公开(公告)号：US5832177A

公开(公告)日：1998-11-03

申请号：US426185

申请日：1995-04-21

申请人： Keisuke Shinagawa ,  Shuzo Fujimura ,  Yuuji Matoba ,  Yoshimasa Nakano ,  Tatsuya Takeuchi ,  Takeshi Miyanaga

发明人： Keisuke Shinagawa ,  Shuzo Fujimura ,  Yuuji Matoba ,  Yoshimasa Nakano ,  Tatsuya Takeuchi ,  Takeshi Miyanaga

IPC分类号： C23C16/448 ,  H01L21/00 ,  A61M33/06 ,  B05C11/00 ,  F22B29/06

CPC分类号： H01L21/67017 ,  C23C16/4485

摘要： A method for controlling an apparatus for supplying steam to an ashing process. The apparatus includes a closed water-containing vessel formed from a material having good heat conductive characteristics for evaporating water to provide steam to a vacuum chamber housing an ongoing ashing process. In accordance with the procedure, steam evaporated in a closed steam supply tank is introduced into a vacuum chamber via a pressure reducing mass-flow controller. The temperature of the water in the supply tank, the temperature of the steam in the pipes leading from the supply tank to the mass-flow controller, the temperature of the steam in the pipes from the mass-flow controller to the vacuum chamber and the temperature of the steam in the mass-flow controller itself are all independently controlled such that the temperature in the water tank is equal to or less than the temperature in the pipes leading to and from the mass-flow controller and the temperature in the pipes is less than or equal to the temperature in the mass-flow controller.

摘要翻译： 一种用于控制用于向灰化过程供应蒸汽的装置的方法。 该装置包括由具有良好导热特性的材料形成的封闭的含水容器，用于蒸发水以向容纳正在进行的灰化过程的真空室提供蒸汽。 按照该程序，在封闭的蒸汽供应罐中蒸发的蒸汽通过减压质量流量控制器引入真空室。 供水箱内水的温度，从供水箱通向质量流量控制器的管道中的蒸汽温度，从质量流量控制器到真空室的管道中的蒸汽温度以及 质量流量控制器本身的蒸汽温度都是独立控制的，使得水箱中的温度等于或小于通向质量流量控制器的管道中的温度，并且管道中的温度为 小于或等于质量流量控制器中的温度。