公开(公告)号：US07274445B1

公开(公告)日：2007-09-25

申请号：US11078462

申请日：2005-03-11

申请人： Steven W. Meeks

发明人： Steven W. Meeks

IPC分类号： G01N21/00 ,  G01B27/40

CPC分类号： G01N21/958 ,  G01N21/9501 ,  G01N2021/8967

摘要： A problem in the inspection of transparent wafers and disks is the detection of top surface particles. More precisely, it is being able to assign a scattering site as being due to a particle at the top or bottom surface of a transparent wafer. A method of the present invention is to use an elliptical mirror, with a pinhole at its top focus, together with a focused beam. The focused beam will diverge as it passes through the transparent wafer and as a result any particle on the bottom surface will see a lower optical intensity and will appear weaker than a top surface particle. The suppression of scattered light from the bottom surface occurs because the source of the scattered light (the bottom surface) is far from the bottom foci of the elliptical mirror. This means that the light from the bottom surface, which arrives inside the ellipsoid, will be out of focus at the top foci of the ellipsoid and as a result very little light from the bottom surface will pass through the pinhole at the top foci of the elliptical mirror. This reduction of light from the bottom surface can be further improved by making the pinhole diameter to be substantially less than the thickness of the transparent wafer.

摘要翻译： 检查透明晶片和盘片的问题是检测顶表面颗粒。 更准确地说，它能够将散射位置分配为由于在透明晶片的顶表面或底表面处的颗粒。 本发明的一种方法是使用椭圆镜与其聚焦光束一起在其顶焦点处具有针孔。 聚焦光束在透过透明晶片时会发散，因此底面上的任何颗粒将会看到较低的光学强度，并且会比顶表面颗粒显得更弱。 由于散射光源（底面）远离椭圆镜的底部焦点，因此抑制来自底面的散射光。 这意味着来自底面的光到达椭圆体的内部将会在椭圆顶部的焦点处失焦，因此来自底面的很少的光将穿过位于椭圆体的顶部焦点处的针孔 椭圆镜。 通过使针孔直径基本上小于透明晶片的厚度，可以进一步提高来自底面的光的这种减少。

公开(公告)号：US07324218B2

公开(公告)日：2008-01-29

申请号：US10503650

申请日：2003-05-12

申请人： Joerg Stierle ,  Peter Wolf ,  Gunter Flinspach

发明人： Joerg Stierle ,  Peter Wolf ,  Gunter Flinspach

IPC分类号： G01C3/08 ,  G01B27/40

CPC分类号： G01S7/493 ,  G01C15/002 ,  G01S7/491 ,  G01S7/497 ,  G01S17/36

摘要： The present invention relates to a device (10) for distance measurement, with at least one transmitting branch (14) with a transmission source (22, 24) for a measurement signal for emitting a modulated measuring beam (16, 26, 36) in the direction of a target object (20), and with a receive branch (18) for the measurement radiation (17, 44) returning from the target object (30), and with a control and evaluation unit (28, 58) for determining the distance of the device (10) to the target object (20) from the measurement radiation returning from the target object (20).It is proposed according to the invention that the device (10) include means that enable measurement of distances with predetermined measurement uncertainties.The present invention further relates to a method for distance measurement, with which a measurement of distances with predetermined measurement uncertainties is possible. To ensure a distance measurement in a certain, predetermined measurement time, the value on which a distance measurement is based can be adjusted to the measurement uncertainty, and can be increased incrementally in particular.

摘要翻译： 本发明涉及一种用于距离测量的设备（10），具有至少一个发射分支（14），其具有用于发射调制测量光束（16,26,36）的测量信号的发射源（22,24） 目标对象（20）的方向，以及用于从目标对象（30）返回的测量辐射（17,44）的接收分支（18）以及用于确定目标对象的控制和评估单元（28,58） 所述装置（10）与所述目标物体（20）距离从所述目标物体（20）返回的测量辐射的距离。 根据本发明提出，装置（10）包括能够以预定的测量不确定性测量距离的装置。 本发明还涉及一种用于距离测量的方法，通过该方法可以进行具有预定测量不确定性的距离的测量。 为了在一定的预定测量时间内确保距离测量，可以将距离测量所基于的值调整到测量不确定度，并且可以特别地增量地增加。