公开(公告)号：US20230194244A1

公开(公告)日：2023-06-22

申请号：US18110042

申请日：2023-02-15

申请人： Oliver Lischtschenko

发明人： Oliver Lischtschenko

IPC分类号： G01B11/16

CPC分类号： G01B11/168 ,  G01B11/161

摘要： The invention relates to a measurement device (10) for measuring light (200) from a light source (2), comprising an optical unit (30) with a delay element (31) for splitting a polarized light beam (210) of the light (200) into a first partial beam (211) and a second partial beam (212), which have a defined phase shift relative to one another. Furthermore, the invention relates to a measurement system (1), as well as a measurement method (100).

公开(公告)号：US10036677B2

公开(公告)日：2018-07-31

申请号：US15653855

申请日：2017-07-19

申请人： National Tsing Hua University

发明人： Wei-Chung Wang ,  Po-Chi Sung ,  Yu-An Chiang ,  Te-Heng Hung

IPC分类号： G01L1/24 ,  G01B11/16 ,  G06F17/17 ,  G06F17/12 ,  G06F17/13 ,  G06F17/14

CPC分类号： G01L1/241 ,  G01B11/168 ,  G01B11/18 ,  G06F17/12 ,  G06F17/13 ,  G06F17/147 ,  G06F17/17 ,  G06F17/5009 ,  G06F2217/16

摘要： A method for analyzing stress in an object according to spectrum data is provided. The spectrum data is obtained from an interference fringe pattern of the object that results from performing photoelasticity. The method includes: analyzing the spectrum data to obtain three sets of intensity data related respectively to different wavelengths of light used in photoelasticity; calculating wrapped phases according to the three sets of intensity data, respectively; calculating preliminary stress values according to the wrapped phases, respectively; determining a system of stress equations according to a relation among the preliminary stress values; and calculating an estimated stress value using the system of stress equations.

公开(公告)号：US20170370705A1

公开(公告)日：2017-12-28

申请号：US15698707

申请日：2017-09-08

申请人： Intuitive Surgical Operations, Inc.

发明人： Mark E. FROGGATT ,  Justin W. KLEIN ,  Dawn K. GIFFORD ,  Stephen Tod KREGER

IPC分类号： G01B11/24 ,  G01B11/16 ,  G01L1/24 ,  G02B6/02

CPC分类号： G01B11/24 ,  G01B11/16 ,  G01B11/168 ,  G01B11/18 ,  G01L1/242 ,  G01L1/246 ,  G02B6/02042

摘要： A multi-core fiber includes multiple optical cores, and for each different core of a set of different cores of the multiple optical cores, a total change in optical length is detected. The total change in optical length represents an accumulation of all changes in optical length for multiple segments of that different core up to a point on the multi-core fiber. A difference is determined between the total changes in optical length for cores of the set of different cores. A twist parameter and/or a bend angle associated with the multi-core fiber at the point on the multi-core fiber is/are determined based on the difference.

公开(公告)号：US20170003119A9

公开(公告)日：2017-01-05

申请号：US14326004

申请日：2014-07-08

申请人： Intuitive Surgical Operations, Inc.

发明人： Mark E. FROGGATT ,  Justin W. Klein ,  Dawn K. Gifford ,  Stephen Tod Kreger

IPC分类号： G01B11/24 ,  G01B11/16

CPC分类号： G01B11/24 ,  G01B11/16 ,  G01B11/168 ,  G01B11/18 ,  G01L1/242 ,  G01L1/246 ,  G02B6/02042

摘要： An accurate measurement method and apparatus using an optical fiber are disclosed. A total change in optical length in an optical core in the optical fiber is determined that reflects an accumulation of all of the changes in optical length for multiple segment lengths of the optical core up to a point on the optical fiber. The total change in optical length in the optical core is provided for calculation of an average strain over a length of the optical core based on the detected total change in optical length.

摘要翻译： 公开了一种使用光纤的精确测量方法和装置。 确定光纤中的光纤中的光学长度的总变化，其反映光纤的多个段长度的所有光学长度变化的累积直到光纤上的一点。 提供了光学核心中的光学长度的总变化，用于基于检测到的光学长度的总变化来计算光学核心长度上的平均应变。

公开(公告)号：US20120314202A1

公开(公告)日：2012-12-13

申请号：US13571481

申请日：2012-08-10

申请人： Steven Danyluk ,  Fang Li

发明人： Steven Danyluk ,  Fang Li

IPC分类号： G01B11/16 ,  G01J4/00

CPC分类号： G01B11/168 ,  G01L1/241 ,  G01L5/0047

摘要： The present invention provides a tool for and method of using an infrared transmission technique to extract the full stress components of the in-plane residual stresses in thin, multi crystalline silicon wafers including in situ measurement of residual stress for large cast wafers. The shear difference method is used to obtain full stress components by integrating the shear stress map from the boundaries. System ambiguity at the boundaries is resolved completely by introducing a new analytical function. A new anisotropic stress optic law is provided, and stress optic coefficients are calibrated for different crystal grain orientations and stress orientations.

摘要翻译： 本发明提供了一种使用红外透射技术提取薄多晶硅晶片中的平面内残余应力的全应力分量的工具和方法，包括原位测量大型晶圆的残余应力。 剪切差法用于通过从边界积分剪切应力图来获得全应力分量。 通过引入新的分析功能，完全解决了边界的系统模糊。 提供了新的各向异性应力光学定律，并且针对不同的晶粒取向和应力取向校准了应力光学系数。

公开(公告)号：US20120038885A1

公开(公告)日：2012-02-16

申请号：US13144988

申请日：2010-01-22

申请人： Abraham J. Cense ,  Donald T. Miller

发明人： Abraham J. Cense ,  Donald T. Miller

IPC分类号： A61B3/14 ,  G01B9/02 ,  G01B11/16

CPC分类号： A61B3/102 ,  A61B3/1225 ,  G01B11/168

摘要： The present disclosure includes disclosure of devices, and methods to resolve microscopic structures. In at least one exemplary embodiment, a visualization apparatus comprises a source arm having a light source operable to emit a light beam, wherein the light beam defines a beam pathway, a reference arm comprising a reflecting surface positioned within the beam pathway, a sample arm comprising a wavefront sensor, an adaptive optics wavefront corrector, and a target, each of which are positioned within the beam pathway, wherein the adaptive optics wavefront sensor is operable to compensate for at least one aberration in the light beam, a detector arm comprising a beam detector positioned within the beam pathway, wherein the beam detector is operable to detect the reflected light beam from the reference arm and the target, and wherein the visualization apparatus is operable to minimize at least one aberration of the target.

摘要翻译： 本公开包括设备的公开以及解决微观结构的方法。 在至少一个示例性实施例中，可视化装置包括具有可操作以发射光束的光源的源臂，其中光束限定光束通路，包括位于光束通路内的反射表面的参考臂， 其包括波前传感器，自适应光学波前校正器和目标，每个都位于所述光束通路内，其中所述自适应光学波前传感器可操作以补偿所述光束中的至少一个像差;检测器臂，包括 光束检测器定位在光束通路内，其中光束检测器可操作以检测来自参考臂和靶的反射光束，并且其中可视化设备可操作以使目标的至少一个像差最小化。

公开(公告)号：US20110109898A1

公开(公告)日：2011-05-12

申请号：US12874901

申请日：2010-09-02

申请人： Mark E. FROGGATT ,  Justin W. KLEIN ,  Dawn K. GIFFORD ,  Stephen Tod KREGER

发明人： Mark E. FROGGATT ,  Justin W. KLEIN ,  Dawn K. GIFFORD ,  Stephen Tod KREGER

IPC分类号： G01N21/84

CPC分类号： G01B11/24 ,  G01B11/16 ,  G01B11/168 ,  G01B11/18 ,  G01L1/242 ,  G01L1/246 ,  G02B6/02042

摘要： An accurate measurement method and apparatus are disclosed for shape sensing with a multi-core fiber. A change in optical length is detected in ones of the cores in the multi-core fiber up to a point on the multi-core fiber. A location and/or a pointing direction are/is determined at the point on the multi-core fiber based on the detected changes in optical length. The accuracy of the determination is better than 0.5% of the optical length of the multi-core fiber up to the point on the multi-core fiber. In a preferred example embodiment, the determining includes determining a shape of at least a portion of the multi-core fiber based on the detected changes in optical length.

摘要翻译： 公开了一种使用多芯光纤进行形状检测的精确测量方法和装置。 在多芯光纤中的核心中的多芯光纤上的点之间检测到光学长度的变化。 基于检测到的光学长度的变化，在多芯光纤上的点处确定位置和/或指向方向。 该测定的精确度优于多核纤维的光学长度的0.5％直到多芯纤维上的点。 在优选示例实施例中，确定包括基于检测到的光学长度的变化来确定多芯光纤的至少一部分的形状。

公开(公告)号：US07859653B2

公开(公告)日：2010-12-28

申请号：US11848284

申请日：2007-08-31

申请人： Anthony J. Ragucci ,  Alan J. Cisar ,  Michael L. Huebschman ,  Harold R. Garner

发明人： Anthony J. Ragucci ,  Alan J. Cisar ,  Michael L. Huebschman ,  Harold R. Garner

IPC分类号： G01B11/16

CPC分类号： G01B11/168 ,  G01J3/2823 ,  G01J3/447

摘要： A method, computer program product and system for analyzing multispectral images from a plurality of regions of birefringent material, such as a polymer film, using polarized light and a corresponding polar analyzer to identify differential strain in the birefringent material. For example, the birefringement material may be low-density polyethylene (LDPE), high-density polyethylene (HDPE), polypropylene, polyethylene terephthalate (PET), polyvinyl chloride (PVC), polyvinylidene chloride, polyester, nylon, or cellophane film. Optionally, the method includes generating a real-time quantitative strain map.

摘要翻译： 一种用于从双折射材料的多个区域（例如聚合物膜）使用偏振光和相应的极性分析仪分析多光谱图像以识别双折射材料中的微分应变的方法，计算机程序产品和系统。 例如，双折射材料可以是低密度聚乙烯（LDPE），高密度聚乙烯（HDPE），聚丙烯，聚对苯二甲酸乙二醇酯（PET），聚氯乙烯（PVC），聚偏二氯乙烯，聚酯，尼龙或玻璃纸膜。 可选地，该方法包括生成实时定量应变图。

公开(公告)号：US20080094609A1

公开(公告)日：2008-04-24

申请号：US11848284

申请日：2007-08-31

申请人： Anthony Ragucci ,  Alan Cisar ,  Michael Huebschman ,  Harold Garner

发明人： Anthony Ragucci ,  Alan Cisar ,  Michael Huebschman ,  Harold Garner

IPC分类号： G01B11/16

CPC分类号： G01B11/168 ,  G01J3/2823 ,  G01J3/447

摘要： A method, computer program product and system for analyzing multispectral images from a plurality of regions of birefringent material, such as a polymer film, using polarized light and a corresponding polar analyzer to identify differential strain in the birefringent material. For example, the birefringement material may be low-density polyethylene (LDPE), high-density polyethylene (HDPE), polypropylene, polyethylene terephthalate (PET), polyvinyl chloride (PVC), polyvinylidene chloride, polyester, nylon, or cellophane film. Optionally, the method includes generating a real-time quantitative strain map.

摘要翻译： 一种用于从双折射材料的多个区域（例如聚合物膜）使用偏振光和相应的极性分析仪分析多光谱图像以识别双折射材料中的微分应变的方法，计算机程序产品和系统。 例如，双折射材料可以是低密度聚乙烯（LDPE），高密度聚乙烯（HDPE），聚丙烯，聚对苯二甲酸乙二醇酯（PET），聚氯乙烯（PVC），聚偏二氯乙烯，聚酯，尼龙或玻璃纸膜。 可选地，该方法包括生成实时定量应变图。

公开(公告)号：US20040075836A1

公开(公告)日：2004-04-22

申请号：US10652071

申请日：2003-09-02

申请人： DAINIPPON SCREEN MFG. CO., LTD.

发明人： Masahiro Horie ,  Hideki Hayashi ,  Fujikazu Kitamura ,  Kumiko Akashika

IPC分类号： G01J004/00

CPC分类号： G01N21/211 ,  G01B11/168 ,  G01N21/9501

摘要： A film thickness measurement apparatus (1) comprises an ellipsometer (3) for acquiring a polarization state of a film on a substrate (9) and a light interference unit (4) for acquiring spectral intensity of the film on the substrate (9). In an optical system (45) of the light interference unit (4), a light shielding pattern (453a) is disposed in an aperture stop part (453), and an illumination light from a light source (41) is emitted to the substrate (9) through the optical system (45). A reflected light from the substrate (9) is guided to a light shielding pattern imaging part (43), where an image of the light shielding pattern (453a) is acquired. When the ellipsometer (3) performs a film thickness measurement, a tilt angle of the substrate (9) is obtained on the basis of the image of the light shielding pattern (453a) and a light receiving unit (32) acquires a polarization state of the reflected light. An calculation part (51) obtains a thickness of a film with high precision from the polarization state of the reflected light by using the obtained tilt angle.

摘要翻译： 膜厚测量装置（1）包括用于获取基板（9）上的胶片的偏振态的椭圆偏振仪（3）和用于获取基板（9）上的胶片的光谱强度的光干涉单元（4）。 在光干涉单元（4）的光学系统（45）中，在孔径光阑部（453）中设置有遮光图案（453a），将来自光源（41）的照明光发射到基板 （9）通过光学系统（45）。 来自基板（9）的反射光被引导到获取了遮光图案（453a）的图像的遮光图案成像部（43）。 当椭圆光度计（3）进行膜厚测量时，基于遮光图案（453a）的图像获得基板（9）的倾斜角度，并且光接收单元（32）获得偏光状态 反射光。 计算部件（51）通过使用所获得的倾斜角度从反射光的偏振状态获得高精度的胶片的厚度。