公开(公告)号：WO2010042577A3

公开(公告)日：2010-07-15

申请号：PCT/US2009059782

申请日：2009-10-07

Applicant: APPLIED MATERIALS INC ,  PORTHOUSE KEITH ,  BORDEN PETER G ,  HOLTAM TRISTAN R ,  ZHOU LISONG ,  LATCHFORD IAN SCOTT ,  AQUI DEREK ,  SHAH VINAY

Inventor： PORTHOUSE KEITH ,  BORDEN PETER G ,  HOLTAM TRISTAN R ,  ZHOU LISONG ,  LATCHFORD IAN SCOTT ,  AQUI DEREK ,  SHAH VINAY

IPC: H01L31/042 ,  H01L21/677

CPC classification number: H01L21/67236 ,  H01L21/67069 ,  H01L21/67167 ,  H01L21/67201 ,  H01L21/67213 ,  H01L31/1876 ,  Y02E10/50 ,  Y02P70/521

Abstract: The present invention generally provides a batch substrate processing system, or cluster tool, for in-situ processing of a film stack used to form regions of a solar cell device. In one configuration, the film stack formed on each of the substrates in the batch contains one or more silicon-containing layers and one or more metal layers that are deposited and further processed within the various chambers contained in the substrate processing system. In one embodiment, a batch of solar cell substrates is simultaneously transferred in a vacuum or inert environment to prevent contamination from affecting the solar cell formation process.

Abstract translation: 本发明通常提供用于原位处理用于形成太阳能电池器件区域的薄膜叠层的批量衬底处理系统或群集工具。 在一种配置中，在批料中的每个衬底上形成的膜堆包含一个或多个含硅层和一个或多个金属层，所述金属层在包含在衬底处理系统中的各个室内沉积并进一步处理。 在一个实施例中，一批太阳能电池基板同时在真空或惰性环境中转移以防止污染影响太阳能电池形成过程。

公开(公告)号：WO2011041267A2

公开(公告)日：2011-04-07

申请号：PCT/US2010/050414

申请日：2010-09-27

Applicant: APPLIED MATERIALS, INC. ,  AQUI, Derek ,  ZUNIGA, Steven ,  SUBBARAMAN, Venkateswaran ,  LIEBSCHER, Kirk ,  ALEXANDER, John ,  ZHANG, Zhenhua ,  RANA, Virendra V.S.

Inventor： AQUI, Derek ,  ZUNIGA, Steven ,  SUBBARAMAN, Venkateswaran ,  LIEBSCHER, Kirk ,  ALEXANDER, John ,  ZHANG, Zhenhua ,  RANA, Virendra V.S.

IPC: H01L31/18 ,  H01L31/042

CPC classification number: H01L21/67207 ,  C23C14/5813 ,  C23C14/5893 ,  C23C16/56 ,  H01L31/0463 ,  H01L31/186 ,  H01L31/1876 ,  Y02E10/50 ,  Y02P70/521

Abstract: An apparatus and method for processing the solar cell substrates is provided. In one embodiment, a laser firing chamber for processing solar cell substrates placed in a carrier, comprising a laser module located at a side of the carrier, the laser module being adapted to generate and direct multiple laser beams over an entire surface of a plurality of solar cell substrates, and a transport adapted to convey the carrier through an outputting region of the laser beams.

Abstract translation: 提供了一种用于处理太阳能电池基板的装置和方法。 在一个实施例中，一种用于处理放置在载体中的太阳能电池基板的激光烧制室，包括位于载体一侧的激光模块，所述激光模块适于在多个 太阳能电池基板和适于通过激光束的输出区域传送载体的传送装置。

公开(公告)号：WO2014058460A1

公开(公告)日：2014-04-17

申请号：PCT/US2013/029185

申请日：2013-03-05

Applicant: DWFRITZ AUTOMATION INC. ,  AQUI, Derek

Inventor： AQUI, Derek

IPC: H05K13/04 ,  H01L21/60

CPC classification number: G01B11/14 ,  H01L21/681 ,  H05K13/08

Abstract: Simultaneous-view object insertion systems, apparatuses and methods are described herein. In various embodiments, an object insertion device may be configured to be moveable along a path to insert an object through a defined space that lies along the path. In various embodiments, a mirror assembly may be positioned between the object insertion device and the defined space to simultaneously direct, from one or more perspectives along the path, first light from a direction of the defined space towards a first vantage point for viewing and second light from a direction of the object towards a second vantage point for viewing, wherein the direction of the defined space is different from the direction of the object. In various embodiments, the mirror assembly may be configured to move away from the path to allow the object insertion device to pass toward the defined space.

Abstract translation: 本文描述了同时观看的对象插入系统，装置和方法。 在各种实施例中，对象插入装置可以被配置为沿着路径移动以通过沿着路径定位的空间插入对象。 在各种实施例中，反射镜组件可以定位在物体插入装置和限定的空间之间，以同时从沿着路径的一个或多个透视图引导从限定的空间的方向到第一有利位置的第一光，以便观察和第二 从物体的方向朝向第二有利位置观察的光，其中限定的空间的方向不同于物体的方向。 在各种实施例中，反射镜组件可被配置为远离路径移动以允许物体插入装置朝向限定的空间传递。

公开(公告)号：WO2011041267A3

公开(公告)日：2011-08-04

申请号：PCT/US2010050414

申请日：2010-09-27

Applicant: APPLIED MATERIALS INC ,  AQUI DEREK ,  ZUNIGA STEVEN ,  SUBBARAMAN VENKATESWARAN ,  LIEBSCHER KIRK ,  ALEXANDER JOHN ,  ZHANG ZHENHUA ,  RANA VIRENDRA V S

Inventor： AQUI DEREK ,  ZUNIGA STEVEN ,  SUBBARAMAN VENKATESWARAN ,  LIEBSCHER KIRK ,  ALEXANDER JOHN ,  ZHANG ZHENHUA ,  RANA VIRENDRA V S

IPC: H01L31/18 ,  H01L31/042

CPC classification number: H01L21/67207 ,  C23C14/5813 ,  C23C14/5893 ,  C23C16/56 ,  H01L31/0463 ,  H01L31/186 ,  H01L31/1876 ,  Y02E10/50 ,  Y02P70/521

Abstract: An apparatus and method for processing the solar cell substrates is provided. In one embodiment, a laser firing chamber for processing solar cell substrates placed in a carrier, comprising a laser module located at a side of the carrier, the laser module being adapted to generate and direct multiple laser beams over an entire surface of a plurality of solar cell substrates, and a transport adapted to convey the carrier through an outputting region of the laser beams.

Abstract translation: 提供了用于处理太阳能电池基板的设备和方法。 在一个实施例中，用于处理放置在载体中的太阳能电池基板的激光器发射室包括位于载体一侧的激光器模块，激光器模块适于在多个激光器模块的整个表面上产生并引导多个激光束 太阳能电池基板以及适合于将载体传送通过激光束的输出区域的传送器。

公开(公告)号：WO2010042577A2

公开(公告)日：2010-04-15

申请号：PCT/US2009/059782

申请日：2009-10-07

Applicant: APPLIED MATERIALS, INC. ,  PORTHOUSE, Keith ,  BORDEN, Peter, G. ,  HOLTAM, Tristan, R. ,  ZHOU, Lisong ,  LATCHFORD, Ian, Scott ,  AQUI, Derek ,  SHAH, Vinay

Inventor： PORTHOUSE, Keith ,  BORDEN, Peter, G. ,  HOLTAM, Tristan, R. ,  ZHOU, Lisong ,  LATCHFORD, Ian, Scott ,  AQUI, Derek ,  SHAH, Vinay

IPC: H01L31/042 ,  H01L21/677

CPC classification number: H01L21/67236 ,  H01L21/67069 ,  H01L21/67167 ,  H01L21/67201 ,  H01L21/67213 ,  H01L31/1876 ,  Y02E10/50 ,  Y02P70/521

Abstract: The present invention generally provides a batch substrate processing system, or cluster tool, for in-situ processing of a film stack used to form regions of a solar cell device. In one configuration, the film stack formed on each of the substrates in the batch contains one or more silicon-containing layers and one or more metal layers that are deposited and further processed within the various chambers contained in the substrate processing system. In one embodiment, a batch of solar cell substrates is simultaneously transferred in a vacuum or inert environment to prevent contamination from affecting the solar cell formation process.

Abstract translation: 本发明通常提供用于原位处理用于形成太阳能电池装置区域的薄膜叠层的批量基板处理系统或集群工具。 在一种构造中，在批次中形成在每个基板上的薄膜叠层包含一个或多个含硅层和一个或多个金属层，其在包含在基板处理系统中的各个室内被沉积和进一步处理。 在一个实施例中，一批太阳能电池基板在真空或惰性环境中同时转移，以防止污染影响太阳能电池的形成过程。