ビーム記録装置及びビーム調整方法
    11.
    发明申请
    ビーム記録装置及びビーム調整方法 审中-公开
    光束记录装置和光束调节方法

    公开(公告)号:WO2007111260A1

    公开(公告)日:2007-10-04

    申请号:PCT/JP2007/056057

    申请日:2007-03-23

    CPC classification number: G11B7/261 G11B5/59627 G11B5/855 G11B7/0953 G11B9/10

    Abstract:  ターンテーブルのラジアル方向に互いに異なる角度で配された少なくとも3つの変位センサを有する変位検知器と、上記少なくとも3つの変位センサの検知変位に基づいて、ターンテーブルの側面のラジアル方向における変位に対応する形状データを算出する形状算出器と、上記変位センサの少なくとも1つからの検知変位及び上記形状データに基づいて、回転非同期成分及び回転同期成分を含むターンテーブルの回転振れを算出する回転振れ演算器と、上記回転振れに基づいて電子ビームの照射位置を調整するビーム照射位置調整器と、を有している。

    Abstract translation: 本发明提供一种光束记录装置,包括位移检测器,该位移检测器具有沿转盘的径向方向以不同角度布置的至少三个位移传感器,形状计算器,用于计算对应于转盘侧面在径向上的位移的形状数据 基于检测到的上述至少三个位移传感器的位移,基于检测到的旋转偏转计算单元,用于计算旋转偏转,包含转台的旋转异步分量和旋转同步分量 位移传感器和形状数据中的至少一个的位移以及用于基于旋转偏转来调节电子束的照射位置的光束照射位置调节器。

    METHOD FOR ELECTROPLATING AN ARTICLE HAVING A SURFACE WITH A NANOSTRUCTURE TO BE PLATED AND APPARATUS FOR CARRYING OUT SUCH A METHOD
    12.
    发明申请
    METHOD FOR ELECTROPLATING AN ARTICLE HAVING A SURFACE WITH A NANOSTRUCTURE TO BE PLATED AND APPARATUS FOR CARRYING OUT SUCH A METHOD 审中-公开
    用于电镀具有待制造的纳米结构的表面的制品的方法和用于实施这种方法的装置

    公开(公告)号:WO2007073162A2

    公开(公告)日:2007-06-28

    申请号:PCT/NL2006/000643

    申请日:2006-12-20

    Inventor: VREMAN, Frederik

    CPC classification number: C25D5/18 C25D1/10 G11B7/261

    Abstract: The invention relates to a method for electroplating an article having a nanostructure to be plated in an electroplating apparatus comprising an electrolytic solution, as well as a first and a second pole for forming a cathode and an anode, respectively, in the electrolytic solution and a voltage source for applying a potential difference between the two poles. The method comprises the steps of electrically connecting the article having a nanostructure to be plated to the first pole and placing the article in the electrolytic solution, and forming a second metal film on the primary conductive layer by causing metal ions from the electrolytic solution to precipitate on the article having a nanostructure to be plated by applying a potential difference for a period of time between the second pole, which is connected as the anode, and the first pole, which is connected as the cathode. First a DC voltage is applied, and subsequently a periodically reversible voltage.

    Abstract translation: 本发明涉及一种电镀具有待镀覆的纳米结构的制品的方法,该制品包括电解溶液的电镀装置,以及分别在电解液中形成阴极和阳极的第一和第二极,以及 用于施加两极之间的电位差的电压源。 该方法包括以下步骤:将具有要镀覆的纳米结构的制品与第一极电连接并将制品放置在电解溶液中,并且通过使来自电解液的金属离子沉淀而在主导电层上形成第二金属膜 在通过在作为阳极连接的第二极与作为阴极连接的第一极之间施加电位差一段时间的具有要镀覆的纳米结构的制品上。 首先施加一个直流电压,随后施加周期性的可逆电压。

    記録媒体原盤用ポジ型レジスト組成物、並びに、それを用いた記録媒体原盤の製造方法及びスタンパの製造方法
    13.
    发明申请
    記録媒体原盤用ポジ型レジスト組成物、並びに、それを用いた記録媒体原盤の製造方法及びスタンパの製造方法 审中-公开
    用于记录中等主体的积极抵抗组合物,以及用于生产记录介质主体的方法以及使用这种积极抵抗性组合物相对地生产冲压器的方法

    公开(公告)号:WO2006115117A1

    公开(公告)日:2006-11-02

    申请号:PCT/JP2006/308115

    申请日:2006-04-18

    CPC classification number: G11B7/261 C09D4/06 G03F7/0015 G03F7/0392

    Abstract:  アルキルビニルエーテルでブロックされたアルカリ可溶性基を有するモノマー単位を有するビニル系重合体を含むことを特徴とする優れた耐メッキ性及びガラス等の基板との付着性を示す記録媒体原盤用ポジ型レジスト組成物;及び、このポジ型レジスト組成物を用いた記録媒体原盤又はスタンパの製造方法を提供する。

    Abstract translation: 公开了一种用于记录电镀电阻和对玻璃基板等的粘合性优异的记录介质母料的正性抗蚀剂组合物。 用于记录介质母料的正型抗蚀剂组合物的特征在于含有具有被烷基乙烯基醚封端的碱溶性基团的单体单元的乙烯基聚合物。 还公开了一种用于制造其中使用这种正性抗蚀剂组合物的记录介质母版或印模的方法。

    MASTER SUBSTRATUS AND METHODS FOR MASTERING
    14.
    发明申请
    MASTER SUBSTRATUS AND METHODS FOR MASTERING 审中-公开
    主要基础和主要方法

    公开(公告)号:WO2006072857A2

    公开(公告)日:2006-07-13

    申请号:PCT/IB2005/054368

    申请日:2005-12-21

    CPC classification number: G11B7/261 Y10T428/24802 Y10T428/24926

    Abstract: The present invention relates to a master substrate (10) for creating a high- density relief structure, particularly a master substrate (10) for making a stamper for the mass fabrication of optical discs or a master substrate for creating a stamp for micro contact printing, wherein an organic dye layer (12) is provided for creating the high-density relief structure. The present invention further relates to a method for providing a high density relief structure on a master substrate (10) comprising an organic dye layer (12), the method comprising the following steps: applying dye bleaching laser pulses on regions (30) of the master substrate (10) where pits (32) are to be formed; and removing the bleached regions (30) of the organic dye layer (12) by an etching process. The present invention also relates to a method for providing a high density relief structure on a master substrate (10), the method comprising the following steps: - providing a master substrate (10) comprising at least a polycarbonate layer (14) carrying an organic dye layer (12); forming bumps (20) at the dye/polycarbonate interface (16) by applying laser pulses; and removing the remaining dye layer by an etching process.

    Abstract translation: 本发明涉及一种用于产生高密度浮雕结构的主基板(10),特别是用于制造用于大量制造光盘的压模的母基板(10)或用于形成用于微接触印刷的印模的母基板 其中提供有机染料层(12)以产生高密度浮雕结构。 本发明还涉及一种在包含有机染料层(12)的母基板(10)上提供高密度浮雕结构的方法,该方法包括以下步骤:将染料漂白激光脉冲施加在 要形成凹坑(32)的主衬底(10); 以及通过蚀刻工艺除去有机染料层(12)的漂白区域(30)。 本发明还涉及一种用于在母板(10)上提供高密度浮雕结构的方法,该方法包括以下步骤: - 提供包含至少一个承载有机物的聚碳酸酯层(14)的母基板(10) 染料层(12); 通过施加激光脉冲在染料/聚碳酸酯界面(16)处形成凸块(20); 并通过蚀刻工艺除去剩余的染料层。

    MASTERING PROCESS WITH PHASE-CHANGE MATERIALS
    15.
    发明申请
    MASTERING PROCESS WITH PHASE-CHANGE MATERIALS 审中-公开
    具有相变材料的主要工艺

    公开(公告)号:WO2006045332A1

    公开(公告)日:2006-05-04

    申请号:PCT/EP2004/012156

    申请日:2004-10-27

    CPC classification number: G11B7/261

    Abstract: The invention provides a method for manufacturing an optical information carrier, in particular for producing a master disc by recording information comprising information units in the form of a pattern of geometrical structures in a stack of at least a recording layer (2) formed on a surface of a substrate (1). The recording layer comprises a phase-change material, in particular GeInSbTe. In the method of the invention, the recording layer is exposed to a laser beam to form an exposure pattern in the recording layer and the exposed layer is developed for creating the pattern in the recording layer corresponding to the exposure pattern.

    Abstract translation: 本发明提供了一种用于制造光信息载体的方法,特别是用于通过在至少形成在表面上的记录层(2)的堆叠中记录包括几何结构图案形式的信息单元的信息来产生母盘 的基板(1)。 记录层包括相变材料,特别是GeInSbTe。 在本发明的方法中,记录层暴露于激光束以在记录层中形成曝光图案,并且显影曝光层用于在对应于曝光图案的记录层中形成图案。

    MASTER SUBSTRATE AND METHOD OF MANUFACTURING A HIGH-DENSITY RELIEF STRUCTURE
    16.
    发明申请
    MASTER SUBSTRATE AND METHOD OF MANUFACTURING A HIGH-DENSITY RELIEF STRUCTURE 审中-公开
    主基板和制造高密度救济结构的方法

    公开(公告)号:WO2006043209A1

    公开(公告)日:2006-04-27

    申请号:PCT/IB2005/053349

    申请日:2005-10-12

    CPC classification number: G11B7/261 G11B7/0901

    Abstract: The present invention relates to a master substrate (10) for optical recording comprising a recording layer (12) and a substrate layer (14), the recording layer comprises a growth dominated phase-change material, the chemical properties with respect to chemical agents of which may be altered due to a phase change induced by projecting light on the recording layer. For tracking purposes, the substrate layer comprises pre-grooves (16). The present invention further relates to a method of manufacturing a stamper for replicating a high-density relief structure.

    Abstract translation: 本发明涉及一种用于光学记录的主基板(10),包括记录层(12)和基底层(14),该记录层包括生长主导的相变材料,相对于化学试剂的化学特性 其可能由于通过在记录层上投射光而引起的相位变化而改变。 为了跟踪目的,基底层包括预凹槽(16)。 本发明还涉及制造用于复制高密度浮雕结构的压模的方法。

    DEVICE AND METHOD FOR MANUFACTURING A MASTER DISC USING A PULSED WRITE STRATEGY
    17.
    发明申请
    DEVICE AND METHOD FOR MANUFACTURING A MASTER DISC USING A PULSED WRITE STRATEGY 审中-公开
    使用脉冲写策略制造主盘的装置和方法

    公开(公告)号:WO2006016318A1

    公开(公告)日:2006-02-16

    申请号:PCT/IB2005/052557

    申请日:2005-07-29

    CPC classification number: G11B7/00456 G11B7/261

    Abstract: The present invention relates to a device for manufacturing a master disc for mastering data on an optical record carrier. To achieve reduced jitter levels resulting from pit widths that are too large, which might result in cross talk effects during read out or even cross write effects during mastering, the application of a pulsed write strategy for manufacturing the master disc is proposed, wherein the pits are recorded by a sequence of a predetermined number of write pulses, said sequence including a number of write pulses having a light intensity of substantially zero.

    Abstract translation: 本发明涉及一种用于制造用于在光学记录载体上掌握数据的母盘的装置。 为了实现由于过大的凹坑宽度导致的降低的抖动水平,这可能导致在母盘制作期间读出期间的串扰效应甚至交叉写入效应,因此提出了用于制造母盘的脉冲写入策略的应用,其中凹坑 由预定数量的写入脉冲的序列记录,所述序列包括具有基本为零的光强度的多个写入脉冲。

    ELECTRON BEAM APPLYING APPARATUS AND DRAWING APPARATUS
    18.
    发明申请
    ELECTRON BEAM APPLYING APPARATUS AND DRAWING APPARATUS 审中-公开
    电子束应用设备和绘图设备

    公开(公告)号:WO2006009295A1

    公开(公告)日:2006-01-26

    申请号:PCT/JP2005/013683

    申请日:2005-07-20

    Abstract: An electron beam applying apparatus includes: a thermal field emission type electron source (12) emitting an electron beam; an electrostatic lens (14) disposed immediately below the electron source (12) and acting as a condensing electrode for condensing the electron beam in a first angular aperture emitted by the electron source in a second angular aperture smaller than the first angular aperture; a condenser lens disposed on a downstream side of the electrostatic lens (14) and condensing the electron beam condensed in the second aperture angel by the electrostatic lends (14) in a crossover point; and an objective lens (28) disposed on a downstream side of the condenser lens (18) and condensing the electron beam condensed in the crossover point by the condenser lens (18) on the surface of the material (32).

    Abstract translation: 电子束施加装置包括:发射电子束的热场发射型电子源(12); 静电透镜(14),其设置在所述电子源(12)的正下方,并且用作聚集电极,用于将电子束在由所述电子源发射的第一角孔中在小于所述第一角孔的第二角度孔中聚集; 设置在所述静电透镜(14)的下游侧的聚光透镜,并且以交叉点将由所述静电透镜(14)在第二孔径角度中聚光的电子束聚光; 以及设置在聚光透镜(18)的下游侧的物镜(28),并且将通过聚光透镜(18)在交叉点处会聚的电子束会聚在材料(32)的表面上。

    OPTICAL MASTER SUBSTRATE AND METHOD TO MANUFACTURE HIGH-DENSITY RELIEF STRUCTURE
    19.
    发明申请
    OPTICAL MASTER SUBSTRATE AND METHOD TO MANUFACTURE HIGH-DENSITY RELIEF STRUCTURE 审中-公开
    光学基板和制造高密度缓冲结构的方法

    公开(公告)号:WO2005101397A1

    公开(公告)日:2005-10-27

    申请号:PCT/IB2005/051160

    申请日:2005-04-08

    CPC classification number: G11B7/261 G11B7/263 Y10T428/21

    Abstract: The invention relates to a master substrate, a method for making a high­density relief structure, and optical discs replicated with the high-density relief structure, the master substrate comprising a substrate layer (10) and a recording stack deposited on the substrate layer, the recording stack comprising: - an information layer (12), - an interface layer (11) sandwiched between said information layer and the substrate, said information layer (12) comprising a growth-dominated phase-change material for forming marks and spaces representing an encoded data pattern, wherein said recording material is an alloy comprising at least two materials of the group of materials containing Ge, Sb, Te, In, Se, Bi, Ag, Ga, Sn, Pb, As. A very high-density relief structure is achieved.

    Abstract translation: 本发明涉及一种主基板,一种制造高密度浮雕结构的方法,以及与该高密度浮雕结构复制的光盘,该主基板包括一基板层(10)和一沉积在该基板层上的一记录叠层 记录堆叠包括: - 信息层(12), - 夹在所述信息层和所述衬底之间的界面层(11),所述信息层(12)包括生长主导的相变材料,用于形成表示 编码数据图案,其中所述记录材料是包含含有Ge,Sb,Te,In,Se,Bi,Ag,Ga,Sn,Pb,As的材料组中的至少两种材料的合金。 实现了非常高密度的浮雕结构。

    DEVICE AND METHOD FOR MAKING A MASTER RECORD CARRIER FOR USE IN MAKING A STAMPER
    20.
    发明申请
    DEVICE AND METHOD FOR MAKING A MASTER RECORD CARRIER FOR USE IN MAKING A STAMPER 审中-公开
    用于制造用于制造冲压器的主记录载体的装置和方法

    公开(公告)号:WO2005004141A3

    公开(公告)日:2005-03-10

    申请号:PCT/IB2004051059

    申请日:2004-06-30

    Inventor: MEINDERS ERWIN R

    CPC classification number: G11B7/263 G11B7/261 G11B9/14 G11B9/1409 G11B9/1472

    Abstract: The present invention relates to a device and a corresponding method for making a master record carrier (60) for use in making a stamper (64) for making replicated read-only optical record carriers (90). Rather than using irradiation with photons or electrons, it is proposed to make use of thermal-mechanical deformation of a thin organic layer in the record carrier. Therefore, the device according to the invention comprises: a recording head (1) for recording information in an information layer (62) of a master record carrier (60), said recording head (1) including a heatable tip (2) which can be displaced in at least one direction, a displacement means (3, 5, 6, 9) for displacing said tip (2) in the at least one direction, a heating means (7) for heating said tip (2) and a control unit (8) for controlling said heating means and said displacement means such that for recording a mark said tip is heated and displaced to be in contact with said information layer causing an indentation therein.

    Abstract translation: 本发明涉及一种用于制造用于制造用于制造复制的只读光学记录载体(90)的压模(64)的主记录载体(60)的装置和相应方法。 不是使用光子或电子的照射,而是建议利用记录载体中薄的有机层的热机械变形。 因此,根据本发明的装置包括:用于在主记录载体(60)的信息层(62)中记录信息的记录头(1),所述记录头(1)包括可加热尖端(2) 在至少一个方向上移位位移装置(3,5,6,9),用于在至少一个方向上移动所述尖端(2);加热装置(7),用于加热所述尖端(2)和控制 用于控制所述加热装置和所述位移装置的单元(8),使得用于记录标记,所述尖端被加热和移位以与所述信息层接触,从而在其中形成凹陷。

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