公开(公告)号：US20030164046A1

公开(公告)日：2003-09-04

申请号：US10312974

申请日：2003-03-04

发明人： Peter Apel

IPC分类号： G01L009/06

CPC分类号： G01H11/08 ,  G01P15/0907 ,  Y10T29/42

摘要： A piezoelectric sensor includes a carrier, a piezoelectric measurement sensing element arranged on the carrier, a covering layer covering the measurement sensing element and an electronic evaluation unit. The measurement sensing element is formed by a piezoelectric layer. The carrier has a first contact layer electrically connected to the piezoelectric layer and the covering layer has a second contact layer electrically connected to the piezoelectric layer. The electronic evaluation unit is able to determine a mechanical loading of the piezoelectric layer by evaluating the difference of electrical potential between the first contact layer and the second contact layer.

摘要翻译： 压电传感器包括载体，布置在载体上的压电测量感测元件，覆盖测量感测元件的覆盖层和电子评估单元。 测量感测元件由压电层形成。 载体具有电连接到压电层的第一接触层，并且覆盖层具有与压电层电连接的第二接触层。 电子评估单元能够通过评估第一接触层和第二接触层之间的电位差来确定压电层的机械载荷。

公开(公告)号：US20040045360A1

公开(公告)日：2004-03-11

申请号：US10343511

申请日：2003-01-31

发明人： Moroni Andrea ,  Volonterio Eugenio

IPC分类号： G01L009/06

CPC分类号： G01L9/0019

摘要： A pressure sensing device for measuring the pressure of a fluid, comprising: a measurement diaphragm which is at least partially made of semiconductor material, is provided with a first surface and a second surface which are exposed respectively to a first pressure and to a second pressure, and undergoes a deformation following the application of the first pressure and of the second pressure; and a resonant element made of semiconductor material which is provided with a first end portion and with a second end portion for mechanically coupling the resonant element to the measurement diaphragm, the oscillation frequency of the resonant element varying according to the deformation to which the measurement diaphragm is subjected; and first circuit means for generating a sensing signal which is indicative of the oscillation frequency of the resonant element. Its particularity consisting of the fact that the resonant element comprises second circuit means for increasing the intensity of the sensing signal which is indicative of the oscillation frequency of the resonant element, the second circuit means being integrated with the structure of the resonant element.

摘要翻译： 一种用于测量流体压力的压力感测装置，包括：至少部分地由半导体材料制成的测量膜片，设置有分别暴露于第一压力和第二压力的第一表面和第二表面 并且在施加第一压力和第二压力之后经历变形; 以及由半导体材料制成的谐振元件，其具有第一端部和用于将谐振元件机械耦合到测量膜片的第二端部，谐振元件的振荡频率根据测量膜片的变形而变化 受到影响 以及用于产生表示谐振元件的振荡频率的感测信号的第一电路装置。 其特性包括以下事实：谐振元件包括用于增加表示谐振元件的振荡频率的感测信号的强度的第二电路装置，第二电路装置与谐振元件的结构集成。

公开(公告)号：US20040163474A1

公开(公告)日：2004-08-26

申请号：US10761948

申请日：2004-01-21

发明人： Jurgen Bethke ,  Georg Fischer ,  Georg Mentzel

IPC分类号： G01L009/06

CPC分类号： G01L19/147 ,  F16H61/0003 ,  F16H2059/683 ,  G01L19/003 ,  G01L19/0038

摘要： A pressure sensor (3) is firmly connected to a base plate (1). The base plate (1) can be mounted, together with the pressure sensor (3), on a counterplate (7). The counterplate (7) has a drilled hole (8) through which pressure can be applied to the pressure sensor (3). The pressure sensor (3) has a connecting element (6) which projects, in the mounted state, into the drilled hole (8) in the counterplate (7).

摘要翻译： 压力传感器（3）牢固地连接到基板（1）。 基板（1）可以与压力传感器（3）一起安装在对准板（7）上。 台板（7）具有钻孔（8），压力传感器（3）可以通过该孔钻出压力。 压力传感器（3）具有在安装状态下突出到对面板（7）中的钻孔（8）中的连接元件（6）。

公开(公告)号：US20040129059A1

公开(公告)日：2004-07-08

申请号：US10682664

申请日：2003-10-09

申请人： DELPHI TECHNOLOGIES, INC.

发明人： Ronald J. Kiess ,  Lewis Henry Little ,  Marion E. Ellis ,  Raymond O. Butler JR.

IPC分类号： G01M019/02 ,  G01L023/22 ,  G01L009/04 ,  G01L009/06 ,  G01L009/08

CPC分类号： G01L23/18 ,  G01L23/22

摘要： A thick film resistor strain gauge is applied to a stainless steel shell portion of a spark plug. There are two preferable ways of applying a thick film resistor to the metal shell. In a first embodiment, the thick film resistor may be directly printed on to the shell portion with special screen printing equipment. In a second embodiment, the thick film resistor is printed and applied as a decal to the shell portion. The thick film resistors may be included in a quarter, a half, or a full wheatstone bridge strain gauge circuit. One of two embodiments of an automatic drift compensating circuit is used to determine the change in resistance experienced by the thick film resistors affixed to the spark plug. Either one of the automatic drift compensation circuits output a voltage signal which is proportional to the pressure changes occurring inside the engine cylinder into which the spark plug is threaded.

摘要翻译： 将厚膜电阻应变仪施加到火花塞的不锈钢外壳部分。 将厚膜电阻器应用于金属外壳的优选方式有两种。 在第一实施例中，厚膜电阻器可以用特殊的丝网印刷设备直接印刷在外壳部分上。 在第二实施例中，厚膜电阻器作为贴花印刷并施加到壳部分。 厚膜电阻器可以包括在四分之一，一半或全麦克斯通电桥应变仪电路中。 自动漂移补偿电路的两个实施例之一用于确定固定在火花塞上的厚膜电阻所经历的电阻变化。 自动漂移补偿电路中的任一个输出与发动机气缸内发生的压力变化成比例的电压信号，发动机气缸内插有火花塞。

公开(公告)号：US20040103723A1

公开(公告)日：2004-06-03

申请号：US10664041

申请日：2003-09-17

发明人： Paul Kirschbaum

IPC分类号： G01L009/06

CPC分类号： G01D3/022

摘要： A sensor (1) is provided in the region of the connecting socket (3) for the connecting cable (5) with an integrated identification unit (6) which can be electrically queried and contacted through a separate pole of the connecting cable (5), on the one hand, and through the cable shield of the connecting cable (5), on the other hand, whereby the sensitivity of the sensor (1) can be coded and queried from the outside via the connecting cable (5) by means of the identification unit (6).

摘要翻译： 传感器（1）设置在用于连接电缆（5）的连接插座（3）的区域中，具有集成识别单元（6），可以通过连接电缆（5）的单独磁极进行电气查询和接触， 一方面通过连接电缆（5）的电缆屏蔽，另一方面，传感器（1）的灵敏度可以通过连接电缆（5）从外部被编码和查询 的识别单元（6）。

公开(公告)号：US20020194923A1

公开(公告)日：2002-12-26

申请号：US10172235

申请日：2002-06-14

发明人： Wolfgang Scholz ,  Albrecht Vogel ,  Peter Krippner

IPC分类号： G01L009/06

CPC分类号： G01L19/0618 ,  G01L9/0055 ,  G01L9/0073 ,  G01L13/026

摘要： There is disclosed a differential pressure sensor with a first and a second measuring chamber. Each measuring chamber being limited by a rigid carrier plate and a diaphragm plate, which is formed in the region of the measuring chamber as a pressure-sensitive measuring diaphragm. To design the differential pressure sensor to be resistant to overloading, the carrier plate is arranged between a first and a second diaphragm plate and has congruent concave depressions on opposite sides in the plane of the plate. The depressions are connected to one another by a central duct, penetrating the carrier plate perpendicularly to the plane of the plates. In the region of the measuring chambers, the diaphragm plates are formed congruently in relation to the depressions as pressure-sensitive measuring diaphragms. The measuring chambers are coupled to one another by a ram guided axially movably in the duct.

摘要翻译： 公开了一种具有第一和第二测量室的差压传感器。 每个测量室由刚性承载板和隔膜板限制，该板在测量室的区域中形成为压敏测量膜片。 为了设计差压传感器以防止过载，承载板布置在第一和第二隔膜板之间，并且在板的平面的相对侧上具有一致的凹陷。 凹陷通过中心导管彼此连接，垂直于板的平面穿过载体板。 在测量室的区域中，隔板相对于凹陷形成为压敏测量隔膜。 测量室通过在管道中可轴向移动的冲头彼此联接。

公开(公告)号：US20020134164A1

公开(公告)日：2002-09-26

申请号：US10106146

申请日：2002-03-26

发明人： Johannes Ante ,  Christian Geiger ,  Markus Gilch ,  Hans-Peter Landgraf ,  Andreas Ott

IPC分类号： G01L009/06

CPC分类号： G01L9/0055

摘要： A pressure sensor device is described that has a diaphragm acted upon by a working medium, on a first side, and a sensor chip, which is disposed on a second side of the diaphragm that is remote from the working medium. There is formed in the sensor chip a measuring bridge having four sensor elements, which form two pairs disposed parallel, and the pairs are disposed at right angles to one another. The sensor elements are disposed such that they are closely spaced apart from one another in the edge region of the sensor chip that faces toward the central point of the diaphragm.

摘要翻译： 描述了一种压力传感器装置，其具有由第一侧的工作介质和设置在隔膜的远离工作介质的第二侧上的传感器芯片作用的隔膜。 在传感器芯片中形成有具有四个传感器元件的测量桥，传感器元件形成平行布置的两对，并且对彼此成直角。 传感器元件设置成使得它们在传感器芯片的面向隔膜的中心点的边缘区域中彼此紧密地间隔开。

公开(公告)号：US20040168519A1

公开(公告)日：2004-09-02

申请号：US10479802

申请日：2004-04-16

发明人： Edvard Kalvensten ,  Patrik Melvas ,  Goran Stemme

IPC分类号： G01L009/06

CPC分类号： G01L9/0042 ,  G01L9/006 ,  G01L9/0083

摘要： An entirely surface micromachined free hanging strain-gauge pressure sensor is disclosed. The sensing element consists of a 80 nullm long H-shaped double ended supported force transducing beam (16). The beam is located beneath and at one end attached to a square polysilicon diaphragm (14) and at the other end to the cavity edge. The sensor according to the invention enables a combination of high pressure sensitivity and miniature chip size as well as good environmental isolation. The pressure sensitivity for the sensor with a H-shaped force transducing beam, 0.4 nullm thick was found to be 5 nullV/V/mmHg.

摘要翻译： 公开了一种完全表面的微加工自由悬挂应变计压力传感器。 传感元件由80 m长的H形双端支撑力传感梁（16）组成。 该光束位于与一个方形多晶硅隔膜（14）相连的一端，另一端位于空腔边缘的一端。 根据本发明的传感器能​​够实现高压灵敏度和微型芯片尺寸的组合以及良好的环境隔离。 发现具有0.4μm厚的H形力传感束的传感器的压力灵敏度为5μV/ V / mmHg。

公开(公告)号：US20040159159A1

公开(公告)日：2004-08-19

申请号：US10778135

申请日：2004-02-17

申请人： DENSO CORPORATION

发明人： Teruo Oda ,  Inao Toyoda

IPC分类号： G01L009/06

CPC分类号： G01L23/08 ,  G01L9/006

摘要： A pressure detector such as a combustion pressure sensor includes a pressure-sensitive element disposed in a cylindrical housing. Electrical signals responsive to pressure applied to the pressure-responsive element are generated in the element and led to output terminals through conductor patterns formed on the surface of a connecting member disposed between the pressure-responsive element and the output terminals. The conductor patterns may be formed in grooves formed on the surface of the connecting member. In place of the connecting member, a disc-shaped thin conductive member made of an anisotropiccally conductive material may be used.

摘要翻译： 诸如燃烧压力传感器的压力检测器包括设置在圆柱形壳体中的压敏元件。 响应于施加到压力响应元件的压力的电信号在元件中产生并且通过形成在设置在压力响应元件和输出端子之间的连接构件的表面上的导体图案而被引导到输出端子。 导体图案可以形成在形成在连接构件的表面上的凹槽中。 可以使用由各向异性导电材料制成的盘状薄导电构件来代替连接构件。

公开(公告)号：US20030230147A1

公开(公告)日：2003-12-18

申请号：US10172865

申请日：2002-06-17

申请人： Honeywell International Inc.

发明人： Thomas G. Stratton ,  Gary R. Gardner ,  Curtis H. Rahn

IPC分类号： G01L009/06

CPC分类号： G01L9/0042 ,  G01L19/0627

摘要： A microelectromechanical device and method of fabricating the same, including a layer of patterned and deposited metal or mechanical-quality, doped polysilicon inserted between the appropriate device element layers, which provides a conductive layer to prevent the microelectromechanical device's output from drifting. The conductive layer may encapsulate of the device's sensing or active elements, or may selectively cover only certain of the device's elements. Further, coupling the metal or mechanical-quality, doped polysilicon to the same voltage source as the device's substrate contact may place the conductive layer at the voltage of the substrate, which may function as a Faraday shield, attracting undesired, migrating ions from interfering with the output of the device.

摘要翻译： 一种微机电装置及其制造方法，其包括插入在适当的器件元件层之间的图案化和沉积的金属或机械质量的掺杂多晶硅层，其提供导电层以防止微机电装置的输出漂移。 导电层可以封装器件的感测或有源元件，或者可以选择性地仅覆盖器件的某些元件。 此外，将金属或机械质量的掺杂多晶硅耦合到与器件的衬底接触相同的电压源可将导电层置于衬底的电压下，其可用作法拉第屏蔽，吸引不期望的迁移离子干扰 设备的输出。