公开(公告)号：US08173963B2

公开(公告)日：2012-05-08

申请号：US12931046

申请日：2011-01-20

申请人： Rasmus Schröder ,  Bastian Barton ,  Gerd Benner ,  Harald Rose

发明人： Rasmus Schröder ,  Bastian Barton ,  Gerd Benner ,  Harald Rose

IPC分类号： G01N23/00

CPC分类号： H01J37/26 ,  H01J37/295 ,  H01J2237/041 ,  H01J2237/0453 ,  H01J2237/1534 ,  H01J2237/2455 ,  H01J2237/2614 ,  H01J2237/2802 ,  H01J2237/2809

摘要： A phase-shifting element for shifting a phase of at least a portion of a particle beam is described, as well as a particle beam device having a phase-shifting element of this type. In the phase-shifting element and the particle beam device having a phase-shifting element, components shadowing the particle beam are avoided, so that proper information content is achieved and in which the phase contrast is essentially spatial frequency-independent. The phase-shifting element may have at least one means for generating a non-homogeneous or anisotropic potential. The particle beam device according to the system described herein may be provided with the phase-shifting element.

摘要翻译： 描述了用于移动粒子束的至少一部分的相位的相移元件，以及具有这种类型的相移元件的粒子束装置。 在具有相移元件的相移元件和粒子束装置中，避免了影响粒子束的分量，使得实现适当的信息内容，并且相位对比度基本上与空间频率无关。 相移元件可以具有至少一个用于产生非均匀或各向异性电位的装置。 根据本文所述的系统的粒子束装置可以设置有相移元件。

公开(公告)号：US08039796B2

公开(公告)日：2011-10-18

申请号：US12659751

申请日：2010-03-19

申请人： Gerd Benner ,  Marko Matijevic

发明人： Gerd Benner ,  Marko Matijevic

IPC分类号： G21K7/00

CPC分类号： H01J37/26 ,  G01N23/04 ,  H01J37/04 ,  H01J2237/0492 ,  H01J2237/2614

摘要： A phase contrast electron microscope has an objective (8) with a back focal plane (10), a first diffraction lens (11), which images the back focal plane (10) of the objective (8) magnified into a diffraction intermediate image plane, a second diffraction lens (15) whose principal plane is mounted in the proximity of the diffraction intermediate image plane and a phase-shifting element (16) which is mounted in or in the proximity of the diffraction intermediate image plane. Also, a phase contrast electron microscope has an objective (8) having a back focal plane (10), a first diffraction lens (11), a first phase-shifting element and a second phase-shifting element which is mounted in or in the proximity of the diffraction intermediate image plane. The first diffraction lens (11) images the back focal plane of the objective magnified into a diffraction intermediate image plane and the first phase-shifting element is mounted in the back focal plane (10) of the objective (8). With the magnified imaging of the diffraction plane by the diffraction lens, the dimensional requirements imposed on the phase plate having the phase-shifting element are reduced.

摘要翻译： 相差电子显微镜具有物镜（8），具有后焦平面（10），第一衍射透镜（11），其将物镜（8）的后焦平面（10）成像放大到衍射中间像平面 ，其主平面安装在衍射中间像平面附近的第二衍射透镜（15）和安装在衍射中间像平面附近或附近的相移元件（16）。 此外，相位对比电子显微镜具有物镜（8），其具有后焦平面（10），第一衍射透镜（11），第一相移元件和第二相移元件，其安装在或 接近衍射中间像平面。 第一衍射透镜（11）将放大的物镜的后焦平面成像为衍射中间像平面，第一相移元件安装在物镜（8）的后焦平面（10）中。 通过衍射透镜对衍射平面的放大成像，施加在具有相移元件的相位板上的尺寸要求减小。