公开(公告)号：US07551719B2

公开(公告)日：2009-06-23

申请号：US11200857

申请日：2005-08-10

申请人： Boris Yokhin ,  Alexander Krokhmal ,  Tzachi Rafaeli ,  Isaac Mazor ,  Amos Gvirtzman

发明人： Boris Yokhin ,  Alexander Krokhmal ,  Tzachi Rafaeli ,  Isaac Mazor ,  Amos Gvirtzman

IPC分类号： G01B15/02 ,  G01N23/20 ,  G01N23/201

CPC分类号： G01N23/20008

摘要： Apparatus for analysis of a sample includes a radiation source, which is adapted to direct a first, converging beam of X-rays toward a surface of the sample and to direct a second, collimated beam of the X-rays toward the surface of the sample. A motion assembly moves the radiation source between a first source position, in which the X-rays are directed toward the surface of the sample at a grazing angle, and a second source position, in which the X-rays are directed toward the surface in a vicinity of a Bragg angle of the sample. A detector assembly senses the X-rays scattered from the sample as a function of angle while the radiation source is in either of the first and second source configurations and in either of the first and second source positions. A signal processor receives and processes output signals from the detector assembly so as to determine a characteristic of the sample.

摘要翻译： 用于分析样品的装置包括辐射源，其适于将X射线的第一收敛束指向样品的表面，并将X射线的第二准直光束引向样品的表面 。 运动组件使辐射源在X射线以掠射角指向样品表面的第一源位置和第二源位置之间移动，在该第二源位置，X射线朝向表面 样品的布拉格角附近。 检测器组件在辐射源处于第一和第二源配置中的任一个中以及在第一和第二源位置中的任一个中时，感测从样品散射的X射线作为角度的函数。 信号处理器接收并处理来自检测器组件的输出信号，以便确定样品的特性。