Abstract:
An electron gun with a simple structure, wherein electrodes are extracted along the axis of the gun. The electron gun comprises first stepped metal cylinder 201 which is joined with cathode 200, second metal cylinder 202 which is joined with first stepped metal cylinder 201, metal plate 221 which is joined with second metal cylinder 202, insulating cylinder 220 which is joined with metal plate 221, third metal cylinder 260 which is joined with the outer surface of insulating cylinder 220, fourth metal cylinder 210 which is joined with third metal cylinder 260, stepped insulating cylinder 250 which is joined with fourth stepped metal cylinder 210, fifth metal cylinder 270 which is joined with stepped insulating cylinder 250. Fifth metal cylinder 270 is grounded. Cathode lead wire and heater lead wire are extracted from insulating cylinder 220, while anode lead wire is connected with metal cylinder 260.
Abstract:
An electron-emitting element is provided which lessens the necessary voltage to be applied to a grid electrode and accurately and precisely controls electron emission from a cathode electrode. This is achieved by a field emission type electron-emitting element wherein an electric field existing between the grid electrode (3) and an anode electrode emanates from an electron passage opening in the grid electrode (3) to the cathode electrode (2) side and interacts with an electric field existing between the cathode electrode (2) and the grid electrode (3) such that a combined electric field is formed, and an electron-emission controlling element is provided which varies the intensity of the combined electric field by varying the potential of at least one of the cathode electrode (2), the anode electrode, and the grid electrode (3).
Abstract:
A gyrotron gun that generates gyrating electron beams in a controllable manner suitable for use in a wide range of gyro-amplifiers and gyro-oscillators is disclosed. The gyrotron comprises first and second means for abruptly changing a magnetic field and which means are positioned between first, second and third field coils. The field coils are operated so as to provide for a desired magnetic field profile that allows for the control of the parameters desired to provide for small-orbit, large-orbit, and linear modes of operation of the gyrotron gun. The gyrotron gun further comprises of a pair of bucking coils arranging near the cathode to independently control the axial velocity spread of the gyrating electron beam.
Abstract:
A thermoregulation system for an ion implantation system to reduce the temperature in the ion implanter and components therein, or attached thereto, to a temperature at which an ion source material, used in the ion implanter, has a vapor pressure that yields a reduced concentration of vapors. Such arrangement markedly reduces the risk of exposure to harmful vapors from the ion source material.
Abstract:
A microtip electron source including at least one electron emission zone composed of a plurality of microtips connected electrically to a cathode conductor. At least one gate electrode is positioned opposite the electron emission zone and pierced with apertures located opposite the microtips, to extract the electrons from the microtips. An emitted electron focusing gate is positioned opposite the gate electrode, and includes an aperture unit including at least one slit located opposite at least two successive microtips. A flat display screen can include such a microtip electron source. Further, a manufacturing process of such an electron source is disclosed.