公开(公告)号：US6118844A

公开(公告)日：2000-09-12

申请号：US149020

申请日：1998-09-08

申请人： Helmut Fischer

发明人： Helmut Fischer

IPC分类号： G01B15/02 ,  G01N23/223

CPC分类号： G01B15/02 ,  G01N23/223 ,  G01N2223/076

摘要： In a method for the determination of the measuring uncertainty for a device for X-ray fluorescence slice thickness measurements during measurement of a layer of a sample under investigation, a spectrum S(K) simulating an actual fluorescent radiation spectrum is generated for the channels K of a spectrum and for a given thickness d of the layer and, in each channel K, a random number generator is used to repetitively accumulate a random value to construct a total number N(K) of events registered in the K-th channel in measurement time t and the standard deviation .sigma.(d) is determined from the spectrum of slice thicknesses d extracted by means of the repetitive random values as measure of the measurement uncertainty.

摘要翻译： 在测量被测试样品层的X射线荧光层厚度测量的装置的测量不确定度的方法中，为通道K生成模拟实际荧光辐射谱的光谱S（K） 对于层的给定厚度d，并且在每个信道K中使用随机数发生器来重复地累积随机值以构成在第K个信道中登记的事件的总数N（K） 测量时间t和标准差σ（d）是根据重复随机值提取的切片厚度d的频谱，作为测量不确定度的度量来确定的。