INTEGRATED MEMS INERTIAL SENSING DEVICE
    1.
    发明申请

    公开(公告)号:US20170082438A1

    公开(公告)日:2017-03-23

    申请号:US15365851

    申请日:2016-11-30

    Applicant: mCube Inc.

    CPC classification number: G01C19/5776 G01C19/5712 G01C19/5783

    Abstract: An integrated MEMS inertial sensing device can include a MEMS inertial sensor with a drive loop configuration overlying a CMOS IC substrate. The CMOS IC substrate can include an AGC loop circuit coupled to the MEMS inertial sensor. The AGC loop acts in a way such that generated desired signal amplitude out of the drive signal maintains MEMS resonator velocity at a desired frequency and amplitude. A benefit of the AGC loop is that the charge pump of the HV driver inherently includes a ‘time constant’ for charging up of its output voltage. This incorporates the Low pass functionality in to the AGC loop without requiring additional circuitry.

    INTEGRATED MEMS INERTIAL SENSING DEVICE
    2.
    发明申请
    INTEGRATED MEMS INERTIAL SENSING DEVICE 有权
    集成MEMS惯性感应装置

    公开(公告)号:US20150276405A1

    公开(公告)日:2015-10-01

    申请号:US14158756

    申请日:2014-01-17

    Applicant: mCube Inc.

    CPC classification number: G01C19/5776

    Abstract: An integrated MEMS inertial sensing device can include a MEMS inertial sensor with a drive loop configuration overlying a CMOS IC substrate. The CMOS IC substrate can include an AGC loop circuit coupled to the MEMS inertial sensor. The AGC loop acts in a way such that generated desired signal amplitude out of the drive signal maintains MEMS resonator velocity at a desired frequency and amplitude. A benefit of the AGC loop is that the charge pump of the HV driver inherently includes a ‘time constant’ for charging up of its output voltage. This incorporates the Low pass functionality in to the AGC loop without requiring additional circuitry.

    Abstract translation: 集成MEMS惯性感测装置可以包括具有覆盖在CMOS IC衬底上的驱动环配置的MEMS惯性传感器。 CMOS IC衬底可以包括耦合到MEMS惯性传感器的AGC环路电路。 AGC环路的作用方式使得从驱动信号中产生的期望信号幅度将MEMS谐振器速度保持在期望的频率和幅度。 AGC环路的优点是HV驱动器的电荷泵固有地包括用于充电其输出电压的“时间常数”。 这将低通功能集成到AGC环路中,无需额外的电路。

    INTEGRATED INERTIAL SENSING DEVICE
    3.
    发明申请
    INTEGRATED INERTIAL SENSING DEVICE 有权
    综合惯性感应装置

    公开(公告)号:US20150276406A1

    公开(公告)日:2015-10-01

    申请号:US14158765

    申请日:2014-01-17

    Applicant: mCube Inc.

    CPC classification number: G01C19/5776

    Abstract: A system can include a MEMS gyroscope having a MEMS resonator overlying a CMOS IC substrate. The CMOS IC substrate can include an AGC loop circuit coupled to the MEMS gyroscope. The AGC loop acts in a way such that generated desired signal amplitude out of the drive signal maintains MEMS resonator velocity at a desired frequency and amplitude. A benefit of the AGC loop is that the charge pump of the HV driver inherently includes a ‘time constant’ for charging up of its output voltage. The system incorporates the Low pass functionality in to the AGC loop without requiring additional circuitry.

    Abstract translation: 系统可以包括具有覆盖在CMOS IC衬底上的MEMS谐振器的MEMS陀螺仪。 CMOS IC衬底可以包括耦合到MEMS陀螺仪的AGC环路电路。 AGC环路的作用方式使得从驱动信号中产生的期望信号幅度将MEMS谐振器速度保持在期望的频率和幅度。 AGC环路的优点是HV驱动器的电荷泵固有地包括用于充电其输出电压的“时间常数”。 该系统将低通功能集成到AGC环路中,无需额外的电路。

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