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    Method and apparatus of concentrating chemicals for semiconductor device manufacturing
    2.
    发明授权
    Method and apparatus of concentrating chemicals for semiconductor device manufacturing 失效
    浓缩化学品用于半导体器件制造的方法和装置

    公开(公告)号：US5900124A

    公开(公告)日：1999-05-04

    申请号：US842276

    申请日：1997-04-24

    申请人： Yong-woo Her ,  Heoung-bin Kim ,  Bok-soon Ko ,  Byoung-woo Son

    发明人： Yong-woo Her ,  Heoung-bin Kim ,  Bok-soon Ko ,  Byoung-woo Son

    IPC分类号： B01D1/00 ,  B01D1/14 ,  B01D5/00 ,  H01L21/304 ,  B01D3/00

    CPC分类号： B01D1/0029 ,  B01D1/14 ,  Y10S159/06 ,  Y10S159/15 ,  Y10S159/21 ,  Y10S159/35 ,  Y10S203/11

    摘要： A method of concentrating chemicals for semiconductor devices, which includes the steps of heating a sample container by using a high-energy light source, vaporizing the chemicals by injecting a high-temperature gas into the sample container through an injection opening in the sample container and discharging the vaporized chemicals by the pressure of the gas through a gas outlet formed on the sample container. An apparatus of concentrating chemicals for semiconductor devices includes a sample container having a sample-supply window, a gas-injection opening and a gas outlet. A high-energy light source heats the sample container and a gas-supply source supplies the gas through a gas-injection opening in the sample container. A gas-heating device located between the sample container and the gas-supply source heats the gas provided by the gas-supply source.

    摘要翻译： 一种浓缩用于半导体器件的化学品的方法，其包括通过使用高能量光源加热样品容器的步骤，通过将样品容器中的高温气体注入到样品容器中，通过样品容器中的注射开口蒸发化学品，以及 通过气体的压力通过形成在样品容器上的气体出口排出蒸发的化学物质。 用于半导体器件的浓缩化学品的装置包括具有供样窗口，气体注入口和气体出口的样本容器。 高能量光源加热样品容器，气体供给源通过样品容器中的气体注入口供给气体。 位于样品容器和气体供应源之间的气体加热装置加热由气体供应源提供的气体。