公开(公告)号：US06633376B1

公开(公告)日：2003-10-14

申请号：US09719610

申请日：2000-12-12

申请人： Satoshi Nishida ,  Masanori Mizuno ,  Miki Kurosawa ,  Shozui Takeno ,  Masaharu Moriyasu

发明人： Satoshi Nishida ,  Masanori Mizuno ,  Miki Kurosawa ,  Shozui Takeno ,  Masaharu Moriyasu

IPC分类号： G01N2158

CPC分类号： G01R31/309 ,  G01N21/88 ,  G01N21/8901 ,  G01N21/956

摘要： As a scanning device for positioning the irradiation position of the laser beam emitted from a laser oscillator at a position of arbitrary coordinates in the commanded mutually orthogonal X-axis direction and Y-axis direction, two galvanomirrors having mutually orthogonal rotary axes and a scan lens are provided, and the light generated from a printed circuit board irradiated with laser beam is detected by a detector, and approval or rejection of inspection result at each position of coordinates is judged on the basis of the output signal of the detector.

摘要翻译： 作为用于将从激光振荡器发射的激光束的照射位置定位在指令的相互正交的X轴方向和Y轴方向上的任意坐标的位置的扫描装置，具有相互正交的旋转轴的两个电流计镜和扫描透镜 并且由检测器检测从用激光束照射的印刷电路板产生的光，并且基于检测器的输出信号来判断在坐标的每个位置处的检查结果的批准或拒绝。