公开(公告)号：US09596743B2

公开(公告)日：2017-03-14

申请号：US15067691

申请日：2016-03-11

Applicant: TRUMPF Lasersystems for Semiconductor Manufacturing GmbH

Inventor： Andreas Enzmann

IPC: H05G2/00 ,  G02B1/11 ,  G02B7/08 ,  G02B13/14 ,  G02B27/10 ,  G02B27/14 ,  H05H7/14 ,  H01S3/23 ,  H01S3/00

CPC classification number: H05G2/008 ,  G02B1/11 ,  G02B7/08 ,  G02B13/146 ,  G02B27/1006 ,  G02B27/142 ,  H01S3/005 ,  H01S3/2391 ,  H05G2/005 ,  H05H7/14

Abstract: A beam guiding apparatus includes a vacuum chamber that includes a target region arranged to receive a target material for generating EUV radiation. The vacuum chamber includes a first and second opening for receiving into the vacuum chamber a first and second laser beam, respectively. The first and second laser beam have different wavelengths. The beam guiding apparatus further includes a superposition apparatus arranged to superpose the first and second laser beams entering into the vacuum chamber through the first and second openings, respectively, for common beam guidance in the direction of the target region. The superposition apparatus comprises a first optical element configured to seal the first opening of the vacuum chamber in a gas-tight manner and transmit the first laser beam, or a second optical element configured to seal off the second opening of the vacuum chamber in a gas-tight manner and transmit the second laser beam.

Abstract translation: 光束引导装置包括真空室，该真空室包括布置成接收用于产生EUV辐射的靶材料的目标区域。 真空室包括分别用于将第一和第二激光束接收到真空室中的第一和第二开口。 第一和第二激光束具有不同的波长。 光束引导装置还包括叠加装置，其被布置为分别通过第一和第二开口叠加进入真空室的第一和第二激光束，以在目标区域的方向上进行共同的光束引导。 叠加装置包括：第一光学元件，其被配置为以气密方式密封真空室的第一开口并透射第一激光束;或第二光学元件，构造成在气体中密封真空室的第二开口 并且传输第二激光束。

公开(公告)号：US20050029970A1

公开(公告)日：2005-02-10

申请号：US10889291

申请日：2004-07-12

Applicant: Ulrich Ratzinger ,  Bernhard Schlitt

Inventor： Ulrich Ratzinger ,  Bernhard Schlitt

IPC: H05H7/14 ,  H05H7/18 ,  H05H7/22 ,  H05H9/00 ,  H01J25/10

CPC classification number: H05H9/00 ,  H05H7/22

Abstract: The invention relates to a drift tube accelerator (1) for the acceleration of ion packets in ion beam acceleration systems, wherein a housing (2) consists of a longitudinally divided three-part vacuum tank (3) having a central unit (4) and a lower half-shell (3) comprising a structured lower steel block (15) and an upper half-shell (6) comprising a structured upper steel block (19). (The cavity arranged between the central unit (4) and the structured steel blocks (15, 19) has at least two acceleration regions (24, 25), between which there is arranged a magnetic focussing device (17), which focuses the ion beam from one region (24) to the next region (25).) The drift tube accelerator (1) according to the invention has such a stable and massive structure that it requires no external supporting aids of any kind in order to obtain alignment, which is reliable and accurate to a few micrometers, of the acceleration components within the drift tube accelerator (1) with respect to the longitudinal axis (7) of ion beam guidance of the central unit (4). The massive structure of the drift tube accelerator (1) according to the invention can be used in general for any linear accelerator.

Abstract translation: 本发明涉及一种用于在离子束加速系统中加速离子包的漂移管加速器（1），其中壳体（2）由具有中心单元（4）的纵向分开的三部分真空罐（3）组成， 包括结构化的下钢块（15）的下半壳（3）和包括结构化的上钢块（19）的上半壳（6）。 （布置在中心单元4和结构化钢块15,19之间的空腔具有至少两个加速区域24,25，它们之间布置有磁性聚焦装置17，其将离子 从一个区域（24）到下一个区域（25）的光束。）根据本发明的漂移管加速器（1）具有这样一种稳定和巨大的结构，其不需要任何外部的辅助辅助来获得对准， 相对于中心单元（4）的离子束引导的纵向轴线（7），漂移管加速器（1）内的加速度分量可靠且精确到几微米。 根据本发明的漂移管加速器（1）的大块结构一般可用于任何线性加速器。

公开(公告)号：US3980446A

公开(公告)日：1976-09-14

申请号：US539102

申请日：1975-01-07

Applicant: Paolo della Porta ,  Tiziano A. Giorgi

Inventor： Paolo della Porta ,  Tiziano A. Giorgi

IPC: H01J5/02 ,  H01J7/18 ,  H05H7/14 ,  B31D3/04

CPC classification number: H05H7/14 ,  H01J7/186 ,  Y10T428/12049 ,  Y10T428/12063 ,  Y10T428/12153 ,  Y10T428/1216 ,  Y10T428/12611

Abstract: A wall structure comprising a first surface defining the commencement of a thickness of a metal or ceramic sheet, and a second surface defining the end of said thickness of said sheet said second surface also defining the commencement of a thickness of a three dimensional network defining a multiplicity of interconnecting free cells and a third surface defining the end of said thickness of said three dimensional network.

Abstract translation: 一种壁结构，其包括限定金属或陶瓷片的厚度的开始的第一表面，以及限定所述片的所述厚度的端部的第二表面，所述第二表面还限定三维网络的厚度的开始， 互连自由电池的多重性和限定所述三维网络的所述厚度的端部的第三表面。

公开(公告)号：US20170265290A1

公开(公告)日：2017-09-14

申请号：US15450666

申请日：2017-03-06

Applicant: ViewRay Technologies, Inc.

Inventor： SHMARYU M. SHVARTSMAN ,  James F. Dempsey

IPC: H05H7/04 ,  H05H7/14 ,  H05H9/00

CPC classification number: H05H7/04 ,  H01J41/12 ,  H05H7/14 ,  H05H9/00

Abstract: A system has a linear accelerator, ion pump and a compensating magnet. The ion pump includes an ion pump magnet position, an ion pump magnet shape, an ion pump magnet orientation, and an ion pump magnet magnetic field profile. The compensating magnet has a position, a shape, an orientation, and a magnetic field profile, where at least one of the position, shape, orientation, and magnetic field profile of the compensating magnet reduce at least one component of a magnetic field in the linear accelerator resulting from the ion pump magnet.

公开(公告)号：US20160353562A1

公开(公告)日：2016-12-01

申请号：US15165750

申请日：2016-05-26

Applicant: Antaya Science & Technology

Inventor： Timothy A. Antaya

IPC: H05H7/14 ,  H01F6/04 ,  A61N5/10 ,  H05H7/04 ,  H05H7/02 ,  H01F6/06 ,  H05H13/00

CPC classification number: A61N5/1043 ,  A61N5/1077 ,  A61N2005/1087 ,  H01F6/06 ,  H05H13/005

Abstract: An isochronous cyclotron includes at least two superconducting coils, a magnetic yoke surrounding the coils and containing at least a portion of a beam chamber, a plurality of superconducting flutter coils on each side of the median acceleration plane, a non-magnetic reinforcement structure filling the valleys between the superconducting flutter coils so as to maintain the positioning of the superconducting flutter coils, internal reinforcement structures mounted inside the superconducting flutter coils, and a cryogenic refrigerator thermally coupled with the superconducting coils and with the magnetic yoke.

Abstract translation: 同步回旋加速器包括至少两个超导线圈，围绕线圈并包含梁室的至少一部分的磁轭，在中间加速平面的每一侧上的多个超导颤振线圈，填充 超导振荡线圈之间的谷，以便保持超导颤振线圈的定位，安装在超导颤振线圈内部的内部加强结构以及与超导线圈和磁轭热耦合的低温冰箱。

公开(公告)号：US20050204754A1

公开(公告)日：2005-09-22

申请号：US11083989

申请日：2005-03-21

Applicant: Jean-Francois Vuillermoz

Inventor： Jean-Francois Vuillermoz

IPC: F04B39/00 ,  F04B37/16 ,  F04D29/60 ,  F04D29/66 ,  F16F3/12 ,  F16F15/04 ,  F16J3/04 ,  F16L27/11 ,  H05H7/14 ,  B01D8/00

CPC classification number: F16F3/12 ,  F04D19/04 ,  F04D29/601 ,  F04D29/668 ,  F16F15/04 ,  F16F2230/0052

Abstract: The invention concerns a damping adapter (3) insertable in a suction duct between a service chamber (2) and a vacuum pump (1). The adapter (3) consists of a tubular duct wall (6) in the form of a flexible bellows surrounded by a damping sleeve (7) supported on two end flanges (4, 5). The flexible bellows' plys (6a, 6b) receive a passive damping elastomer (8a) on their outer faces, engaged between the successive plys (6a, 6b). This considerably reduces the transmitting of vibrations from the vacuum pump (1) to the service chamber (2), enabling applications in the microscopy field in particular.

Abstract translation: 本发明涉及可插入在工作室（2）和真空泵（1）之间的吸入管道中的阻尼适配器（3）。 适配器（3）由柔性波纹管形式的管状管道壁（6）组成，该管状管道壁被支撑在两个端部凸缘（4,5）上的阻尼套筒（7）围绕。 柔性波纹管层（6a，6b）在它们的外表面上接纳被接合在连续层（6a，6b）之间的被动阻尼弹性体（8a）。 这大大减少了从真空泵（1）到工作室（2）的振动传输，从而使显微镜领域尤其适用。

公开(公告)号：US5036290A

公开(公告)日：1991-07-30

申请号：US490450

申请日：1990-03-08

Applicant: Tadasi Sonobe ,  Mamoru Katane ,  Takashi Ikeguchi ,  Manabu Matsumoto ,  Shinjiro Ueda ,  Toshiaki Kobari ,  Takao Takahashi ,  Toa Hayasaka ,  Toyoki Kitayama

Inventor： Tadasi Sonobe ,  Mamoru Katane ,  Takashi Ikeguchi ,  Manabu Matsumoto ,  Shinjiro Ueda ,  Toshiaki Kobari ,  Takao Takahashi ,  Toa Hayasaka ,  Toyoki Kitayama

IPC: H05H7/14 ,  H01J41/12 ,  H05H7/04 ,  H05H13/04

CPC classification number: H05H7/04 ,  H01J41/12

Abstract: Synchrotron radiation is generated when a base of charged particles is bent by a bending magnet. The synchrotron radiation passes down a lead-out duct as the total number of pumps is limited by the size of the apparatus and many pumps are needed in order to achieve a good vacuum. An ion pump has a main magnetic field, normally generated by a magnet of the ion pump which controls the behavior of the electrons in the ion pump. However, the leakage magnetic field of the bending magnet affects the ion pump, and therefore the ion pump is arranged so that its main magnetic field is aligned with the leakage magnetic field at the ion pump, or at least with a main component thereof. In this way, the effect of the leakage magnetic field on the ion pump is reduced. Indeed, it is possible to use the leakage magnetic field as the main magnetic field of the ion pump.

公开(公告)号：US4712074A

公开(公告)日：1987-12-08

申请号：US801881

申请日：1985-11-26

Applicant: Alexander Harvey

Inventor： Alexander Harvey

IPC: H05H7/14 ,  H05H1/10 ,  H01J5/02 ,  H05H13/04

CPC classification number: H05H7/14

Abstract: A vacuum chamber for containing a charged particle beam in a rapidly changing magnetic environment comprises a ceramic pipe with conducting strips oriented along the longitudinal axis of the pipe and with circumferential conducting bands oriented perpendicular to the longitudinal axis but joined with a single longitudinal electrical connection. When both strips and bands are on the outside of the ceramic pipe, insulated from each other, a high-resistance conductive layer, such as nickel can be coated on the inside of the pipe.

Abstract translation: 用于在快速变化的磁环境中容纳带电粒子束的真空室包括陶瓷管，其具有沿着管的纵向轴线定向的导电条，并且具有垂直于纵向轴线定向但与单个纵向电连接相连的圆周导电带。 当两个条带和带都在陶瓷管的外侧，彼此绝缘时，可以在管的内侧涂覆诸如镍的高电阻导电层。

公开(公告)号：US2822491A

公开(公告)日：1958-02-04

申请号：US32932753

申请日：1953-01-02

Applicant: BBC BROWN BOVERI & CIE

Inventor： ROLF WIDEROE

IPC: H05H7/14

CPC classification number: H05H7/14

公开(公告)号：US10364489B2

公开(公告)日：2019-07-30

申请号：US15696836

申请日：2017-09-06

Applicant: Andre Anders

Inventor： Andre Anders

IPC: C23C14/30 ,  H05B7/00 ,  C23C14/28 ,  C23C14/14 ,  C23C14/04 ,  H05H7/14

Abstract: This disclosure provides systems, methods, and apparatus related to deposition techniques using laser ablation. In one aspect, an optical fiber and target of a material to be deposited on a first region of an interior surface of a hollow component are positioned in the hollow component. A first end of the optical fiber is coupled to a laser system. A second end of the optical fiber is proximate the target. The material is deposited on the first region of the interior surface of the hollow component by directing a first laser pulse from the laser system through the optical fiber to impinge on the target.