公开(公告)号：WO2008079349A9

公开(公告)日：2008-10-16

申请号：PCT/US2007026193

申请日：2007-12-21

Applicant: VEECO METROLOGY INC ,  BAO TIANMING ,  LIU HAO-CHIH ,  GREGORY DAHLEN A ,  JAIN ROHIT

Inventor： BAO TIANMING ,  LIU HAO-CHIH ,  GREGORY DAHLEN A ,  JAIN ROHIT

IPC: G01B21/30 ,  G01Q30/06 ,  G01Q40/00 ,  H01J37/28

CPC classification number: G01Q40/00 ,  G01Q30/06 ,  Y10S977/878 ,  Y10S977/881

Abstract: A scanning probe microscope's probe tip dimensions as they exist or existed for a certain data or measurement are inferred based on probe activity taking place since a probe characterization procedure was performed. The inferred probe tip dimensions can be used to correct nanoscale measurements taken by the probe to account for changes in the probe's geometry such as wear.

Abstract translation: 扫描探针显微镜的探针尖端尺寸，因为它们存在或存在以用于某一数据或测量，所以基于探针活动发生，因为执行了探针表征过程。 推断的探针尖端尺寸可用于校正探针所采取的纳米尺度测量，以考虑探针几何形状（例如磨损）的变化。

公开(公告)号：WO2008079349A2

公开(公告)日：2008-07-03

申请号：PCT/US2007/026193

申请日：2007-12-21

Applicant: VEECO METROLOGY INC. ,  BAO, Tianming ,  LIU, Hao-chih ,  GREGORY, Dahlen, A. ,  JAIN, Rohit

Inventor： BAO, Tianming ,  LIU, Hao-chih ,  GREGORY, Dahlen, A. ,  JAIN, Rohit

IPC: G01Q30/06 ,  G01Q40/00

CPC classification number: G01Q40/00 ,  G01Q30/06 ,  Y10S977/878 ,  Y10S977/881

Abstract: A scanning probe microscope's probe tip dimensions as they exist or existed for a certain data or measurement are inferred based on probe activity taking place since a probe characterization procedure was performed. The inferred probe tip dimensions can be used to correct nanoscale measurements taken by the probe to account for changes in the probe's geometry such as wear.

Abstract translation: 扫描探针显微镜的探针尖端尺寸在存在或存在用于特定数据或测量时，基于探针活动发生，由于进行了探针表征过程，所以推断出扫描探针显微镜的探针尖端尺寸。 推断出的探针尖端尺寸可以用于校正由探针采取的纳米尺度测量，以考虑探针几何形状的变化，例如磨损。

公开(公告)号：WO2008079349A3

公开(公告)日：2008-11-27

申请号：PCT/US2007026193

申请日：2007-12-21

Applicant: VEECO METROLOGY INC ,  BAO TIANMING ,  LIU HAO-CHIH ,  GREGORY DAHLEN A ,  JAIN ROHIT

Inventor： BAO TIANMING ,  LIU HAO-CHIH ,  GREGORY DAHLEN A ,  JAIN ROHIT

IPC: G01B21/30 ,  G01Q30/06 ,  G01Q40/00 ,  H01J37/28

CPC classification number: G01Q40/00 ,  G01Q30/06 ,  Y10S977/878 ,  Y10S977/881

Abstract: A scanning probe microscope's probe tip dimensions as they exist or existed for a certain data or measurement are inferred based on probe activity taking place since a probe characterization procedure was performed. The inferred probe tip dimensions can be used to correct nanoscale measurements taken by the probe to account for changes in the probe's geometry such as wear.

Abstract translation: 扫描探针显微镜的探针尖端尺寸，因为存在或存在某些数据或测量是基于探针活性发生，因为执行探针表征程序。 推测的探头尖端尺寸可用于校正探针所采取的纳米尺度测量，以考虑探头几何形状（如磨损）的变化。