公开(公告)号：WO2014210257A1

公开(公告)日：2014-12-31

申请号：PCT/US2014/044249

申请日：2014-06-26

Applicant: BEIJING SEVENSTAR ELECTRONICS CO. LTD. ,  MACKEDANZ, Bruce ,  HENRY, Sally-Ann ,  BURKMAN, Don C. ,  PETERSON, Charlie A. ,  LEY, Cary M.

Inventor： MACKEDANZ, Bruce ,  HENRY, Sally-Ann ,  BURKMAN, Don C. ,  PETERSON, Charlie A. ,  LEY, Cary M.

IPC: H01L21/02

CPC classification number: H01L21/68728 ,  H01L21/02057 ,  H01L21/30604 ,  H01L21/67023 ,  H01L21/6719

Abstract: A processing chamber includes a base, a cover, and grippers. The base includes a body, a mating surface, an inner zone cavity extending into the body, a divider substantially surrounding the inner zone cavity, and an outer zone cavity extending into the body and substantially surrounding the divider. The cover includes a mating surface that contacts the body mating surface when the processing chamber is closed. The grippers hold the wafer in the inner zone cavity when the processing chamber is closed.

Abstract translation: 处理室包括基座，盖子和夹具。 基座包括主体，配合表面，延伸到主体内部的内部区域空腔，基本上围绕内部区域空腔的分隔件以及延伸进入主体并基本上围绕分隔件的外部区域空腔。 盖子包括当处理室关闭时接触身体配合表面的配合表面。 当处理室关闭时，夹持器将晶片保持在内部区域空腔中。