System and method for calibrating semiconductor processing equipment
    1.
    发明授权
    System and method for calibrating semiconductor processing equipment 失效
    用于校准半导体加工设备的系统和方法

    公开(公告)号:US06453742B1

    公开(公告)日:2002-09-24

    申请号:US09585892

    申请日:2000-05-31

    IPC分类号: G01P302

    CPC分类号: H01L21/67259 H01L21/67253

    摘要: A system for measuring the rotational speed of a shaft driven by a motor. The system includes a rotation measurement device having a rotatable sensor and configured to generate a signal corresponding to rotation of the sensor. The rotation measurement device may be supported by a fixture mountable on the motor. A coupler is associated with the sensor and includes a gripping surface configured to contact and grip the end-surface of the shaft to couple the sensor to the shaft and impart the rotation of the shaft to the sensor.

    摘要翻译: 一种用于测量由电动机驱动的轴的转速的系统。 该系统包括旋转测量装置,其具有可旋转的传感器并且被配置为产生对应于传感器的旋转的信号。 旋转测量装置可以由可安装在电动机上的灯具支撑。 耦合器与传感器相关联并且包括构造成接触并夹持轴的端表面以将传感器耦合到轴并且将轴的旋转赋予传感器的抓握表面。

    Dynamical quantity sensor
    2.
    发明授权
    Dynamical quantity sensor 有权
    动力传感器

    公开(公告)号:US06470747B1

    公开(公告)日:2002-10-29

    申请号:US09617801

    申请日:2000-07-17

    IPC分类号: G01P302

    CPC分类号: G01C19/5719

    摘要: This invention provides a dynamical quantity sensor having a novel structure, wherein first beams 3, 4, 5, 6 are extended from side walls of a recess 2 of a substrate 1, and an intermediate support member 7 is disposed on the first beams 3, 4, 5, 6. Second beams 8, 9, 10, 11 extending in a direction crossing substantially perpendicularly the first beams 3, 4, 5, 6 are disposed on the intermediate support member 7, and a weight 12 is disposed on the second beams 8, 9, 10, 11. Opposing electrodes 17 and 19 and opposing electrodes 18 and 20 are used as electrodes for excitation, and opposing electrodes 13 and 15 and opposing electrodes 14 and 16 are used as electrodes for detecting an angular velocity. The movement of the weight 12 resulting from the application of the angular velocity is detected.

    摘要翻译: 本发明提供了具有新颖结构的动力传感器,其中第一光束3,4,5,6从基板1的凹部2的侧壁延伸,并且中间支撑部件7设置在第一光束3上, 第二梁8,9,10,11沿基本上垂直于第一梁3,4,5,6的方向延伸的第二梁8,9,10,11设置在中间支撑构件7上,重物12设置在第二梁 光束8,9,10,11将相对电极17和19以及相对电极18和20用作激发电极,相对电极13和15以及相对电极14和16用作用于检测角速度的电极。 检测由施加角速度而产生的重物12的移动。

    Speed indication markings for tires
    3.
    发明授权
    Speed indication markings for tires 失效
    轮胎速度指示标记

    公开(公告)号:US06499422B1

    公开(公告)日:2002-12-31

    申请号:US09654772

    申请日:2000-09-05

    申请人: Grant Petersen

    发明人: Grant Petersen

    IPC分类号: G01P302

    摘要: A periodic pattern of colors is applied to a vehicle tire. The periodic pattern provides an indication of relative vehicle speed to an observer. The periodic pattern will appear to blend into a single color above a predetermined speed.

    摘要翻译: 将颜色的周期性图案应用于车辆轮胎。 周期性图案向观察者提供相对车速的指示。 周期性图案将显现为高于预定速度的单一颜色。

    Rotational turbocharger speed detector
    4.
    发明授权
    Rotational turbocharger speed detector 失效
    旋转涡轮增压器速度检测器

    公开(公告)号:US06298728B1

    公开(公告)日:2001-10-09

    申请号:US09296470

    申请日:1999-04-22

    IPC分类号: G01P302

    摘要: An arrangement for detecting the turbocharger rotational speed on internal-combustion engines is provided with at least one piezoelectric acceleration sensor fixed on the turbocharger and with an analyzing circuit having an analog filter arrangement for filtering the output signals of the acceleration sensor. The output signals of the filter arrangement are fed by way of a frequency-to-voltage converter in the form of an analog voltage, or directly in the form of frequency signals, as input signals to an electronic control unit of the internal-combustion engine or to a measuring and/or display unit. As a result, the turbocharger rotational speed can be detected at a reasonable cost with a small and robust arrangement suitable for mass production and requiring no constructional changes on the turbocharger.

    摘要翻译: 用于检测内燃机上的涡轮增压器转速的装置设置有固定在涡轮增压器上的至少一个压电加速度传感器和具有用于过滤加速度传感器的输出信号的模拟滤波器装置的分析电路。 滤波器装置的输出信号通过频率 - 电压转换器以模拟电压的形式或直接以频率信号的形式作为输入信号馈送到内燃机的电子控制单元 或测量和/或显示单元。 结果,可以以合理的成本检测涡轮增压器旋转速度,其结构适用于大规模生产并且不需要涡轮增压器的结构变化。