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1.发明授权Bucket-type ion source for fanning cusped magnetic fields inside a plasma generation chamber 失效用于在等离子体发生室内扇形尖锐磁场的铲斗型离子源公开(公告)号：US08604683B2
公开(公告)日：2013-12-10
申请号：US13416369
申请日：2012-03-09
IPC分类号： H01J27/02
CPC分类号： H01J27/14 , C23C14/221 , C23C14/564 , H01J37/08 , H01J2237/022
摘要： An ion source includes a plasma generation chamber, at least one filament disposed inside the plasma generation chamber, at least one electrode disposed so as to be opposed to the plasma generation chamber, and configured to extract out an ion beam from the plasma generation chamber, and a plurality of permanent magnets disposed outside the plasma generation chamber, and configured to form cusped magnetic fields inside the plasma generation chamber, and a deposition preventive plate disposed parallel with an inner surface of a wall of the plasma generation chamber. The deposition preventive plate has recesses which are formed at such positions as to be opposed to the respective permanent magnets with the wall of the plasma generation chamber interposed in between.
摘要翻译： 离子源包括等离子体生成室，设置在等离子体生成室内的至少一根细丝，与等离子体生成室对置配置的至少一个电极，构成为从等离子体产生室取出离子束， 以及多个永久磁铁，其设置在等离子体生成室的外部，并且被构造成在等离子体生成室内部形成锐化的磁场，以及与等离子体产生室的壁的内表面平行设置的防沉积板。 沉积防止板具有形成在与各永磁体相对的位置处的凹部，其中介于其间的等离子体产生室的壁。
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公开(公告)号：US20120229012A1
公开(公告)日：2012-09-13
申请号：US13416369
申请日：2012-03-09
IPC分类号： H01J27/02
CPC分类号： H01J27/14 , C23C14/221 , C23C14/564 , H01J37/08 , H01J2237/022
摘要： An ion source includes a plasma generation chamber, at least one filament disposed inside the plasma generation chamber, at least one electrode disposed so as to be opposed to the plasma generation chamber, and configured to extract out an ion beam from the plasma generation chamber, and a plurality of permanent magnets disposed outside the plasma generation chamber, and configured to form cusped magnetic fields inside the plasma generation chamber, and a deposition preventive plate disposed parallel with an inner surface of a wall of the plasma generation chamber. The deposition preventive plate has recesses which are formed at such positions as to be opposed to the respective permanent magnets with the wall of the plasma generation chamber interposed in between.
摘要翻译： 离子源包括等离子体生成室，设置在等离子体生成室内的至少一根细丝，与等离子体生成室对置配置的至少一个电极，构成为从等离子体产生室取出离子束， 以及多个永久磁铁，其设置在等离子体生成室的外部，并且被构造成在等离子体生成室内部形成锐化的磁场，以及与等离子体产生室的壁的内表面平行设置的防沉积板。 沉积防止板具有形成在与各永磁体相对的位置处的凹部，其中介于其间的等离子体产生室的壁。
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