Spatial filtering method for failure analysis of a device
    1.
    发明授权
    Spatial filtering method for failure analysis of a device 失效
    设备故障分析的空间滤波方法

    公开(公告)号:US06731824B2

    公开(公告)日:2004-05-04

    申请号:US09788615

    申请日:2001-02-21

    申请人: Jeremy D. Russell

    发明人: Jeremy D. Russell

    IPC分类号: G06K942

    CPC分类号: G06K9/00 G06K2209/19

    摘要: A spatial filtering method providing quick detection and visualization of irregularities of SEM images of components such as integrated circuits includes the steps of: (a) acquiring a digital image as a two-dimensional array of pixel data from an original image; (b) calculating a first Fourier transform to generate a two-dimensional array of complex data; (c) calculating a power spectrum to provide a real function representing a weighting of each spatial frequency in the original image; (d) generating a mask for suppressing regular structures of the original image and undesirable artifacts introduced by the acquiring of the digital image in step (a); (e) dilating the mask generated in step (d) by extending masking spots generated therein to increase the suppression of regular structures of the original image; (f) applying the mask dilated in step (e) to the data from the first Fourier transform for removing periodic data to result in a second Fourier transform; (g) calculating an inverse Fourier transform of the data of the second Fourier transform to obtain a spatially filtered image; (h) scaling the spatially filtered image to greyscale; and (i) providing a visual representation of the greyscaled image obtained in step (h).

    摘要翻译: 提供诸如集成电路的组件的SEM图像的不规则性的快速检测和可视化的空间滤波方法包括以下步骤:(a)从原始图像获取数字图像作为像素数据的二维阵列; (b)计算第一傅里叶变换以生成复数数据的二维阵列; (c)计算功率谱以提供表示原始图像中的每个空间频率的加权的实际函数; (d)生成用于抑制原始图像的规则结构的掩模和在步骤(a)中通过获取数字图像引入的不期望的伪影; (e)通过扩展在其中生成的掩蔽点来扩大步骤(d)中产生的掩模,以增加对原始图像的规则结构的抑制; (f)将在步骤(e)中扩大的掩模应用于来自第一傅里叶变换的数据,以去除周期性数据以产生第二傅里叶变换; (g)计算第二傅立叶变换的数据的傅立叶逆变换以获得空间滤波图像; (h)将空间滤波图像缩放为灰度; 和(i)提供在步骤(h)中获得的灰度图像的视觉表示。

    Expandable grayscale morphological erosion operator
    2.
    发明授权
    Expandable grayscale morphological erosion operator 失效
    可扩展灰度形态侵蚀算子

    公开(公告)号:US06674914B1

    公开(公告)日:2004-01-06

    申请号:US09400381

    申请日:1999-09-21

    申请人: Reitseng Lin

    发明人: Reitseng Lin

    IPC分类号: G06K942

    CPC分类号: G06T5/30

    摘要: A grayscale morphological erosion operator image processor which operates on images of any size and dimension with a structuring element of any dimension and shape. The present invention performs all 1D erosion operations in the domain by first decomposing an image and structuring element into a series of 1D slices, and then further segmenting the structuring element into a plurality of shorter 1D segments. These segments are processed in parallel using an array of parallel processors. Once the erosion operations are complete, the resulting one dimensional slices are composed into a final eroded image.

    摘要翻译: 灰度形态侵蚀操作员图像处理器,其具有任何尺寸和尺寸的图像,其具有任何尺寸和形状的结构元素。 本发明通过首先将图像和结构元素分解为一系列1D切片,然后将结构元素进一步分割成多个较短的1D段,从而在域中执行所有1D侵蚀操作。 这些段使用并行处理器阵列并行处理。 一旦侵蚀操作完成,所得到的一维切片就被构成最终侵蚀的图像。

    Hardware architectures for image dilation and erosion operations
    3.
    发明授权
    Hardware architectures for image dilation and erosion operations 失效
    用于图像扩张和侵蚀操作的硬件架构

    公开(公告)号:US06192160B1

    公开(公告)日:2001-02-20

    申请号:US08932132

    申请日:1997-09-18

    IPC分类号: G06K942

    CPC分类号: G06K9/44 G06T5/30

    摘要: A hardware architecture for mathematical morphology operations such as dilation and erosion of an image signal is provided. A hardware architecture for an image dilation operation includes: a plurality of adders corresponding to the size of the structuring element for adding the image signal and a structuring element symmetrical to the image signal with respect to the origin to output the result; a plurality of stores for temporarily storing the signals output from the plural adders; a comparator for comparing data stored in the plural stores with feedback data to output the maximum data; and an outputting device for outputting the output signal of the comparator as a dilation operation value if the dilation operation with respect to all structuring elements for one image signal is completed and feeding back the output signal of the comparator as input data of the comparator if not. Therefore, the elementary operations such as dilation and erosion with respect to a gray-level image signal can be attained by a simple arithmetic operation, that is, by finding the maximum/minimum value using an adder. Also, since the hardware architecture for the dilation and erosion operations adopts a feedback structure, the volume of the hardware linearly increases even though the size of the structuring element increases in geometrical progression.

    摘要翻译: 提供了用于数学形态学操作的硬件结构,例如图像信号的扩张和侵蚀。 用于图像扩张操作的硬件结构包括:对应于用于添加图像信号的结构元素的大小的多个加法器和与图像信号相对于原点对称的结构元素以输出结果; 多个存储器,用于临时存储从多个加法器输出的信号; 用于将存储在多个存储器中的数据与反馈数据进行比较以输出最大数据的比较器; 以及输出装置,用于如果相对于一个图像信号的所有结构元素的扩张操作完成并输出比较器的输出信号作为扩张操作值,并且将比较器的输出信号作为比较器的输入数据反馈 。 因此,通过简单的算术运算即通过使用加法器求出最大/最小值,可以获得关于灰度图像信号的基本运算,例如扩大和侵蚀。 此外,由于用于扩张和侵蚀操作的硬件架构采用反馈结构,即使结构元件的尺寸在几何进程中增加,硬件的体积线性增加。

    Method and apparatus for extracting the skeleton of a binary figure by contour-based erosion
    5.
    发明授权
    Method and apparatus for extracting the skeleton of a binary figure by contour-based erosion 有权
    通过基于轮廓的侵蚀来提取二值图形的骨架的方法和装置

    公开(公告)号:US06377710B1

    公开(公告)日:2002-04-23

    申请号:US09200187

    申请日:1998-11-25

    申请人: Eric Saund

    发明人: Eric Saund

    IPC分类号: G06K942

    摘要: A method and apparatus for performing thinning, or skeletonization, of binary images or figures are provided. More particularly, a method is implemented in a system for encoding a figure using a mid-crack boundary representation to identify the boundary contour of the figure. Then, the boundary contour of the figure is traversed while the boundary is selectively displaced inward. The boundary contour is also concurrently re-encoded based on the selectively displaced boundary.

    摘要翻译: 提供了用于执行二进制图像或图形的稀疏化或骨架化的方法和装置。 更具体地,在用于使用中裂纹边界表示对图形进行编码以识别图形的边界轮廓的系统中实现一种方法。 然后,图形的边界轮廓遍历,同时边界选择性向内移位。 边界轮廓也基于选择性移位边界同时重新编码。

    Image processing device and processing method
    6.
    发明授权
    Image processing device and processing method 失效
    图像处理装置及处理方法

    公开(公告)号:US06775418B1

    公开(公告)日:2004-08-10

    申请号:US09701094

    申请日:2001-02-12

    IPC分类号: G06K942

    摘要: An image processing device detects the correlation between a pixel to be removed in thinning pixel blocks generated by using a delay in horizontal and vertical directions and an adjacent pixel. The device then determines a coefficient corresponding to the correlation. From the pixel to be removed and the adjacent pixel, pixel data is generated by using a predetermined calculation equation. Thinning and reduction of each pixel block in the horizontal and vertical directions thus occurs.

    摘要翻译: 图像处理装置通过使用在水平和垂直方向上的延迟和相邻像素产生的细化像素块中检测要去除的像素之间的相关性。 然后,设备确定对应于相关性的系数。 从要去除的像素和相邻像素,通过使用预定的计算方程来生成像素数据。 因此,发生水平和垂直方向上的每个像素块的变薄和缩小。

    Coverage-area gain compensation for high resolution printing
    7.
    发明授权
    Coverage-area gain compensation for high resolution printing 有权
    高分辨率打印的覆盖区域增益补偿

    公开(公告)号:US06671070B1

    公开(公告)日:2003-12-30

    申请号:US09412874

    申请日:1999-10-05

    IPC分类号: G06K942

    CPC分类号: H04N1/58

    摘要: A method of and system for compensating artwork for coverage gain that occurs during reproducing of the artwork on a reproduction system. The artwork includes one or more graphic elements. The method includes characterizing the reproduction system, selecting one or more graphic elements of the artwork, and automatically modifying the artwork by causing a spread or choke to the selected graphic elements of the artwork by an amount determined according to the results of the characterization step. Reproducing the modified artwork on the reproduction system reduces the coverage gain effects.

    摘要翻译: 一种用于补偿艺术品在再现系统中的艺术作品期间发生的覆盖增益的方法和系统。 艺术品包括一个或多个图形元素。 该方法包括表征再现系统,选择艺术作品中的一个或多个图形元素,以及通过使艺术作品的所选图形元素的扩展或扼制通过根据表征步骤的结果确定的量来自动修改艺术作品。 在再现系统上再现修改后的图稿会降低覆盖增益的影响。

    Pattern inspection equipment, pattern inspection method, and storage medium storing pattern inspection program
    8.
    发明授权
    Pattern inspection equipment, pattern inspection method, and storage medium storing pattern inspection program 失效
    图案检验设备,图案检验方法和存储介质存储图案检验程序

    公开(公告)号:US06400838B2

    公开(公告)日:2002-06-04

    申请号:US09122779

    申请日:1998-07-27

    IPC分类号: G06K942

    摘要: Pattern inspection equipment has at least a measured data generation unit for generating measured data from patterns that have been delineated on a sample according to design data, a reference data generation unit for generating reference data used to inspect the patterns from gradational data expressed in multiple gradation levels, and a fault decision circuit for comparing the measured data with the reference data. The reference data generation unit has a multi-valued pattern development circuit for developing the design data into the gradational data and a fine adjustment circuit for finely shifting the positions or adjusting the curvatures of pattern edges in the pattern constructed with the gradational data. The fine adjustment of the pattern edges is necessary to cope with slightly displaced edges and rounded corners of the actual patterns on the sample. These slightly displaced edges and rounded corners are caused through mask manufacturing processes and are frequently smaller than the size of a sensor pixel. To adjust the reference data to the displaced edges, a size modification circuit detects a maximum value in a specified area in the gradational data and modifies the size of the pattern constructed with the gradational data. To adjust the reference data to match with the actual rounded corners, a corner rounding circuit rounds corners in the pattern constructed with the gradational data. Also provided is a pattern inspection method for developing the design data into the gradational data, adjusting the gradational data to displaced edges and rounded corners of the actual patterns and preparing the reference data, and testing the patterns for faults. Further provided is a storage medium for storing a pattern inspection program for realizing the pattern inspection method.

    摘要翻译: 模式检查设备至少具有测量数据生成单元,用于根据设计数据从已经在样本上划定的模式生成测量数据;参考数据生成单元,用于生成用于根据以多个等级表示的分级数据检查模式的参考数据 电平,以及用于将测量数据与参考数据进行比较的故障判定电路。 参考数据生成单元具有用于将设计数据发展成渐变数据的多值图案开发电路和用于精细移位位置或调整由渐变数据构成的图案中的图案边缘的曲率的微调电路。 图案边缘的精细调整是必要的,以应对样品上实际图案的稍微偏移的边缘和圆角。 这些略微偏移的边缘和圆角是通过掩模制造工艺引起的,并且通常小于传感器像素的尺寸。 为了将参考数据调整到移位边缘,尺寸修改电路检测渐变数据中指定区域中的最大值,并修改由渐变数据构成的图案的大小。 为了调整参考数据以与实际的圆角匹配,一个圆角圆形回转线使用渐变数据构造的图案中的角落圆。 还提供了一种用于将设计数据开发到等级数据的模式检查方法,将等级数据调整到实际模式的偏移边缘和圆角,并准备参考数据,并测试故障模式。 还提供了一种用于存储用于实现图案检查方法的图案检查程序的存储介质。

    Method and apparatus to transform a region within a digital image using a deformable window
    9.
    发明授权
    Method and apparatus to transform a region within a digital image using a deformable window 有权
    使用可变形窗口来变换数字图像内的区域的方法和装置

    公开(公告)号:US06327393B1

    公开(公告)日:2001-12-04

    申请号:US09135112

    申请日:1998-08-17

    申请人: Niclas Bruder

    发明人: Niclas Bruder

    IPC分类号: G06K942

    摘要: A method and apparatus is provided for intuitively, graphically parameterizing a region of an input image to be processed by a machine-vision vision system, the region being defined by a deformable window, where the window is deformed by a user using a pointing device. The window pictorially indicates the defined region to the user. The region identified and parameterized is transformed into a destination region. A preferred embodiment is a parameterization of a polar region and the subsequent transformation of the polar region into an OCR rectangular window that is then available for further processing, such as by an OCR software application.

    摘要翻译: 提供了一种方法和装置,用于直观地,图形地参数化要由机器视觉视觉系统处理的输入图像的区域,所述区域由可变形窗口定义,其中窗口由用户使用指示设备变形。 该窗口图形地表示用户定义的区域。 识别和参数化的区域被转换为目的地区域。 优选实施例是极坐标区域的参数化以及随后将极区域变换成OCR矩形窗口,其可用于进一步处理,例如通过OCR软件应用程序。

    Systems and methods for image conversion useful in the transformation of photographic pictures into templates for painting
    10.
    发明授权
    Systems and methods for image conversion useful in the transformation of photographic pictures into templates for painting 失效
    用于图像转换的系统和方法在将照相图像转换为绘画模板方面有用

    公开(公告)号:US06252996B1

    公开(公告)日:2001-06-26

    申请号:US09203004

    申请日:1998-12-01

    IPC分类号: G06K942

    CPC分类号: H04N1/40068

    摘要: Methods and computer executable instructions are provided for converting original images such as photographic pictures into various other formats such as drawings by reducing the amount of data contained in the original images. It is a feature of this invention that a photographic picture can be converted into a drawing useful as a template to enable a person to paint the template into a likeness of the photographic picture. In a preferred embodiment, an original image is supplied to a computing environment where it is quantized into pixels of information. Each scalar value of each pixel is evaluated and aberrant pixels are absorbed into adjacent pixels by converting various scalar values. Thereafter, pixels having similar scalar values are grouped into regions. The boundaries between the regions are absorbed into each of the surrounding regions to provide a smoothed boundary. The regions then provide a template conducive to painting.

    摘要翻译: 提供了方法和计算机可执行指令,用于通过减少包含在原始图像中的数据量将原始图像(诸如摄影图像)转换成各种其它格式,例如图形。 本发明的特征在于,将摄影图像转换为可用作模板的图形,以使人能够将模板绘制成照片图像的相似性。 在优选实施例中,将原始图像提供给计算环境,其中其被量化为信息的像素。 评估每个像素的每个标量值,并通过转换各种标量值将异常像素吸收到相邻像素中。 此后,具有相似标量值的像素被分组成区域。 区域之间的边界被吸收到每个周围区域中以提供平滑的边界。 然后,各地区提供有利于绘画的模板。