公开(公告)号：US20150276406A1

公开(公告)日：2015-10-01

申请号：US14158765

申请日：2014-01-17

Applicant: mCube Inc.

Inventor： ALI J. RASTEGAR ,  SANJAY BHANDARI ,  SUDHEER S. SRIDHARAMURTHY

IPC: G01C19/5712 ,  B81B7/00 ,  B81B7/02

CPC classification number: G01C19/5776

Abstract: A system can include a MEMS gyroscope having a MEMS resonator overlying a CMOS IC substrate. The CMOS IC substrate can include an AGC loop circuit coupled to the MEMS gyroscope. The AGC loop acts in a way such that generated desired signal amplitude out of the drive signal maintains MEMS resonator velocity at a desired frequency and amplitude. A benefit of the AGC loop is that the charge pump of the HV driver inherently includes a ‘time constant’ for charging up of its output voltage. The system incorporates the Low pass functionality in to the AGC loop without requiring additional circuitry.

Abstract translation: 系统可以包括具有覆盖在CMOS IC衬底上的MEMS谐振器的MEMS陀螺仪。 CMOS IC衬底可以包括耦合到MEMS陀螺仪的AGC环路电路。 AGC环路的作用方式使得从驱动信号中产生的期望信号幅度将MEMS谐振器速度保持在期望的频率和幅度。 AGC环路的优点是HV驱动器的电荷泵固有地包括用于充电其输出电压的“时间常数”。 该系统将低通功能集成到AGC环路中，无需额外的电路。

公开(公告)号：US20170167875A1

公开(公告)日：2017-06-15

申请号：US15442488

申请日：2017-02-24

Applicant: mCube Inc.

Inventor： SANJAY BHANDARI ,  Ali J. Rastegar ,  Sudheer S. Sridharamurthy

IPC: G01C19/5712 ,  B81B7/00 ,  B81B7/02

CPC classification number: G01C19/5712 ,  B81B7/008 ,  B81B7/02 ,  B81B2201/0242 ,  G01C19/5776

Abstract: A CMOS IC substrate can include sense amplifiers, demodulation circuits and AGC loop circuit coupled to the MEMS gyroscope. The AGC loop acts in a way such that generated desired signal amplitude out of the drive signal maintains MEMS resonator velocity at a desired frequency and amplitude. The system can include charge pumps to create higher voltages as required in the system. The system can incorporate ADC to provide digital outputs that can be read via serial interface such as I2C. The system can also include temperature sensor which can be used to sense and output temperature of the chip and system and can be used to internally or externally compensate the gyroscope sensor measurements for temperature related changes. The CMOS IC substrate can be part of a system which can include a MEMS gyroscope having a MEMS sensor overlying the CMOS IC substrate.

公开(公告)号：US20170082438A1

公开(公告)日：2017-03-23

申请号：US15365851

申请日：2016-11-30

Applicant: mCube Inc.

Inventor： ALI J. RASTEGAR ,  SANJAY BHANDARI

IPC: G01C19/5776

CPC classification number: G01C19/5776 ,  G01C19/5712 ,  G01C19/5783

Abstract: An integrated MEMS inertial sensing device can include a MEMS inertial sensor with a drive loop configuration overlying a CMOS IC substrate. The CMOS IC substrate can include an AGC loop circuit coupled to the MEMS inertial sensor. The AGC loop acts in a way such that generated desired signal amplitude out of the drive signal maintains MEMS resonator velocity at a desired frequency and amplitude. A benefit of the AGC loop is that the charge pump of the HV driver inherently includes a ‘time constant’ for charging up of its output voltage. This incorporates the Low pass functionality in to the AGC loop without requiring additional circuitry.

公开(公告)号：US20150276407A1

公开(公告)日：2015-10-01

申请号：US14160549

申请日：2014-01-21

Applicant: mCube Inc.

Inventor： SANJAY BHANDARI

IPC: G01C19/5712 ,  B81B7/02 ,  B81B7/00

CPC classification number: G01C19/5776 ,  G01C19/5783 ,  G01P15/18

Abstract: A system comprising an integrated multi-axis MEMS inertial sensor architecture. The system can include a MEMS gyroscope having a MEMS resonator and a MEMS accelerometer overlying a CMOS IC substrate. The CMOS IC substrate can include low noise Charge Sense amplifiers to process the sensed signals, programmable gain amplifiers, a demodulator, mixer, an AGC loop circuit coupled to the MEMS gyroscope to drive MEMS resonator. The CMOS IC also includes programmable Quadrature cancellation, Analog and digital phase shifters are implemented in the architecture to ensure quadrature cancellation and demodulation to achieve optimal performance. The AGC loop acts in a way such that generated desired signal amplitude out of the drive signal maintains MEMS resonator velocity at a desired frequency and amplitude while consuming low power. The MEMS gyroscope and accelerometer can be coupled to an input multiplexer configured to operate in a time-multiplexed manner.

Abstract translation: 包括集成的多轴MEMS惯性传感器架构的系统。 该系统可以包括具有MEMS谐振器的MEMS陀螺仪和覆盖在CMOS IC衬底上的MEMS加速度计。 CMOS IC衬底可以包括用于处理感测信号的低噪声Charge Sense放大器，可编程增益放大器，解调器，混频器，耦合到MEMS陀螺仪的AGC环路以驱动MEMS谐振器。 CMOS IC还包括可编程正交取消，模拟和数字移相器在架构中实现，以确保正交消除和解调以实现最佳性能。 AGC环路的作用方式使得驱动信号中产生的期望信号幅度在消耗低功率的同时将MEMS谐振器速度保持在期望的频率和幅度。 MEMS陀螺仪和加速度计可以耦合到配置为以时间复用方式操作的输入多路复用器。