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    Extreme UV radiation source device
    2.
    发明授权
    Extreme UV radiation source device 有权
    极紫外线辐射源装置

    公开(公告)号：US07622727B2

    公开(公告)日：2009-11-24

    申请号：US11617163

    申请日：2006-12-28

    申请人： Takahiro Shirai ,  Kyohei Seki

    发明人： Takahiro Shirai ,  Kyohei Seki

    IPC分类号： H01J7/36 ,  H05H1/00

    CPC分类号： G03F7/70033 ,  B82Y10/00 ,  G21K2201/065 ,  H05G2/003 ,  H05G2/005

    摘要： An EUV radiation source device with a chamber that is divided into a discharge space and a collector mirror space provided with EUV collector optics. Between them, an aperture component with an opening which is cooled is provided. First and second discharge electrodes are rotated. Sn or Li is irradiated with a laser. Pulsed power is applied between the first and second discharge electrodes to form a high density and high temperature plasma between the two electrodes so that EUV radiation with a wavelength of 13.5 nm is emitted, is focused by the EUV collector optics and is guided into the irradiation optical system of an exposure tool. There are a first pumping device and a second pumping device for pumping the discharge space and the collector mirror space. The discharge space is kept at a few Pa, and the collector mirror space is kept at a few 100 Pa.

    摘要翻译： 具有腔室的EUV辐射源装置，其被分成放电空间和设置有EUV收集器光学器件的收集器反射镜空间。 在它们之间提供了具有被冷却的开口的孔部件。 旋转第一放电电极和第二放电电极。 用激光照射Sn或Li。 在第一和第二放电电极之间施加脉冲功率以在两个电极之间形成高密度和高温等离子体，从而发射波长为13.5nm的EUV辐射，由EUV收集器光学器件聚焦并被引导到辐照 曝光工具的光学系统。 存在用于泵送放电空间和收集器反射镜空间的第一泵送装置和第二泵送装置。 放电空间保持在几Pa，收集器反射镜空间保持在几百Pa。

    Glowbottle starting device for gaseous discharge devices
    3.
    发明授权
    Glowbottle starting device for gaseous discharge devices 失效
    用于气体放电装置的Glowbottle起动装置

    公开(公告)号：US5512799A

    公开(公告)日：1996-04-30

    申请号：US328442

    申请日：1994-10-25

    申请人： John F. Waymouth

    发明人： John F. Waymouth

    IPC分类号： H01J61/54 ,  H01J7/36 ,  H01J7/30

    CPC分类号： H01J61/541

    摘要： A glowbottle starter switch for igniting gaseous discharge lamps in alternating current circuits. The glowbottle including a hermetically sealed glass envelope (7) containing a fill of an ionizable gas and having at least two lead wires (2,3) disposed therein and extending to the exterior of the envelope (7) and a bimetal switch (4) disposed on at least one of the lead wires (3). The switch (4) is arranged to move within a gap to contact the other of the lead wires (2). An electroluminescent light emitter including an electroluminescent phosphor (6 in FIG. 1) is disposed in optically-contiguous relationship with the glowbottle. The electroluminescent light emitter is arranged to be energized to emit light by electric fields produced by alternating voltage between the lead wires (2,3). Light emission causes a photoelectric emission of electrons from interior surfaces within the glowbottle envelope (7) to serve as initial electrons for electron avalanches promoting the ionization and breakdown of the gasses within the gap between electrodes (4, 2) of the glowbottle.

    摘要翻译： 用于在交流电路中点燃气体放电灯的电热起动器开关。 该发光体包括一个包含可电离气体填充物的气密密封玻璃外壳（7），并且具有设置在其中并延伸到外壳（7）外部的至少两根引线（2,3）和双金属开关（4） 设置在所述引线（3）中的至少一个上。 开关（4）布置成在间隙内移动以接触另一个引线（2）。 包括电致发光荧光体（图1中的6）的电致发光发光器被设置为与辉光灯的光学连续关系。 电致发光发光器被布置成通过在引线（2,3）之间的交流电压产生的电场而被激发以发光。 发光引起电子从电子热辐射包络（7）内部的表面的光电发射，用作电子雪崩的初始电子，促进电热器的电极（4,2）之间的气隙的电离和击穿。

    Short-arc electric discharge lamp having an arc-ignitor assembly that is movably mounted within an integral part of the lamp envelope
    4.
    发明授权
    Short-arc electric discharge lamp having an arc-ignitor assembly that is movably mounted within an integral part of the lamp envelope 失效
    具有在灯泡整体部分内的易于安装的弧形点火器组件的短路电动放电灯

    公开(公告)号：US3588572A

    公开(公告)日：1971-06-28

    申请号：US3588572D

    申请日：1968-10-17

    申请人： WESTINGHOUSE ELECTRIC CORP

    发明人： BEESE NORMAN C

    IPC分类号： H01J61/98 ,  H01J7/36 ,  H01J61/54

    CPC分类号： H01J61/98

    摘要： A SHORT-ARC DISCHARGE LAMP IS STARTED ON ITS OPERATING VOLTAGE SUPPLY BY AN ARC-IGNITOR ASSEMBLY THAT IS MOVABLY MOUNTED WITHIN A SEALED LATERALLY-EXTENDING HOLLOW ARM PROVIDED ON THE ENVELOPE AND, WHEN ACTUATED, BRIDGES THE DISCHARGE GAP BETWEEN THE ELECTRODES AND IS THEN WITHDRAWN FROM SUCH POSITION. IN ONE EMBODIMENT THE IGNITOR ASSEMBLY COMPRISES A MECHANICALLY ACTUATED LEVER THAT IS PIVOTALLY MOUNTED IN THE ENVELOPE ARM AND IS MOVABLY SEALED THERETO BY A SYLPHON BELLOWS. IN ANOTHER EMBODIMENT THE IGNITOR ASSEMBLY IS RECIPROCALLY MOVABLE WITHIN THE SEALED ENVELOPE ARM AND INCLUDES AN IRON ARMATURE THAT IS MAGNETICALY ACTUATED BY AN EXTERIOR ELECTROMAGNET MOUNTED ON THE ARM.

    Method and apparatus for starting a long arc between hollow electrodes
    5.
    发明授权
    Method and apparatus for starting a long arc between hollow electrodes 失效
    用于启动中空电极之间的长弧的方法和装置

    公开(公告)号：US3611014A

    公开(公告)日：1971-10-05

    申请号：US3611014D

    申请日：1970-05-04

    申请人： UNION CARBIDE CORP

    发明人： TROUE HARDEN HENRY ,  DAY LEDFORD H JR

    IPC分类号： H01J17/30 ,  H05H1/48 ,  H01J7/24 ,  H01J7/36

    CPC分类号： H05H1/48 ,  H01J17/30

    摘要： An arc is initiated between a pair of hollow electrodes spaced a relatively substantial distance apart and contained at opposite ends in a quartz tube by passing a rod through the bore of one electrode and into the bore of the other electrode, establishing a swirling gas vortex about the rod sufficient to cause the rod to make continuous internal rotational contact with the bore of each electrode, and impressing thereafter a relatively low voltage across the electrodes while withdrawing the rod. The rod is connected to a piston assembly externally connected at one end of the torch.