公开(公告)号：US20030201719A1

公开(公告)日：2003-10-30

申请号：US10420747

申请日：2003-04-23

Applicant: Ushiodenki Kabushiki Kaisha

Inventor： Mitsuru Ikeuchi ,  Katsumi Shojo ,  Yoichi Kono

IPC: H01J017/04 ,  H01J061/04

CPC classification number: H01J61/0735 ,  H01J61/0732 ,  H01J61/526 ,  H01J61/86

Abstract: A discharge lamp with a high output power in which an increase of the current to be supplied to the discharge lamp can be enabled without the need to enlarge the discharge lamp and the surrounding system. The discharge lamp includes an arc tube having a pair of opposed electrodes, at least one of the electrodes having an electrode body in which a hermetically sealed interior space is formed, and a heat conductor partially filling the hermetically sealed interior space. This heat conductor consists of metal that has a higher thermal conductivity or a lower melting point than the metal comprising the electrode body.

Abstract translation: 具有高输出功率的放电灯，其中可以实现提供给放电灯的电流的增加，而不需要放大放电灯和周围系统。 放电灯包括具有一对相对电极的电弧管，至少一个电极具有形成密封的内部空间的电极体和部分地填充密封的内部空间的导热体。 该导热体由具有比包含电极体的金属更高的导热性或较低熔点的金属组成。

公开(公告)号：US20030076040A1

公开(公告)日：2003-04-24

申请号：US10273292

申请日：2002-10-18

Applicant: Ushiodenki Kabushiki Kaisha

Inventor： Toyohiko Kumada ,  Yoshitaka Kanzaki ,  Masanobu Komiya

IPC: H01J017/04 ,  H01J061/04

CPC classification number: H01J61/86 ,  H01J61/0732 ,  H01J61/368

Abstract: An arrangement with relatively high pressure tightness in a super-high pressure mercury lamp of the short arc type which is operated with an extremely high mercury vapor pressure is achieved by the super-high pressure mercury lamp having the following characteristic: an arc tube portion in which there is a pair of opposed electrodes, and which is filled with greater than or equal to 0.15 mg/mm3 of mercury; and side tube portions which extend from opposite sides of the arc tube portion, in which the electrodes are partially hermetically enclosed, and in which the electrodes and metal foils are welded to one another, and the width of the metal foils in the weld areas is so small that it is less than or equal to the diameter of these electrodes.

Abstract translation: 通过具有以下特征的超高压汞灯，实现了以极高的汞蒸汽压力操作的短弧型超高压汞灯具有相对较高的压力紧密度的装置： 其中存在一对相对的电极，并且填充有大于或等于0.15mg / mm 3的汞; 以及侧管部分，其从电弧管部分的相对侧延伸，其中电极部分地被气密地封闭，并且其中电极和金属箔彼此焊接，并且焊接区域中的金属箔的宽度为 如此小，以至于它们小于或等于这些电极的直径。

公开(公告)号：US20010038265A1

公开(公告)日：2001-11-08

申请号：US09805201

申请日：2001-03-14

Inventor： Kazuhisa Nishida

IPC: H01J017/04 ,  H01J061/04

CPC classification number: H01J61/16 ,  H01J61/0735 ,  H01J61/125 ,  H01J61/20 ,  H01J61/30 ,  H01J61/32 ,  H01J61/86

Abstract: A high pressure discharge lamp includes: a quartz glass bulb having an expanded portion and sealing portions, conductive elements, and a pair of electrodes. The conductive elements are sealed at the sealing portions of the quartz glass bulb. Each electrode is disposed so as to be opposite the other and connected to one of the conductive elements. The lamp is characterized in that Dp (the distance between an end of each electrode) is in the range between 1.0 and 1.6 mm, S (the longest length of the expanded portion in the direction of a discharge path)nullenullDi (wherein 0.8nulle

Abstract translation: 高压放电灯包括：具有膨胀部分和密封部分，导电元件和一对电极的石英玻璃灯泡。 导电元件密封在石英玻璃灯泡的密封部分。 每个电极被设置成与另一个相对并且连接到导电元件之一。 该灯的特征在于，Dp（每个电极的端部之间的距离）在1.0和1.6mm之间的范围内，S（在放电路径的方向上的扩展部分的最长长度）= exDi（其中0.8 < = e <1.0），Di（横向于放电路径的扩展部分的最大内径）= gxDp（其中4 <= g <= 8）和Do（横向于放电的扩展部分的最大外径 路径）> = Di + 4。

公开(公告)号：US20010008365A1

公开(公告)日：2001-07-19

申请号：US09759675

申请日：2001-01-12

Applicant: Toshiba Lighting and Technology Corporation

Inventor： Hisashi Honda ,  Seiji Ashida ,  Kiyoshi Saita ,  Ariyoshi Ishizaki ,  Akira Itoh ,  Shigehisa Kawatsuru ,  Tatsuo Otabe

IPC: H01J017/04 ,  H01J061/04 ,  H01J017/20

CPC classification number: H01J61/073

Abstract: A high-pressure discharge lamp which includes a light-transmitting air-tight discharge container, an electrode formed of tungsten as a main component and fixedly sealed in the discharge container, and a discharge medium containing a halide of a light emitting metal and sealed in the discharge container. The surface of the electrode is defined as follows. That is, the average value of center line average roughness Ra of the surface, is set to 0.3 nullm or less, or the average value of the center line average roughness Rz of the surface of the electrode, is set to 1.0 nullm or less, or the average value of the surface area increasing rate of the surface of the electrode is set to 1.0% or less.

Abstract translation: 一种高压放电灯，包括透光气密放电容器，以钨为主要成分并固定地密封在放电容器中的电极以及包含发光金属的卤化物并被密封在其中的放电介质 排放容器。 电极的表面定义如下。 也就是说，将表面的中心线平均粗糙度Ra的平均值设定为0.3μm以下，或将电极表面的中心线平均粗糙度Rz的平均值设定为1.0μm以下， 或将电极表面的表面积增加率的平均值设定为1.0％以下。

公开(公告)号：US20040263079A1

公开(公告)日：2004-12-30

申请号：US10854887

申请日：2004-05-27

Inventor： Akiko Nakanishi ,  Kohhei Iwase ,  Kenji Nakano ,  Kenji Itaya ,  Seidou Tani ,  Noriyuki Uchida

IPC: H01J061/04

CPC classification number: H01J61/0672 ,  H01J61/327

Abstract: An arc tube includes an arc tube body and a pair of electrodes. The arc tube body is formed from a glass tube which is double-spirally wound from a middle portion to both ends around a spiral axis. The pair of electrodes are sealed at both ends of the arc tube body. Mercury is enclosed in the arc tube substantially in a single form. Each of the electrodes includes a multiple-coiled filament which is wound substantially one turn in a last coiling stage.

Abstract translation: 电弧管包括电弧管体和一对电极。 电弧管体由玻璃管形成，该玻璃管从螺旋轴线的中部至两端双螺旋缠绕。 一对电极在电弧管体的两端被密封。 汞基本上以单一形式封装在电弧管中。 每个电极包括在最后的卷取阶段基本上卷绕一圈的多卷绕丝。

公开(公告)号：US20040124373A1

公开(公告)日：2004-07-01

申请号：US10335094

申请日：2002-12-31

Inventor： Bryan J. Rice ,  K. V. Ravi

IPC: H01J061/04

CPC classification number: B82Y10/00 ,  G03F7/70033 ,  H05G2/003

Abstract: A diamond insulator collar and methods for fabricating a diamond insulator collar for electrical discharge gas plasma EUV source. The insulating collar is positioned at the base of the central electrode in the pre-ionization region of the plasma head. The insulating collar prevents electrical shorting between the outer electrode and the central electrode in this region. In one embodiment of a method for providing a wire mesh-reinforced diamond insulator collar, a mandrel is provided that replicates the shape of the base of the central electrode. A wire mesh is wrapped around the mandrel conforming to the shape of the mandrel. The wire mesh is coated with electrically insulating diamond using known plasma enhanced chemical vapor deposition (CVD) techniques to form a non-porous coating. The mandrel is removed from the diamond-coated wire mesh providing a porous-free wire-reinforced diamond insulator collar. Embodiments of non-wire reinforced collars are presented.

Abstract translation: 一种金刚石绝缘体环和用于制造用于放电气体等离子体EUV源的金刚石绝缘体环的方法。 绝缘套环位于等离子体头的电离前区域内的中心电极的底部。 该绝缘套环防止了该区域中的外电极和中心电极之间的电短路。 在提供丝网加强金刚石绝缘体套环的方法的一个实施例中，提供了复制中心电极的基部的形状的心轴。 围绕心轴的丝网缠绕在心轴的形状上。 使用已知的等离子体增强化学气相沉积（CVD）技术将金属丝网涂覆有电绝缘金刚石以形成无孔涂层。 从金刚石涂层的金属丝网中取出心轴，提供无孔多孔的金刚石绝缘子环。 提出了非线加强套圈的实施例。

公开(公告)号：US20030001502A1

公开(公告)日：2003-01-02

申请号：US10140501

申请日：2002-05-07

Inventor： Willem Van Erk ,  Arnoldus Henricus Franciscus Maria Toonders

IPC: H01J017/04 ,  H01J061/04 ,  H01J017/16

CPC classification number: H01J61/125 ,  H01J61/366 ,  H01J61/827 ,  H01J61/86

Abstract: The high-pressure discharge lamp (1) comprises a lamp vessel (2) having a wall (3) which is exposed to a wall load of at least 30 W/cm2 during operation of the lamp, and a discharge space (4) in which a electrodes (5a, 5b) are disposed. The discharge space (4) has a filling that comprises mercury, argon, and halides (not fluoride) of tin and indium, to which filling an alkali halide is added, the alkali being potassium, rubidium, or cesium, and the halide being chlorine, bromine, or iodine. The high-pressure discharge lamp (1) according to the invention has an improved resistance to corrosion and to crystallization of the quartz glass wall (3) because of shielding or spacer means (8) by which a direct contact between electrode rods (30) and the wall (3) of the lamp vessel (2) is counteracted.

Abstract translation: 高压放电灯（1）包括具有壁（3）的灯容器（2），其在灯的操作期间暴露于至少30W / cm 2的壁载荷，并且放电空间（4）在 其中设置有电极（5a，5b）。 放电空间（4）具有包含锡和铟的汞，氩和卤化物（不是氟化物）的填充物，其中加入碱金属卤化物，碱为钾，铷或铯，卤化物为氯 ，溴或碘。 根据本发明的高压放电灯（1）由于屏蔽或隔离装置（8）具有改善的耐腐蚀性和石英玻璃壁（3）的结晶，通过该屏蔽或间隔装置，电极棒（30）之间的直接接触， 并且灯室（2）的壁（3）被抵消。

公开(公告)号：US20010024090A1

公开(公告)日：2001-09-27

申请号：US09811640

申请日：2001-03-19

Applicant: U.S. PHILIPS CORPORATION.

Inventor： Albrecht Kraus ,  Bernd Rausenberger ,  Wilhelm Albert Groen ,  Horst Dannert

IPC: H01J061/04 ,  H01J017/04 ,  H01J061/20

CPC classification number: H01J65/046

Abstract: The invention relates to a low-pressure gas discharge lamp which includes at least one discharge vessel and at least two capacitive coupling-in structures and operates at an operating frequency f. In order to achieve a better efficiency in combination with a small structural volume, a high luminous flux, a low operating voltage, a low electromagnetic emission, a high resistance against switching transients and a long service life for the low-pressure gas discharge lamp, it is proposed to form each capacitive coupling-in structure from at least one dielectric having a thickness d and a dielectric constant null, each dielectric being subject to the condition d/(f.null)

Abstract translation: 本发明涉及一种低压气体放电灯，其包括至少一个放电容器和至少两个电容耦合结构，并以工作频率f工作。 为了在小的结构体积，高光通量，低工作电压，低电磁发射，高开关瞬态电阻和低压气体放电灯的长使用寿命方面实现更好的效率， 建议从具有厚度d和介电常数εi的至少一个电介质形成每个电容耦合入结构，每个电介质的条件d /（f.epsi）<10-8cm。 因此，每个灯长度（内腔/ cm）可以产生大得多的光。

公开(公告)号：US20020113553A1

公开(公告)日：2002-08-22

申请号：US09753242

申请日：2000-12-29

Applicant: The Board of Trustees of the University

Inventor： Bruce A. Vojak ,  J. Gary Eden ,  Sung-Jin Park ,  Clark Wagner

IPC: H01J061/04

CPC classification number: H01J17/04 ,  H01J17/06

Abstract: A discharge device of the invention includes multiple bonded ceramic layers with electrodes formed between the layers. It can be combined with the various MCIC technologies to produce myriad useful devices. Contacts are made to the electrodes, which may be grouped in different arrangements. The electrodes contact a hole through some or all of the ceramic layers to define a discharge cavity. Different groupings of the electrodes will produce different types of discharge. Alternating the electrodes in interdigitated pairs permits an arbitrary extension of the discharge cavity length. Having consecutive anodes or cathodes permits formation of regions where electrons may cool. Another device of the invention includes a multilayer ceramic structure having a hole formed in a least one outer layer through an electrode on the outer side of the layer and in contact with an electrode between two layers. A contact is formed to the electrode between layers through any remaining layers in the multilayer ceramic structure.

Abstract translation: 本发明的放电装置包括在层之间形成电极的多个键合陶瓷层。 它可以与各种MCIC技术相结合，产生无数有用的设备。 触点被制成电极，其可以以不同的布置分组。 电极通过一些或所有陶瓷层接触孔以限定放电腔。 电极的不同组合将产生不同类型的放电。 交错对置的电极允许放电腔长度的任意延长。 具有连续的阳极或阴极允许形成电子可以冷却的区域。 本发明的另一个装置包括多层陶瓷结构，其具有通过在该层的外侧上的电极和与两层之间的电极接触的在至少一个外层中形成的孔。 通过多层陶瓷结构中的任何剩余的层，在层之间的电极上形成接触。

公开(公告)号：US20020033672A1

公开(公告)日：2002-03-21

申请号：US09854381

申请日：2001-05-11

Inventor： Theodorus Peterus Cornelis Maria Vos ,  Catharina Johanna Maria Daemen ,  Francis Jozef Clementina Vandyck ,  Hendrik Anton Van Esveld ,  Johannes Jacobus Franciscus Geijtenbeek

IPC: H01J017/04 ,  H01J061/04

CPC classification number: H01J61/073 ,  H01J61/0732 ,  H01J61/0737 ,  H01J61/09

Abstract: The electric high-pressure discharge lamp has tungsten electrodes (2) in a light-transmitting lamp vessel (1) which is closed in a gastight manner. The electrodes (2) comprise an emitter, preferably in the form of an inner coiled-coil (14), which is loosely retained in a cavity (12) of a basket (6) of the electrode (2). The inner coil (14) acts as a non-oxidic emitter. The lamp retains its initial light output to a high degree throughout its life.

Abstract translation: 电高压放电灯在透气灯容器（1）中具有以气密方式封闭的钨电极（2）。 电极（2）包括优选为内部盘绕线圈（14）形式的发射器，其松动地保持在电极（2）的筐（6）的空腔（12）中。 内部线圈（14）用作非氧化性发射器。 该灯在其整个使用寿命期间保持其初始光输出高度。