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    Miniaturized pressure sensor
    1.
    发明申请
    Miniaturized pressure sensor 有权
    小型压力传感器

    公开(公告)号：US20040168519A1

    公开(公告)日：2004-09-02

    申请号：US10479802

    申请日：2004-04-16

    发明人： Edvard Kalvensten ,  Patrik Melvas ,  Goran Stemme

    IPC分类号： G01L009/06

    CPC分类号： G01L9/0042 ,  G01L9/006 ,  G01L9/0083

    摘要： An entirely surface micromachined free hanging strain-gauge pressure sensor is disclosed. The sensing element consists of a 80 nullm long H-shaped double ended supported force transducing beam (16). The beam is located beneath and at one end attached to a square polysilicon diaphragm (14) and at the other end to the cavity edge. The sensor according to the invention enables a combination of high pressure sensitivity and miniature chip size as well as good environmental isolation. The pressure sensitivity for the sensor with a H-shaped force transducing beam, 0.4 nullm thick was found to be 5 nullV/V/mmHg.

    摘要翻译： 公开了一种完全表面的微加工自由悬挂应变计压力传感器。 传感元件由80 m长的H形双端支撑力传感梁（16）组成。 该光束位于与一个方形多晶硅隔膜（14）相连的一端，另一端位于空腔边缘的一端。 根据本发明的传感器能​​够实现高压灵敏度和微型芯片尺寸的组合以及良好的环境隔离。 发现具有0.4μm厚的H形力传感束的传感器的压力灵敏度为5μV/ V / mmHg。

    Fluid-pressure transducer
    5.
    发明授权
    Fluid-pressure transducer 失效
    流体压力传感器

    公开(公告)号：US3676821A

    公开(公告)日：1972-07-11

    申请号：US3676821D

    申请日：1968-12-05

    申请人： BUNKER RAMO

    发明人： SEGERDAHL ROY R ,  JONKE JOSEPH L

    IPC分类号： G01L9/00 ,  H01H35/26 ,  H01C13/00

    CPC分类号： H01H35/2635 ,  G01L9/0083

    摘要： Apparatus for converting a change in fluid-pressure into mechanical motion of a part, which motion can be used to generate a suitable output signal. Two bands affixed to a sheave are wound thereon, side by side, in opposite directions. The free ends of the bands are connected to a pushrod which is in the same plane and at right angle to the axis of the sheave. The clockwise wound band is connected to the right of the axis of the sheave and other band is connected to the left thereof. The pushrod is connected at one of its ends to a pressure capsule which deflects when the fluid-pressure acting thereon is changed. This deflection causes the sheave to rotate and generate the desired output effect.

    摘要翻译： 用于将流体压力的变化转换成部件的机械运动的装置，该运动可用于产生合适的输出信号。 固定在滑轮上的两个带在相反的方向上并排缠绕在其上。 带的自由端连接到在同一平面内且与滑轮的轴线成直角的推杆。 顺时针缠绕带连接在滑轮轴线的右侧，而其他带连接在其左侧。 推杆在其一端连接到压力胶囊，当压力作用于其上的流体压力改变时，压力胶囊会偏转。 该偏转导致滑轮旋转并产生期望的输出效果。