摘要:
A vacuum chamber-forming method for forming a vacuum chamber in a power element of a control valve for a variable capacity compressor through a reduced number of steps. A power element is assembled in the atmospheric air by arranging a disk, a diaphragm, a disk, a spring and an upper housing on a lower housing, caulking the periphery of the lower housing to the periphery of the upper housing, and then soldering the junction of the upper and lower housings. The assembled power element is placed in a vacuum container, and a small hole formed in the upper housing is subjected to spot welding in the vacuum atmosphere, whereby the small hole is sealed by a weld metal.
摘要:
A workpiece supply device for an electron beam processing device is provided that can reduce the cycle times for changing a workpiece using a multi-functional workpiece holding device.
摘要:
In a partial vacuum type electron beam irradiation system having a construction such that a static pressure floating pad is connected to a vacuum chamber incorporating an electron beam column, and an electron beam passes through an electron beam passage of the static pressure floating pad to impinge on a body to be irradiated in the condition where the static pressure floating pad is contactlessly attracted to the body to be irradiated, a vacuum seal valve for opening and closing the electron beam passage is provided in the inside of the static pressure floating pad, and when the static pressure floating pad is separated away from the body to be irradiated, the vacuum seal valve is actuated to close the electron beam passage, whereby the atmospheric air is prevented from flowing into the vacuum chamber