摘要:
A structure is provided in which a thrust feed forward structure for operating a structure to be driven without vibration and a control structure which simultaneously compensates for positional deviation caused by the thrust feed forward structure and positional deviation caused by a base displacement are included in a position controlling device (3). Alternatively, a structure is provided in which an acceleration and deceleration process for realizing response of the position of the structure to be driven and base displacement without vibration and a control structure which determines a feed forward amount with respect to a position instruction value after the acceleration and deceleration process are provided to the position controlling device.
摘要:
Safety units 1d to 1f for executing a safety function processing are connected to a non-safety controller constituted by connectting a plurality of units 1b, 1c including CPU units 1a. A CPU bus 10 to be connected with the CPU units and a safety dedicated bus 11 for mutually connecting the safety units are provided to the safety units. Since the safety dedicated bus is isolated from the non-safety system, reliability of the safety function can be secured. The CPU unit can read out data through the CPU bus irrespective of the safety unit and the non-safety unit.