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公开(公告)号：US11892422B2
公开(公告)日：2024-02-06
申请号：US17265495
申请日：2019-08-09
CPC分类号： G01N27/16 , G01N15/0606 , G01N15/0656 , G01N2015/0046
摘要： A particulate-matter detecting sensor including an insulating substrate which has a detecting face, detecting conductors formed in the insulating substrate, and a heating section formed on the insulating substrate. Each detecting conductor includes a detecting electrode part, a terminal part, and a connecting part. A portion of the detecting conductor is constituted of a noble metal conductor mainly formed of at least one noble metal selected from Pt, Au, Pd, Rh and Ir. At least a portion of the connecting part is formed of a low expansion conductor mainly formed of a low expansion coefficient metal having linear expansion coefficient lower than that of the noble metal. Both conductors are joined at an overlapping part at which the noble metal conductor and the low expansion conductor are partly overlapped with each other on an insulating layer forming the insulating substrate in a normal line direction of the insulating layer.
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2.发明授权公开(公告)号：US11703473B2
公开(公告)日：2023-07-18
申请号：US16711413
申请日：2019-12-11
申请人： MSA TECHNOLOGY, LLC
摘要： A method of operating a sensing element including a heating element in operative connection with electronic circuitry, wherein the sensing element forms a resistive element in a circuit of the electronic circuitry, includes, in at least a first phase, activating the electronic circuitry to heat the sensing element to a temperature at which the sensing element is responsive to an analyte gas via energy input to the heating element in a pulsed manner. A constant resistance setpoint is set for the sensing element and energy through the circuit is variably controlled via the pulsed energy input toward achieving the constant resistance setpoint. The method further includes measuring a response of the sensing element over time to the pulsed energy input.
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公开(公告)号：US11635401B2
公开(公告)日：2023-04-25
申请号：US17075830
申请日：2020-10-21
申请人： TDK Corporation
发明人： Matthias König
摘要： In an embodiment a sensor device includes a substrate with a first membrane and a first cover layer, the first membrane and the first cover layer being monolithically integrated into the substrate and a first pellistor element including a heater element and a temperature sensor element, the heater element and/or the temperature sensor element being arranged in or on the first membrane, wherein the first cover layer is arranged over or under the first membrane, and wherein the first membrane, the first cover layer and a part of the substrate surround a first cavity.
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公开(公告)号：US20220326169A1
公开(公告)日：2022-10-13
申请号：US17707406
申请日：2022-03-29
发明人： Jürgen OSSWALD , Malte BAESLER
摘要： A gas detection device and a process monitor an area for a combustible target gas. A heating segment of a detector (10) is heated when electrical current flows therethrough. A heating segment of a compensator (1) is heated when electrical current flows therethrough. An electrical voltage is applied to both the detector and the compensator. The heating of the detector (10) causes a combustible target gas to be oxidized in an interior of the gas detection device. A detection variable, which depends on the temperature (Temp_10) of the detector, and a detection variable, which depends on the temperature (Temp_11) of the compensator, are measured. A presence and/or a concentration of a target gas are determined as a function of the detection variables. A quality parameter is measured and increases as the detection variable depending on the detector temperature increases and as the detection variable depending on the compensator temperature decreases.
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公开(公告)号：US11408843B2
公开(公告)日：2022-08-09
申请号：US16479338
申请日：2017-11-09
申请人： TDK Corporation
发明人： Yoshio Kaita
摘要： A gas sensor includes a first sensor part that can detect the concentration of the mixture of a first gas and a second gas, a second sensor part having higher detection sensitivity with respect to the second gas than with respect to the first gas, and a signal processing circuit that subtracts the concentration of the second gas detected by the second sensor part from the mixture concentration detected by the first sensor part to derive the concentration of the first gas. The concentration of the second gas detected by the second sensor part is subtracted from the concentration of the mixture concentration detected by the first sensor part, so that it is possible to cancel the influence of the second gas which is miscellaneous gas to thereby work out a correct value of concentration of the first gas to be detected.
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公开(公告)号：US11226299B2
公开(公告)日：2022-01-18
申请号：US16947276
申请日：2020-07-27
发明人： Benjamin S. Rogers , Christopher J. Dudley , Jesse D. Adams , Ralph G. Whitten , Alexander C. Woods , Vaughn N. Hartung
IPC分类号： G01N25/18 , G01N11/16 , G01N29/32 , G01N27/18 , G01N29/02 , G01N27/12 , G01N29/036 , G01N27/16 , G01N29/12
摘要： A system for determining one or more properties of one or more gases. The system comprises sensors configured to measure thermal conductivity and exothermic responses of a sample at multiple temperatures. Sensor responses to exposure to a gas sample at two or more temperatures are compensated and analyzed by a subsystem. The subsystem is configured to determine a thermal conductivity of the gas sample at each of the two or more temperatures and determine at least one component of the gas sample based at least in part on the thermal conductivity value of the sample at each of the two or more temperatures. Related systems and methods of determining one or more properties of a sample are also disclosed.
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公开(公告)号：US11191128B2
公开(公告)日：2021-11-30
申请号：US16304005
申请日：2017-05-24
申请人： Robert Bosch GmbH
发明人： Radoslav Rusanov , Sabine Nagel
摘要： A method for producing an electromigration-resistant crystalline transition-metal silicide layer of a layer sequence, for example, to provide a micro heater includes, supplying a semiconductor substrate including an electrically insulating layer; physically depositing a transition metal on the electrically insulating layer; carrying out a plasma-enhanced chemical vapor deposition while forming an inert gas plasma; conveying monosilane to the inert gas plasma, with the monosilane decomposing into silicon and hydrogen and the silicon in the gaseous phase entering into a chemical reaction with the transition metal in order to form the electromigration-resistant crystalline transition-metal silicide layer.
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公开(公告)号：US20210255131A1
公开(公告)日：2021-08-19
申请号：US17059087
申请日：2019-11-20
申请人： Carrier Corporation
发明人： Jon K. Evju , Gary Follett , Thi A. Nguyen , David P. Potasek , Roger Alan Backman , Anand Venkatesh Sankarraj , Siqi Wei
摘要： A combustible gas sensor that includes a reference sensor. The reference sensor includes a first substrate having a first substrate first surface, a first insulating layer disposed on the first substrate first surface, and a first heater at least one of embedded within the first insulating layer and disposed on the first insulating layer. The first substrate is a MEMS substrate.
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公开(公告)号：US20210181171A1
公开(公告)日：2021-06-17
申请号：US17188297
申请日：2021-03-01
申请人： MSA TECHNOLOGY, LLC
发明人： Mark Flori Zanella, SR. , Michael Alvin Brown , Meghan E. Swanson , Daniel D. Santoro, JR. , Jeff Audia , Ryan Alan Sherry
摘要： A combustible gas sensor for detecting an analyte gas includes a first element including a first electric heating element, a first support structure on the first electric heating element and a first catalyst supported on the first support structure and electronic circuitry in electrical connection with the first element. The electronic circuitry is configured to provide energy to the first element to heat the first element to at least a first temperature at which the first catalyst catalyzes combustion of the analyte gas and to determine if the analyte gas is present based on a response of the first element to being heated to at least the first temperature. The electronic circuitry is further configured to apply an interrogation pulse to the first element in which energy to the first element is increased or decreased to induce an associated response from the first element.
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公开(公告)号：US20210148845A1
公开(公告)日：2021-05-20
申请号：US17075830
申请日：2020-10-21
申请人： TKD Corporation
发明人： Matthias König
摘要： In an embodiment a sensor device includes a substrate with a first membrane and a first cover layer, the first membrane and the first cover layer being monolithically integrated into the substrate and a first pellistor element including a heater element and a temperature sensor element, the heater element and/or the temperature sensor element being arranged in or on the first membrane, wherein the first cover layer is arranged over or under the first membrane, and wherein the first membrane, the first cover layer and a part of the substrate surround a first cavity.
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