公开(公告)号：US20180174795A1

公开(公告)日：2018-06-21

申请号：US15736098

申请日：2015-06-23

Applicant: HITACHI, LTD.

Inventor： Teruo KOHASHI

IPC: H01J37/09 ,  H01J37/147 ,  H01J37/20

CPC classification number: H01J37/09 ,  H01J37/04 ,  H01J37/147 ,  H01J37/20 ,  H01J37/28 ,  H01J2237/041

Abstract: Provided is an optical system which can adjust, including increase, a spin polarization degree of an electron beam. Disclosed is a charged particle device having a charged particle source which generates charged particles, a sample table on which a sample is placed, and a transport optical system which is disposed between the charged particle source and the sample table and transports the charged particles as charged particle flux toward the sample table. In this device, the transport optical system includes a magnetic field generating section which generates a magnetic field having a vertical component to a course of the charged particle flux, an electric field generating section which generates an electric field having a vertical component to the course of the charged particle flux, and a shielding section which shields at least a part of the charged particle flux passed through the magnetic field generating section and the electric field generating section. Moreover, the vertical component of the magnetic field has a magnetic field gradient, and the vertical component of the electric field gives an electrostatic force in a direction opposite to a Lorentz force received by the charged particle flux.

公开(公告)号：US20080296509A1

公开(公告)日：2008-12-04

申请号：US12070055

申请日：2008-02-14

Applicant: Rasmus Schroder ,  Bastian Barton ,  Gerd Benner ,  Harald Rose

Inventor： Rasmus Schroder ,  Bastian Barton ,  Gerd Benner ,  Harald Rose

IPC: H01J3/14

CPC classification number: H01J37/26 ,  H01J37/295 ,  H01J2237/041 ,  H01J2237/0453 ,  H01J2237/1534 ,  H01J2237/2455 ,  H01J2237/2614 ,  H01J2237/2802 ,  H01J2237/2809

Abstract: A phase-shifting element for shifting a phase of at least a portion of a particle beam is described, as well as a particle beam device having a phase-shifting element of this type. In the phase-shifting element and the particle beam device having a phase-shifting element, components shadowing the particle beam are avoided, so that proper information content is achieved and in which the phase contrast is essentially spatial frequency-independent. The phase-shifting element may have at least one means for generating a non-homogeneous or anisotropic potential. The particle beam device according to the system described herein may be provided with the phase-shifting element.

Abstract translation: 描述了用于移动粒子束的至少一部分的相位的相移元件，以及具有这种类型的相移元件的粒子束装置。 在具有相移元件的相移元件和粒子束装置中，避免了影响粒子束的分量，使得实现适当的信息内容，并且相位对比度基本上与空间频率无关。 相移元件可以具有至少一个用于产生非均匀或各向异性电位的装置。 根据本文所述的系统的粒子束装置可以设置有相移元件。

公开(公告)号：US20140197734A1

公开(公告)日：2014-07-17

申请号：US14127111

申请日：2012-06-04

Applicant: Tuneo Yasue ,  Takanori Kosikawa ,  Katsusige Tuno

Inventor： Tuneo Yasue ,  Takanori Kosikawa ,  Katsusige Tuno

IPC: H01J1/50 ,  H01J3/22

CPC classification number: H01J1/50 ,  H01J3/22 ,  H01J37/145 ,  H01J37/26 ,  H01J2237/041 ,  H01J2237/1505

Abstract: A spin device includes: a first condenser lens which focuses a spin polarized electron beam discharged from an electron gun or reflected on a sample; a spin rotator which includes a multipole having a point to which the electron beam is focused by the first condenser lens at a lens center or in the vicinity of the lens center and being capable of generating an electric field and a magnetic field; a Wien condition generating means which applies a voltage and a current which satisfy the Wien condition for rotating spin of the electron beam by a designated angle and making the electron beam advance straightly to the multipole which constitutes the spin rotator; and a second condenser lens which focuses the electron beam whose spin is rotated by the spin rotator.

Abstract translation: 旋转装置包括：第一聚光透镜，其聚焦从电子枪放射或反射在样品上的自旋极化电子束; 旋转旋转器，其包括具有电子束在透镜中心或透镜中心附近被第一聚光透镜聚焦的点的多极，并且能够产生电场和磁场; 维纳条件产生装置，其施加满足用于使电子束的旋转旋转指定角度的维恩条件的电压和电流，并使电子束直线前进到构成旋转旋转器的多极; 以及第二聚光透镜，其聚焦其自旋由旋转旋转器旋转的电子束。

公开(公告)号：US08436302B2

公开(公告)日：2013-05-07

申请号：US13462140

申请日：2012-05-02

Applicant: Rasmus Schröder ,  Bastian Barton ,  Gerd Benner ,  Harald Rose

Inventor： Rasmus Schröder ,  Bastian Barton ,  Gerd Benner ,  Harald Rose

IPC: G01N23/00

CPC classification number: H01J37/26 ,  H01J37/295 ,  H01J2237/041 ,  H01J2237/0453 ,  H01J2237/1534 ,  H01J2237/2455 ,  H01J2237/2614 ,  H01J2237/2802 ,  H01J2237/2809

Abstract: A phase-shifting element for shifting a phase of at least a portion of a particle beam is described, as well as a particle beam device having a phase-shifting element of this type. In the phase-shifting element and the particle beam device having a phase-shifting element, components shadowing the particle beam are avoided, so that proper information content is achieved and in which the phase contrast is essentially spatial frequency-independent. The phase-shifting element may have at least one means for generating a non-homogeneous or anisotropic potential. The particle beam device according to the system described herein may be provided with the phase-shifting element.

Abstract translation: 描述了用于移动粒子束的至少一部分的相位的相移元件，以及具有这种类型的相移元件的粒子束装置。 在具有相移元件的相移元件和粒子束装置中，避免了影响粒子束的分量，使得实现适当的信息内容，并且相位对比度基本上与空间频率无关。 相移元件可以具有至少一个用于产生非均匀或各向异性电位的装置。 根据本文所述的系统的粒子束装置可以设置有相移元件。

公开(公告)号：US09466454B2

公开(公告)日：2016-10-11

申请号：US14127111

申请日：2012-06-04

Applicant: Tuneo Yasue ,  Takanori Kosikawa ,  Katsusige Tuno

Inventor： Tuneo Yasue ,  Takanori Kosikawa ,  Katsusige Tuno

IPC: H01J3/22 ,  H01J1/50 ,  H01J37/145 ,  H01J37/26

CPC classification number: H01J1/50 ,  H01J3/22 ,  H01J37/145 ,  H01J37/26 ,  H01J2237/041 ,  H01J2237/1505

Abstract: A spin device includes: a first condenser lens which focuses a spin polarized electron beam discharged from an electron gun or reflected on a sample; a spin rotator which includes a multipole having a point to which the electron beam is focused by the first condenser lens at a lens center or in the vicinity of the lens center and being capable of generating an electric field and a magnetic field; a Wien condition generating means which applies a voltage and a current which satisfy the Wien condition for rotating spin of the electron beam by a designated angle and making the electron beam advance straightly to the multipole which constitutes the spin rotator; and a second condenser lens which focuses the electron beam whose spin is rotated by the spin rotator.

Abstract translation: 旋转装置包括：第一聚光透镜，其聚焦从电子枪放射或反射在样品上的自旋极化电子束; 旋转旋转器，其包括具有电子束在透镜中心或透镜中心附近被第一聚光透镜聚焦的点的多极，并且能够产生电场和磁场; 维纳条件产生装置，其施加满足用于使电子束的旋转旋转指定角度的维恩条件的电压和电流，并使电子束直线前进到构成旋转旋转器的多极; 以及第二聚光透镜，其聚焦其自旋由旋转旋转器旋转的电子束。

公开(公告)号：US07902506B2

公开(公告)日：2011-03-08

申请号：US12070055

申请日：2008-02-14

Applicant: Rasmus Schröder ,  Bastian Barton ,  Gerd Benner ,  Harald Rose

Inventor： Rasmus Schröder ,  Bastian Barton ,  Gerd Benner ,  Harald Rose

IPC: G01N23/00

CPC classification number: H01J37/26 ,  H01J37/295 ,  H01J2237/041 ,  H01J2237/0453 ,  H01J2237/1534 ,  H01J2237/2455 ,  H01J2237/2614 ,  H01J2237/2802 ,  H01J2237/2809

Abstract: A phase-shifting element for shifting a phase of at least a portion of a particle beam is described, as well as a article beam device having a phase-shifting element of this type. In the phase-shifting element and the particle beam device having a phase-shifting element, components shadowing the particle beam are avoided, so that proper information content is achieved and in which the phase contrast is essentially spatial frequency-independent. The phase-shifting element may have at least one means for generating a non-homogeneous or anisotropic potential. The particle beam device according to the system described herein may be provided with the phase-shifting element.

Abstract translation: 描述了用于移动粒子束的至少一部分的相位的相移元件，以及具有这种类型的相移元件的物品束装置。 在具有相移元件的相移元件和粒子束装置中，避免了影响粒子束的分量，使得实现适当的信息内容，并且相位对比度基本上与空间频率无关。 相移元件可以具有至少一个用于产生非均匀或各向异性电位的装置。 根据本文所述的系统的粒子束装置可以设置有相移元件。

公开(公告)号：US20130001445A1

公开(公告)日：2013-01-03

申请号：US13462140

申请日：2012-05-02

Applicant: Rasmus SCHRÖDER ,  Bastian BARTON ,  Gerd BENNER ,  Harald ROSE

Inventor： Rasmus SCHRÖDER ,  Bastian BARTON ,  Gerd BENNER ,  Harald ROSE

IPC: G21K1/087

CPC classification number: H01J37/26 ,  H01J37/295 ,  H01J2237/041 ,  H01J2237/0453 ,  H01J2237/1534 ,  H01J2237/2455 ,  H01J2237/2614 ,  H01J2237/2802 ,  H01J2237/2809

Abstract: A phase-shifting element for shifting a phase of at least a portion of a particle beam is described, as well as a particle beam device having a phase-shifting element of this type. In the phase-shifting element and the particle beam device having a phase-shifting element, components shadowing the particle beam are avoided, so that proper information content is achieved and in which the phase contrast is essentially spatial frequency-independent. The phase-shifting element may have at least one means for generating a non-homogeneous or anisotropic potential. The particle beam device according to the system described herein may be provided with the phase-shifting element.

Abstract translation: 描述了用于移动粒子束的至少一部分的相位的相移元件，以及具有这种类型的相移元件的粒子束装置。 在具有相移元件的相移元件和粒子束装置中，避免了影响粒子束的分量，使得实现适当的信息内容，并且相位对比度基本上与空间频率无关。 相移元件可以具有至少一个用于产生非均匀或各向异性电位的装置。 根据本文所述的系统的粒子束装置可以设置有相移元件。

公开(公告)号：US08173963B2

公开(公告)日：2012-05-08

申请号：US12931046

申请日：2011-01-20

Applicant: Rasmus Schröder ,  Bastian Barton ,  Gerd Benner ,  Harald Rose

Inventor： Rasmus Schröder ,  Bastian Barton ,  Gerd Benner ,  Harald Rose

IPC: G01N23/00

CPC classification number: H01J37/26 ,  H01J37/295 ,  H01J2237/041 ,  H01J2237/0453 ,  H01J2237/1534 ,  H01J2237/2455 ,  H01J2237/2614 ,  H01J2237/2802 ,  H01J2237/2809

Abstract: A phase-shifting element for shifting a phase of at least a portion of a particle beam is described, as well as a particle beam device having a phase-shifting element of this type. In the phase-shifting element and the particle beam device having a phase-shifting element, components shadowing the particle beam are avoided, so that proper information content is achieved and in which the phase contrast is essentially spatial frequency-independent. The phase-shifting element may have at least one means for generating a non-homogeneous or anisotropic potential. The particle beam device according to the system described herein may be provided with the phase-shifting element.

Abstract translation: 描述了用于移动粒子束的至少一部分的相位的相移元件，以及具有这种类型的相移元件的粒子束装置。 在具有相移元件的相移元件和粒子束装置中，避免了影响粒子束的分量，使得实现适当的信息内容，并且相位对比度基本上与空间频率无关。 相移元件可以具有至少一个用于产生非均匀或各向异性电位的装置。 根据本文所述的系统的粒子束装置可以设置有相移元件。

公开(公告)号：US20110233402A1

公开(公告)日：2011-09-29

申请号：US12931046

申请日：2011-01-20

Applicant: Rasmus Schröder ,  Bastian Barton ,  Gerd Benner ,  Harald Rose

Inventor： Rasmus Schröder ,  Bastian Barton ,  Gerd Benner ,  Harald Rose

IPC: H01J37/26

CPC classification number: H01J37/26 ,  H01J37/295 ,  H01J2237/041 ,  H01J2237/0453 ,  H01J2237/1534 ,  H01J2237/2455 ,  H01J2237/2614 ,  H01J2237/2802 ,  H01J2237/2809

Abstract: A phase-shifting element for shifting a phase of at least a portion of a particle beam is described, as well as a particle beam device having a phase-shifting element of this type. In the phase-shifting element and the particle beam device having a phase-shifting element, components shadowing the particle beam are avoided, so that proper information content is achieved and in which the phase contrast is essentially spatial frequency-independent. The phase-shifting element may have at least one means for generating a non-homogeneous or anisotropic potential. The particle beam device according to the system described herein may be provided with the phase-shifting element.

Abstract translation: 描述了用于移动粒子束的至少一部分的相位的相移元件，以及具有这种类型的相移元件的粒子束装置。 在具有相移元件的相移元件和粒子束装置中，避免了影响粒子束的分量，使得实现适当的信息内容，并且相位对比度基本上与空间频率无关。 相移元件可以具有至少一个用于产生非均匀或各向异性电位的装置。 根据本文所述的系统的粒子束装置可以设置有相移元件。