Method to test the quality factor of a MEMS gyroscope at chip probe

    公开(公告)号:US10267636B1

    公开(公告)日:2019-04-23

    申请号:US14987685

    申请日:2016-01-04

    申请人: mCube, Inc.

    IPC分类号: G01C19/5684 B81C99/00

    摘要: A method for a MEMS device comprises determining in a computer system, a first driving signal for the MEMS device in response to a first time delay and to a base driving signal, applying the first driving signal to the MEMS device to induce the MEMS device to operate at a first frequency, determining a second driving signal for the MEMS device in response to a second time delay and to the base driving signal, applying the second driving signal to the MEMS device to induce the MEMS device to operate at a second frequency, determining a first quality factor associated with the MEMS device in response to the first frequency and the second frequency, determining a quality factor associated with the MEMS device in response to the first quality factor, and determining whether the quality factor associated with the MEMS device, exceeds a threshold quality factor.

    Integrated inertial sensing device

    公开(公告)号:US10107625B2

    公开(公告)日:2018-10-23

    申请号:US15442488

    申请日:2017-02-24

    申请人: mCube Inc.

    摘要: A CMOS IC substrate can include sense amplifiers, demodulation circuits and AGC loop circuit coupled to the MEMS gyroscope. The AGC loop acts in a way such that generated desired signal amplitude out of the drive signal maintains MEMS resonator velocity at a desired frequency and amplitude. The system can include charge pumps to create higher voltages as required in the system. The system can incorporate ADC to provide digital outputs that can be read via serial interface such as I2C. The system can also include temperature sensor which can be used to sense and output temperature of the chip and system and can be used to internally or externally compensate the gyroscope sensor measurements for temperature related changes. The CMOS IC substrate can be part of a system which can include a MEMS gyroscope having a MEMS sensor overlying the CMOS IC substrate.

    Integrated MEMS inertial sensing device

    公开(公告)号:US10393526B2

    公开(公告)日:2019-08-27

    申请号:US15365851

    申请日:2016-11-30

    申请人: mCube Inc.

    摘要: An integrated MEMS inertial sensing device can include a MEMS inertial sensor with a drive loop configuration overlying a CMOS IC substrate. The CMOS IC substrate can include an AGC loop circuit coupled to the MEMS inertial sensor. The AGC loop acts in a way such that generated desired signal amplitude out of the drive signal maintains MEMS resonator velocity at a desired frequency and amplitude. A benefit of the AGC loop is that the charge pump of the HV driver inherently includes a ‘time constant’ for charging up of its output voltage. This incorporates the Low pass functionality in to the AGC loop without requiring additional circuitry.

    Integrated inertial sensing device

    公开(公告)号:US09612119B2

    公开(公告)日:2017-04-04

    申请号:US14158765

    申请日:2014-01-17

    申请人: mCube Inc.

    CPC分类号: G01C19/5776

    摘要: A system can include a MEMS gyroscope having a MEMS resonator overlying a CMOS IC substrate. The CMOS IC substrate can include an AGC loop circuit coupled to the MEMS gyroscope. The AGC loop acts in a way such that generated desired signal amplitude out of the drive signal maintains MEMS resonator velocity at a desired frequency and amplitude. A benefit of the AGC loop is that the charge pump of the HV driver inherently includes a ‘time constant’ for charging up of its output voltage. The system incorporates the Low pass functionality in to the AGC loop without requiring additional circuitry.

    Integrated MEMs inertial sensing device with automatic gain control
    5.
    发明授权
    Integrated MEMs inertial sensing device with automatic gain control 有权
    集成MEM惯性感应装置,具有自动增益控制

    公开(公告)号:US09513122B2

    公开(公告)日:2016-12-06

    申请号:US14158756

    申请日:2014-01-17

    申请人: mCube Inc.

    IPC分类号: G01C19/5776

    CPC分类号: G01C19/5776

    摘要: An integrated MEMS inertial sensing device can include a MEMS inertial sensor with a drive loop configuration overlying a CMOS IC substrate. The CMOS IC substrate can include an AGC loop circuit coupled to the MEMS inertial sensor. The AGC loop acts in a way such that generated desired signal amplitude out of the drive signal maintains MEMS resonator velocity at a desired frequency and amplitude. A benefit of the AGC loop is that the charge pump of the HV driver inherently includes a ‘time constant’ for charging up of its output voltage. This incorporates the Low pass functionality in to the AGC loop without requiring additional circuitry.

    摘要翻译: 集成MEMS惯性感测装置可以包括具有覆盖在CMOS IC衬底上的驱动环配置的MEMS惯性传感器。 CMOS IC衬底可以包括耦合到MEMS惯性传感器的AGC环路电路。 AGC环路的作用方式使得从驱动信号中产生的期望信号幅度将MEMS谐振器速度保持在期望的频率和幅度。 AGC环路的优点是HV驱动器的电荷泵固有地包括用于充电其输出电压的“时间常数”。 这将低通功能集成到AGC环路中,无需额外的电路。

    Differential MEMS device and methods

    公开(公告)号:US11255871B1

    公开(公告)日:2022-02-22

    申请号:US16530923

    申请日:2019-08-02

    申请人: mCube, Inc.

    摘要: A MEMS device includes a first MEMS sensor associated with a first spatial plane and a second MEMS sensor is associated with a spatial second plane not co-planar with the first spatial plane, wherein the first MEMS sensor is configured to provide a first interrupt and a first data in response to a physical perturbation, wherein the second MEMS sensor is configured to provide a second interrupt and second data in response to the physical perturbation, and a controller configured to receive the first interrupt at a first time and the second interrupt at a second time different from the first time, wherein the controller is configured to determine a latency between the first time and the second time, and wherein the controller is configured to determine motion data in response to the first data, to the second data, and to the latency.

    Portable computing device and methods

    公开(公告)号:US11009908B1

    公开(公告)日:2021-05-18

    申请号:US16655124

    申请日:2019-10-16

    申请人: mCube, Inc.

    IPC分类号: G06F1/16 G11B5/55 G06F3/01

    摘要: A portable computing device includes a housing having a region with a plurality of physical features configured to be swiped by a user during a first period, a first accelerometer configured to determine first perturbations during the first period, a second accelerometer configured to determine second perturbations during the first period of time, and a processor coupled to the first and second accelerometer and configured to determine whether the user has swiped the region during the first period of time in response to the first perturbations and the second perturbations.

    Multiple MEMS device and methods
    8.
    发明授权

    公开(公告)号:US10605823B2

    公开(公告)日:2020-03-31

    申请号:US15444162

    申请日:2017-02-27

    申请人: mCube, Inc.

    IPC分类号: G01P15/08 B81B7/00

    摘要: A method for operating an electronic device comprising a first and second MEMS device and a semiconductor substrate disposed upon a mounting substrate includes subjecting the first MEMS device and the second MEMS device to physical perturbations, wherein the physical perturbations comprise first physical perturbations associated with the first MEMS device and second physical perturbations associated with the second MEMS device, wherein the first physical perturbations and the second physical perturbations are substantially contemporaneous, determining in a plurality of CMOS circuitry formed within the one or more semiconductor substrates, first physical perturbation data from the first MEMS device in response to the first physical perturbations and second physical perturbation data from the second MEMS device in response to the second physical perturbations, determining output data in response to the first physical perturbation data and to the second physical perturbation data, and outputting the output data.

    Ultra-low power sensor systems for vibration and motion detection

    公开(公告)号:US10982944B1

    公开(公告)日:2021-04-20

    申请号:US15917505

    申请日:2018-03-09

    申请人: mCube, Inc.

    IPC分类号: G01B5/004 G01P15/18 B81B7/02

    摘要: A method for a system includes applying power to a MEMS device while inhibiting applying power to a processor, thereafter determining first sensed data with the MEMS device in response to first event data, when the first sensed data exceeds a first threshold, determining second sensed data with a second MEMS device in response to second event data, when the second sensed data exceeds a second threshold, applying power to the processor, determining with the processor whether a seismic event is occurring in response to the first and the second sensed data, directing with the processor, an electronically-controllable mechanism to shut-off a utility supply, in response to the seismic event being determined.

    Security system and methods for integrated devices

    公开(公告)号:US10078112B2

    公开(公告)日:2018-09-18

    申请号:US15236182

    申请日:2016-08-12

    申请人: mCube Inc.

    摘要: A method is provided for implementing a security mechanism in an integrated MEMS (Micro-Electro-Mechanical-System) device having a MEMS sensor with an output register associated with a sensing operation, the integrated MEMS device being electrically coupled to a computing system programmed to perform the method. The method includes, in normal operation, reading from the output register an output of the sensing operation, and in a test mode, determining, by a processor disposed within the computing system, a random value. Determining the random value can include reading from the output register, which in the test mode or provides a value from an internal pattern generator. The method also includes determining, by the processor, a validation value, reading, by the processor, the random value stored in the output register; and determining, by the processor, whether the integrated device is valid using the validation value and the random value stored in the output register.