公开(公告)号：WO2005106549A1

公开(公告)日：2005-11-10

申请号：PCT/US2005/011679

申请日：2005-04-06

Applicant: CAPELLA, PHOTONICS, INC. ,  TREMAINE, Brian, P. ,  DAVIS, Joseph, E.

Inventor： TREMAINE, Brian, P. ,  DAVIS, Joseph, E.

IPC: G02B6/26

CPC classification number: G02B6/3586 ,  G02B6/3512 ,  G02B6/356 ,  G02B6/3588 ,  G02B6/359 ,  G02B26/0833 ,  G05B19/404 ,  G05B2219/41434

Abstract: A system and method for canceling disturbance in a MEMS device. The system 200 includes a MEMS device 203, which may include a substrate 205 and a plurality of individually movable MEMS elements 203-1 through 203-N, and a control assembly 207. The optical system 200 may be utilized in and/or form a portion of any optical apparatus employing an array of MEMS devices. The control assembly 207 uses feed-forward control signals to cancel disturbance in the MEMS device 203, and more particularly, to cancel disturbance in the non-switched or static mirrors of the MEMS device 203 caused by switched or moving mirrors.

Abstract translation: 一种用于消除MEMS器件中的干扰的系统和方法。 系统200包括MEMS器件203，其可以包括衬底205和多个可单独移动的MEMS元件203-1至203-N以及控制组件207.光学系统200可以用于和/或形成 使用MEMS器件阵列的任何光学装置的一部分。 控制组件207使用前馈控制信号来消除MEMS器件203中的干扰，更具体地，消除由开关或移动的反射镜引起的MEMS器件203的非开关或静态反射镜中的干扰。

公开(公告)号：WO2004086134A1

公开(公告)日：2004-10-07

申请号：PCT/RU2004/000079

申请日：2004-03-02

IPC: G02F1/29

CPC classification number: G02F1/2955 ,  G02B6/3556 ,  G02B6/3588

Abstract: The invention relates to data optical processing systems and can be used for high-performance switching systems for mass data reception and transmission. The aim of said invention is to develop a multichannel optical cluster switching system which substentially decreases loses by reducing the number of optical elements and reduces the lateral geometric size of the entire system by modifying the optical focusing system thereof. The technical aim is achieved by the fact that an additional system consisting of N formers of homocentric beams having a predefined angular width of omega APPROX a /f is arranged between a radiator and an active element. A radiator system is disposed in a first lens focal plane, a photodetector system is arranged in a second lens focal plane, said lens being positioned in such a way that a condition lambda f/b>g is fulfilled, wherein a is a distance between the centres of light valve units, lambda is the radiator wavelength, f is the lens focus length, b is the diameter of the light valve unit and g is a distance between the centres of the photodetectors.

Abstract translation: 本发明涉及数据光处理系统，可用于高质量数据接收和传输的高性能交换系统。 本发明的目的是开发一种多通道光簇交换系统，其通过减少光学元件的数量来降低损耗，并通过修改其光学聚焦系统来减小整个系统的横向几何尺寸。 技术目的是通过以下事实实现的：由辐射器和有源元件之间布置由具有预定义的角度宽度ωA A A A A A N N 1/2的同心梁的N形成器组成的附加系统。 散热器系统设置在第一透镜焦平面中，光电检测器系统布置在第二透镜焦平面中，所述透镜以满足条件λf/ b> g的方式定位，其中a是 光阀单元的中心，λ是散热器波长，f是透镜焦距，b是光阀单元的直径，g是光电检测器中心之间的距离。

公开(公告)号：WO2003094196A1

公开(公告)日：2003-11-13

申请号：PCT/US2003/013446

申请日：2003-04-30

Applicant: SENSORS UNLIMITED, INC

Inventor： DRIES, Christopher J.

IPC: H01J40/14

CPC classification number: G02B6/3588 ,  G02B6/3512 ,  G02B6/3548

Abstract: A method and apparatus for monitoring MEMS-based optical switches and cross-connects. A plurality of partial reflectors (24) are introduced into optical paths of the switch (10) for reflecting light transmitted along the optical paths through a transparent substrate of the switch (10), without disturbing transmission of the light along the optical paths. The reflected light is transmitted through the substrate (20), which is preferably made of silicon and transparent to wavelengths of light used in DWDM systems. A photodetector array bonded to the underside of the substrate detects the light reflected by the plurality of partial reflectors (24) through the substrate (20). The light detected by the photodetector array (30) indicates the switching states and functionality of the switch (10), and can be processed by circuitry associated with the array.

Abstract translation: 一种用于监测基于MEMS的光开关和交叉连接的方法和装置。 多个部分反射器（24）被引入到开关（10）的光路中，用于反射沿着光路传输的光通过开关（10）的透明基板，而不会干扰光沿着光路的透射。 反射光透射通过衬底（20），其优选地由硅制成并且对于在DWDM系统中使用的光的波长是透明的。 结合到基板的下侧的光电检测器阵列检测由多个部分反射器（24）穿过基板（20）反射的光。 由光电检测器阵列（30）检测的光指示开关（10）的开关状态和功能，并且可以由与阵列相关联的电路处理。

公开(公告)号：WO0181961A3

公开(公告)日：2003-08-21

申请号：PCT/US0113211

申请日：2001-04-25

Applicant: STANDARD MEMS INC ,  TRIMMER WILLIAM ,  FRICANO GLENN J

Inventor： TRIMMER WILLIAM ,  FRICANO GLENN J

IPC: G02B6/32 ,  G02B6/35 ,  G02B6/42 ,  G02B6/255 ,  G01B11/27 ,  G02B6/30

CPC classification number: G02B6/3588 ,  G02B6/32 ,  G02B6/3512 ,  G02B6/3546 ,  G02B6/3556 ,  G02B6/4224 ,  G02B6/4225

Abstract: In a fiber optic system, a method for aligning an incoming beam of light (13) and a target fiber (3) that does not use light travelling down the core of the fiber to make adjustments to the relative positions of the beam of light and the fiber. According to the method of the invention, cladding mounted light detectors (23) detect light in the cladding as the beam of light sweeps across the fiber, and a miminum amount of light detected in the cladding is established during the course of the sweeps. The relative positions of the beam of light and the fiber are then adjusted so that the light detected in the cladding corresponds to the minimum detected during the sweeps.

Abstract translation: 在光纤系统中，用于对准入射光束（13）和目标光纤（3）的方法，该方法不使用沿着光纤芯线行进的光线来调整光束的相对位置， 纤维。 根据本发明的方法，随着光束扫过光纤，包层安装的光检测器（23）检测包层中的光，并且在扫描过程中建立了在包层中检测到的一定量的光。 然后调整光束和光纤的相对位置，使得在包层中检测的光对应于扫描期间检测到的最小值。

公开(公告)号：WO2003058286A2

公开(公告)日：2003-07-17

申请号：PCT/IL2003/000031

申请日：2003-01-10

Applicant: GALAYOR NETWORKS INC. ,  HARONIAN, Dan ,  VERED, Ran ,  EFRON, Eitan ,  COHEN, Rahav

Inventor： HARONIAN, Dan ,  VERED, Ran ,  EFRON, Eitan ,  COHEN, Rahav

IPC: G02B

CPC classification number: G02B6/3508 ,  G02B6/266 ,  G02B6/3548 ,  G02B6/3552 ,  G02B6/3568 ,  G02B6/3584 ,  G02B6/3588 ,  G02B6/3594 ,  G02B6/4226

Abstract: Novel optical waveguide components, operated by means of micro-actuators which move suspended section of waveguides, and especially variable optical attenuators, and optical couplers. Methods are also described for aligning and latching the micro-actuators in two or three dimensions, such that settings of variable attenuators can be maintained. Such micro-actuators are also used for ensuring good alignment between the various waveguide and fiber ports in integrated optical circuits. Additional components based on micro-actuators include multi-pole switches, digital variable optical attenuators, receiver input protectors, and multifunctional line protection chips. The components and systems described can be executed in monolithic form, thus engendering significant cost and space savings. Furthermore, methods of substrate etching to obtain accurately vertical faces are also described.

Abstract translation: 通过微型致动器操作的新型光波导部件，其移动悬挂的波导部分，特别是可变光衰减器，以及光耦合器。 还描述了用于在两维或三维中对准和锁定微致动器的方法，使得可以保持可变衰减器的设置。 这种微致动器还用于确保集成光电路中的各种波导和光纤端口之间的良好对准。 基于微执行器的附加组件包括多极开关，数字可变光衰减器，接收器输入保护器和多功能线路保护芯片。 所描述的组件和系统可以以整体形式执行，从而产生显着的成本和空间节省。 此外，还描述了获得精确垂直面的基板蚀刻方法。

公开(公告)号：WO2003016980A1

公开(公告)日：2003-02-27

申请号：PCT/US2002/025534

申请日：2002-08-09

Applicant: GLIMMERGLASS NETWORKS, INC.

Inventor： DICKSON, William, C.

IPC: G02B26/02

CPC classification number: G02B6/3588 ,  G02B6/266 ,  G02B6/3512 ,  G02B6/3556 ,  G02B6/3594

Abstract: Methods and apparatus are provided for the closed loop attenuation of optical beam power in a multiple-axis free-space-coupled single-mode fiber-optic transmission system. In a specific embodiment involving two tip-tilt mirrors to couple optical power from an input fiber to an output fiber, the four mirror axes are actuated in such a way as to produce either a static or time-varying set of induced mirror angles that yield a desired time history of optical loss. The attenuation technique uses the DC level of the measured output power to adjust the amplitude of the induced mirror angles.

Abstract translation: 为多轴自由空间耦合单模光纤传输系统中的光束功率的闭环衰减提供了方法和装置。 在涉及将光功率从输入光纤耦合到输出光纤的两个倾斜反射镜的具体实施例中，四个反射镜轴被致动以产生静态或时变的感应反射镜的集合，其产生 光损耗的期望历史。 衰减技术使用测量输出功率的直流电平来调节感应反射镜角度的幅度。

公开(公告)号：WO03016958A2

公开(公告)日：2003-02-27

申请号：PCT/US0225561

申请日：2002-08-09

Applicant: GLIMMERGLASS NETWORKS INC

Inventor： DICKSON WILLIAM C

IPC: G01M11/02 ,  G02B6/32 ,  G02B6/35 ,  G02B6/42 ,  G02B26/08 ,  G02B

CPC classification number: G02B6/4227 ,  G02B6/3512 ,  G02B6/3556 ,  G02B6/3588 ,  G02B6/4225

Abstract: Methods and apparatus are provided for detection and control of multiple-axis active alignment for a free-space-coupled single-mode fiber-optic transmission system that automatically optimizes the coupling through the system. In a specific embodiment, a measurement of coupled power is made and error signals are used to control actuation via four axes of beam steering elements to null four generally orthogonal alignment errors (combinations of two lateral errors and two angular errors) of the beam between the input and output fibers. The four alignment errors are detected using a synchronous-detection approach. A feedback control system nulls the four errors.

Abstract translation: 提供了用于检测和控制用于自由空间耦合的单模光纤传输系统的多轴有源对准的方法和装置，其自动优化通过系统的耦合。 在具体实施例中，进行耦合功率的测量，并且使用误差信号来控制通过波束操纵元件的四个轴的致动，以将波束的四个大致正交对准误差（两个横向误差和两个角度误差的组合） 输入和输出光纤。 使用同步检测方法检测四个对准误差。 反馈控制系统将四个错误置零。

公开(公告)号：WO2003009022A2

公开(公告)日：2003-01-30

申请号：PCT/US2002/022166

申请日：2002-07-12

Applicant: CHROMUX TECHNOLOGIES, INC.

Inventor： CHANG, Tallis, Y. ,  LAM, Leo, K. ,  MARTIN, Graham

IPC: G02B6/00

CPC classification number: G02B6/3588 ,  G02B6/266 ,  G02B6/3512 ,  G02B6/3514 ,  G02B6/357 ,  G02B6/3594 ,  G02B6/3596

Abstract: An assembly that could be used either as a switch or an attenuator includes two or more optical channels defined by lithography within a substrate. The two or more optical channels are positioned so that the ends of the optical channels are at or near an edge of the substrate. A moveable MEMS mirror is positioned near the edge of the substrate and the openings, with the face of the mirror positioned to receive an optical signal from one of the optical channels. The mirror can direct an optical signal from one of the optical channels into another of the optical channels. Mirror position can be changed to alter the path of the optical signal and to change the coupling between the optical channels. In this way, the assembly of optical channels within the substrate and the MEMS mirror can act as a switch or as an attenuator.

Abstract translation: 可以用作开关或衰减器的组件包括由衬底内的光刻限定的两个或多个光通道。 两个或更多个光学通道被定位成使得光学通道的端部处于或靠近基板的边缘。 可移动MEMS反射镜位于基板的边缘附近和开口处，其中反射镜的表面被定位成从光通道之一接收光信号。 镜子可以将光信号从一个光通道引导到另一个光通道。 可以更改镜像位置以改变光信号的路径并改变光通道之间的耦合。 以这种方式，衬底和MEMS镜中的光通道的组装可以用作开关或衰减器。

公开(公告)号：WO02071132A3

公开(公告)日：2002-11-28

申请号：PCT/US0207150

申请日：2002-03-04

Applicant: MASSACHUSETTS INST TECHNOLOGY ,  HUNG ELMER S ,  DEUTSCH ERIK R ,  SENTURIA STEPHEN D

Inventor： HUNG ELMER S ,  DEUTSCH ERIK R ,  SENTURIA STEPHEN D

IPC: G02B6/34 ,  G02B6/35 ,  G02B26/08 ,  H04J14/02 ,  G02B5/18 ,  G02B26/02

CPC classification number: G02B6/3516 ,  G02B6/2931 ,  G02B6/29383 ,  G02B6/3524 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3584 ,  G02B6/3588 ,  G02B6/3594 ,  G02B6/3598 ,  G02B6/4246 ,  G02B26/0808 ,  H04J14/0201 ,  H04J14/0204 ,  H04J14/0205 ,  H04J14/0213

Abstract: A method of redirecting light using an actuatable two-layer diffraction grating structure (50), the method having applications in wavelength-division multiplexed systems. The grating structure having a plurality of actuatable grating elements (52).

Abstract translation: 一种使用可致动的双层衍射光栅结构（50）重定向光的方法，该方法具有波分复用系统中的应用。 光栅结构具有多个可致动光栅元件（52）。

公开(公告)号：WO2002082165A2

公开(公告)日：2002-10-17

申请号：PCT/US2002/010490

申请日：2002-04-03

Applicant: CIDRA CORPORATION

Inventor： MOON, John ,  KERSEY, Alan, D. ,  SIRKIS, James, S. ,  DUNPHY, James ,  PINTO, Joseph ,  SZCZPPANEK, Paul ,  DAVIS, Michael

IPC: G02B27/10

CPC classification number: G02B6/4246 ,  G02B6/262 ,  G02B6/266 ,  G02B6/2713 ,  G02B6/272 ,  G02B6/278 ,  G02B6/2793 ,  G02B6/2931 ,  G02B6/29311 ,  G02B6/29313 ,  G02B6/29314 ,  G02B6/29395 ,  G02B6/29398 ,  G02B6/3516 ,  G02B6/356 ,  G02B6/3588 ,  G02B6/359 ,  G02B6/4226 ,  G02B26/0833 ,  G02B26/0841 ,  G02B27/1006 ,  G02B27/1073 ,  G02B27/108 ,  G02B27/1086 ,  G02B27/126 ,  G02B27/144 ,  G02B27/147 ,  H04J14/021 ,  H04J14/0213 ,  H04J14/0221 ,  H04Q2011/0009 ,  H04Q2011/0026

Abstract: An dynamic optical filter 10 is provided to selectively attenuate or filter a wavelength band(s) of light (i.e., optical channel(s)) or a group(s) of wavelength bands of an optical WDM input signal 12. The optical filter is controllable or programmable to selectively provide a desired filter function. The optical filter 10 includes a spatial light modulator 36, which comprises an array of micromirrors 52 effectively forms a two-dimensional diffraction grating mounted in a retro-reflecting configuration. Each optical channel 14 is dispersed separately or overlappingly onto the array of micro-mirrors 52 along a spectral axis or direction 55 such that each optical channel or group of optical channels are spread over a plurality of micro-mirrors to effectively pixelate each of the optical channels or input signal. Each channel 14 or group of channels may be selectively attenuated by flipping or tilting a selected number of micro-mirrors to thereby deflect a portion of the incident radiation away from the return optical path. The micro-mirrors operate in a digital manner by flipping between a first and second position in response to a control signal 56 provided by a controller 58 in accordance with an attenuation algorithm and an input command 60. The switching algorithm may provide a bit (or pixel) map or look-up table indicative of the state of each of the micro-mirrors 52 of the array to selectively attenuate the input signal and provide a modified output signal 38 at optical fiber 40.

Abstract translation: 提供动态滤光器10以选择性地衰减或过滤光学WDM输入信号12的波长带（即，光学通道）或波长带的组。滤光器是 可控或可编程以选择性地提供期望的滤波器功能。 滤光器10包括空间光调制器36，其包括微镜阵列52，其有效地形成安装在后向反射构造中的二维衍射光栅。 每个光通道14沿着光谱轴或方向55分开或重叠地分散或重叠地分散在微镜52的阵列上，使得每个光通道或一组光通道分布在多个微镜上以有效地像素化每个光学 通道或输入信号。 每个通道14或通道组可以通过翻转或倾斜选定数量的微反射镜来选择性地衰减，从而使入射辐射的一部分偏离返回光路。 响应于控制器58根据衰减算法和输入命令60提供的控制信号56，微镜以数字方式操作，通过在第一和第二位置之间翻转。切换算法可以提供位（或 像素）映射或查找表，其指示阵列的每个微镜52的状态，以选择性地衰减输入信号，并在光纤40提供经修改的输出信号38。