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127 条记录 (耗时 0.022 秒)

    LINKAGE CONDUIT FOR VACUUM CHAMBER APPLICATIONS
    2.
    发明申请
    LINKAGE CONDUIT FOR VACUUM CHAMBER APPLICATIONS 有权
    用于真空室应用的连接管

    公开(公告)号：US20160071686A1

    公开(公告)日：2016-03-10

    申请号：US14482761

    申请日：2014-09-10

    申请人： Varian Semiconductor Equipment Associates, Inc.

    发明人： Eric D. Hermanson ,  Robert J. Mitchell ,  Steven Anella ,  Jeffrey Charles Blahnik ,  William T. Weaver ,  Michael Rohrer ,  James P. Buonodono

    IPC分类号： H01J37/18 ,  H01J37/20 ,  H01J37/317

    CPC分类号： H01J37/20 ,  H01J21/18 ,  H01J37/3171 ,  H01J2237/2005 ,  H01J2237/202 ,  H01L21/18

    摘要： An ion implantation apparatus including an enclosure defining a process chamber, a carriage slidably mounted on a shaft within the process chamber and coupled to a drive mechanism adapted to selectively move the carriage along the shaft. A platen assembly can be coupled to the carriage, and a linkage conduit can extend between a side wall of the enclosure and the carriage. The linkage conduit can include a plurality of pivotably interconnected linkage members that define a contiguous internal volume that is sealed from the process chamber. The contiguous volume can be held at a desired vacuum pressure separate from the vacuum environment of the process chamber.

    摘要翻译： 一种离子注入装置，其包括限定处理室的外壳，可滑动地安装在处理室内的轴上并联接到适于沿着轴选择性地移动托架的驱动机构的托架。 压板组件可以联接到滑架，并且连接导管可以在外壳的侧壁和滑架之间延伸。 连接导管可以包括多个可枢转地互连的连接构件，其限定了与处理室密封的连续内部容积。 连续体积可以保持在与处理室的真空环境分开的期望的真空压力下。

    Periodic magnetically focused beam tube
    3.
    发明授权
    Periodic magnetically focused beam tube 失效
    周期性磁聚焦束管

    公开(公告)号：US3787747A

    公开(公告)日：1974-01-22

    申请号：US3787747D

    申请日：1972-08-07

    申请人： VARIAN ASSOCIATES

    发明人： SCOTT A

    IPC分类号： H01J21/18 ,  H01J23/087 ,  H01J25/34

    CPC分类号： H01J21/18 ,  H01J23/0873

    摘要： The periodic magnet structure for a periodically focused beam tube is formed by a single pair of homogeneous slabs of magnetizable material that are permanently magnetized with a pattern of magnetic poles of alternating polarity taken along the direction of the beam path. In a sheet beam tube of preferred geometry, a pair of ceramic slabs are disposed to straddle the sheet beam and the internal planar faces of the ceramic slabs have circuits printed thereon for: electrical connections to all elements, beam forming electrodes, microwave interaction structure, edge focusing electrodes, and the beam collector electrode structure. The permanently magnetized slabs are disposed external to the vacuum envelope, straddling the printed circuit ceramic slabs, for focusing the beam.

    摘要翻译： 用于周期性聚焦的光束管的周期性磁体结构由一对可磁化材料的均匀平板形成，其永久地磁化，沿着光束路径的方向具有交替极性的磁极的图案。 在优选几何形状的片材束管中，一对陶瓷板被设置成跨越片材梁，并且陶瓷板的内部平坦面具有印刷在其上的电路，用于：与所有元件的电连接，波束形成电极，微波相互作用结构， 边缘聚焦电极和束集电极结构。 永久磁化的板坯设置在真空外壳的外部，跨过印刷电路陶瓷板，用于聚焦光束。

    Magnetically controlled electron tube function generator
    4.
    发明授权
    Magnetically controlled electron tube function generator 失效
    磁控制电子管功能发生器

    公开(公告)号：US3660770A

    公开(公告)日：1972-05-02

    申请号：US3660770D

    申请日：1970-04-07

    申请人： WILLIAM W SNOW

    发明人： SNOW WILLIAM W

    IPC分类号： G06G7/26 ,  H01J21/18

    CPC分类号： H01J21/18 ,  G06G7/26

    摘要： A function generator. An electron tube is provided having a cathode, and an anode coextensive with and spaced from the cathode so as to form a gap therebetween. The anode is at a higher potential than the cathode so as to create an electric field between the anode and the cathode. A means for obtaining an output from the function generator as a desired function of the input to the function generator is also provided. This means includes a means for providing a magnetic field in the gap which is normal to the electric field and further includes means for varying the direction of the magnetic field. The variation in the electric field is obtained by varying the width of the gap in the direction of the longitudinal axis of the tube. The variation in the magnetic field is obtained by varying the intensity of the magnetic field in the direction of the longitudinal axis of the tube. By use of additional magnetic fields or by separating the cathode and anode into distinct portions, or a combination thereof multiple functions may be provided.

    摘要翻译： 函数发生器 提供了具有阴极和与阴极共同延伸并与阴极间隔开的阳极以在其间形成间隙的电子管。 阳极处于比阴极更高的电位，以在阳极和阴极之间产生电场。 还提供了用于从函数发生器获得输出作为函数发生器的输入的期望函数的装置。 该装置包括用于在与电场垂直的间隙中提供磁场的装置，还包括用于改变磁场方向的装置。 通过改变管的纵向轴线方向上的间隙的宽度来获得电场的变化。 通过改变管的纵向轴线方向的磁场强度来获得磁场的变化。 通过使用额外的磁场或通过将阴极和阳极分离成不同的部分，或其组合，可以提供多种功能。