. The apparatus includes a reaction tube for serving as a reaction chamber and heat sink. The gas injector is coupled to the reaction tube on one end and includes openings on the other end for passing source gas. An elongated open tube is secured to the gas injector and has its axis superimposed approximately on the axis of the gas injector.

Abstract translation: 提供了一种改进的装置，用于在半导体加工中调节与氧化，扩散和热处理有关的炉的气体注射器。 该装置包括用作反应室和散热器的反应管。 气体喷射器在一端连接到反应管，并且在另一端包括用于使源气体通过的开口。 细长的开放管固定到气体注射器并且其轴线大致重叠在气体注射器的轴线上。