公开(公告)号：WO2006138417A3

公开(公告)日：2007-03-01

申请号：PCT/US2006023237

申请日：2006-06-14

Applicant: GATAN INC ,  TREVOR COLIN GEOFFREY ,  DICKERSON FRANK E ,  BJORK MATT

Inventor： TREVOR COLIN GEOFFREY ,  DICKERSON FRANK E ,  BJORK MATT

IPC: H01J37/09

CPC classification number: H01J37/09 ,  H01J2237/0455 ,  H01J2237/057

Abstract: A device comprising an energy selecting slit assembly (10) is provided. The slit assembly comprising a slit assembly chassis (20), opposing slit mechanisms (30, 40), and an actuator assembly (50). One of the terminal ends of the actuator arm comprises a relatively fixed terminus (52a), while the other terminal end of the arm comprises a relatively mobile terminus (52b) coupled to the rotational slit mechanism (30) via a mechanical coupling (60) configured to translate movement of the mobile terminus into rotational of the rotational slit mechanism. In one embodiment of the present invention, the slit assembly chassis defines a plurality of fixturing datums (22, 24) configured to establish alignment of respective aperture-defining edges (35, 45) of the opposing slit mechanisms along orthogonal X, Y, and Z axes defined by the chassis. Additional embodiments are disclosed.

Abstract translation: 提供了一种包括能量选择狭缝组件（10）的装置。 狭缝组件包括狭缝组件底盘（20），相对的狭缝机构（30,40）和致动器组件（50）。 致动器臂的终端之一包括相对固定的末端（52a），而臂的另一个末端包括通过机械联接（60）联接到旋转狭缝机构（30）的相对移动的终端（52b） 被配置为将移动终端的运动转换成旋转狭缝机构的旋转。 在本发明的一个实施例中，狭缝组合底架限定了多个固定基准（22,24），其被构造成沿着正交的X，Y和X轴线对，建立相对的狭缝机构的相应的孔限定边缘（35,45）的对准 Z轴由机箱定义。 公开了另外的实施例。

公开(公告)号：WO2006138417A2

公开(公告)日：2006-12-28

申请号：PCT/US2006/023237

申请日：2006-06-14

Applicant: GATAN, INC. ,  TREVOR, Colin, Geoffrey ,  DICKERSON, Frank, E. ,  BJORK, Matt

Inventor： TREVOR, Colin, Geoffrey ,  DICKERSON, Frank, E. ,  BJORK, Matt

CPC classification number: H01J37/09 ,  H01J2237/0455 ,  H01J2237/057

Abstract: A device comprising an energy selecting slit assembly is provided. The slit assembly comprising a slit assembly chassis, opposing slit mechanisms, and an actuator assembly. One of the terminal ends of the actuator arm comprises a relatively fixed terminus, while the other terminal end of the arm comprises a relatively mobile terminus coupled to the rotational slit mechanism via a mechanical coupling configured to translate movement of the mobile terminus into rotational of the rotational slit mechanism. In one embodiment of the present invention, the slit assembly chassis defines a plurality of fixturing datums configured to establish alignment of respective aperture-defining edges of the opposing slit mechanisms along orthogonal X, Y, and Z axes defined by the chassis. Additional embodiments are disclosed.

Abstract translation: 提供了一种包括能量选择缝组件的装置。 狭缝组件包括狭缝组合底盘，相对的狭缝机构和致动器组件。 致动器臂的终端中的一个包括相对固定的末端，而臂的另一个末端包括相对移动的终端，该终端通过机械耦合而耦合到旋转狭缝机构，该机械耦合被配置成将移动终端的运动转移到 旋转狭缝机构。 在本发明的一个实施例中，狭缝组合底架限定了多个夹具基准，其被配置为沿着由底盘限定的正交X，Y和Z轴建立相对的狭缝机构的相应的孔限定边缘的对准。 公开了另外的实施例。

公开(公告)号：WO2012029998A3

公开(公告)日：2012-03-08

申请号：PCT/JP2011/070669

申请日：2011-09-05

Applicant: NIKON CORPORATION ,  BINNARD Michael B. ,  COAKLEY Scott ,  POON Alex ,  TOTSU Masahiro ,  COON Derek ,  KHO Leonard ,  KESWANI Gaurav ,  COOPER Alexander ,  PHARAND Michel ,  BJORK Matt

Inventor： BINNARD Michael B. ,  COAKLEY Scott ,  POON Alex ,  TOTSU Masahiro ,  COON Derek ,  KHO Leonard ,  KESWANI Gaurav ,  COOPER Alexander ,  PHARAND Michel ,  BJORK Matt

IPC: H02K3/24

Abstract: Linear and planar motors, as exemplary electromagnetic actuators, are disclosed that have at least one actively cooled coil assembly. An exemplary assembly includes a coil having first and second main surfaces. Also included is a respective thermally conductive cooling plate in thermal contact with at least one main surface of the coil. A coolant passageway is defined in or on each cooling plate, and a liquid coolant passes through the coolant passageway. The coolant passageway has a primary pattern that is coextensive with at least part of the main surface of the coil. The primary pattern can include a secondary pattern producing coolant flow through the coolant passageway in a manner that reduces eddy-current losses in the cooling plate. The coolant passageway desirably includes. An exemplary secondary pattern is serpentine. An exemplary primary pattern is radial or has a radial aspect, such as an X-shaped pattern. The devices provide more effective cooling, with better reliability and ease of maintenance, and reduced eddy-current drag than conventional actuators.

公开(公告)号：WO2012029998A2

公开(公告)日：2012-03-08

申请号：PCT/JP2011070669

申请日：2011-09-05

Applicant: NIPPON KOGAKU KK ,  BINNARD MICHAEL B ,  COAKLEY SCOTT ,  POON ALEX ,  TOTSU MASAHIRO ,  COON DEREK ,  KHO LEONARD ,  KESWANI GAURAV ,  COOPER ALEXANDER ,  PHARAND MICHEL ,  BJORK MATT

Inventor： BINNARD MICHAEL B ,  COAKLEY SCOTT ,  POON ALEX ,  TOTSU MASAHIRO ,  COON DEREK ,  KHO LEONARD ,  KESWANI GAURAV ,  COOPER ALEXANDER ,  PHARAND MICHEL ,  BJORK MATT

IPC: H02K3/24

CPC classification number: H02K9/22 ,  G03F7/70758 ,  G03F7/70875 ,  H02K9/19 ,  H02K41/031 ,  H02K2201/18

Abstract: Linear and planar motors, as exemplary electromagnetic actuators, are disclosed that have at least one actively cooled coil assembly. An exemplary assembly includes a coil having first and second main surfaces. Also included is a respective thermally conductive cooling plate in thermal contact with at least one main surface of the coil. A coolant passageway is defined in or on each cooling plate, and a liquid coolant passes through the coolant passageway. The coolant passageway has a primary pattern that is coextensive with at least part of the main surface of the coil. The primary pattern can include a secondary pattern producing coolant flow through the coolant passageway in a manner that reduces eddy-current losses in the cooling plate. The coolant passageway desirably includes. An exemplary secondary pattern is serpentine. An exemplary primary pattern is radial or has a radial aspect, such as an X-shaped pattern. The devices provide more effective cooling, with better reliability and ease of maintenance, and reduced eddy-current drag than conventional actuators.

Abstract translation: 作为示例性电磁致动器，公开了线性和平面电机，其具有至少一个主动冷却的线圈组件。 示例性组件包括具有第一和第二主表面的线圈。 还包括与线圈的至少一个主表面热接触的相应导热冷却板。 冷却剂通路限定在每个冷却板中或上，并且液体冷却剂穿过冷却剂通路。 冷却剂通道具有与线圈的主表面的至少一部分共同延伸的主要图案。 主要模式可以包括次要模式，以减少冷却板中的涡流损失的方式产生通过冷却剂通道的冷却剂流。 冷却剂通道理想地包括。 示例性的次级模式是蛇形。 示例性主要图案是径向或具有径向方面，诸如X形图案。 该设备提供更有效的冷却，具有更好的可靠性和易于维护，并且比传统执行器减少了涡流阻力。