公开(公告)号：WO2007103944A3

公开(公告)日：2007-11-22

申请号：PCT/US2007063423

申请日：2007-03-06

Applicant: CDM OPTICS INC ,  DOWSKI EDWARD R ,  TACHIHARA SATORU ,  CORMACK ROBERT H

Inventor： DOWSKI EDWARD R ,  TACHIHARA SATORU ,  CORMACK ROBERT H

IPC: G02B13/00 ,  G02B15/00 ,  G02B15/04 ,  G02B27/00 ,  G02B27/46

CPC classification number: G02B27/0025 ,  G02B13/12 ,  G02B15/04 ,  G02B15/14 ,  G02B27/46 ,  G02B27/52

Abstract: Zoom lens systems and methods for imaging incoming rays over a range of ray angles are disclosed. The incoming rays are characterized by at least phase. The zoom lens system includes an optical axis and is characterized by a plurality of modulation transfer functions (MTFs) corresponding at least to the range of ray angles. The zoom lens system includes an optical group disposed along the optical axis, including at least one variable optical element that has a variable focal length selectable between at least two distinct focal length values. The optical group also includes a wavefront coding element. The wavefront coding element alters at least the phase of the incoming rays, such that the plurality of MTFs corresponding to the range of ray angles, for each one of the two distinct focal length values, are less sensitive to misfocus-like aberrations than a corresponding system without the wavefront coding element.

Abstract translation: 公开了变焦透镜系统和用于在一定范围的光线角度下成像入射光线的方法。 入射光线至少具有相位特征。 变焦透镜系统包括光轴并且由多个至少对应于光线角度范围的调制传递函数（MTF）表征。 变焦透镜系统包括沿着光轴设置的光学组，其包括至少一个可变光学元件，该可变光学元件具有可在至少两个不同焦距值之间选择的可变焦距。 光学组还包括波前编码元件。 波前编码元件至少改变入射光线的相位，使得与两个不同焦距值中的每一个的光线角度范围相对应的多个MTF对类似散焦的像差的敏感性小于对应 系统没有波前编码元件。

公开(公告)号：WO2007008766A1

公开(公告)日：2007-01-18

申请号：PCT/US2006/026690

申请日：2006-07-10

Applicant: CDM OPTICS, INC. ,  CORMACK, Robert, H. ,  DOWSKI, Edward, Raymond, Jr. ,  SILVEIRA, Paulo, E., X.

Inventor： CORMACK, Robert, H. ,  DOWSKI, Edward, Raymond, Jr. ,  SILVEIRA, Paulo, E., X.

IPC: G02B3/00 ,  H01L31/0232 ,  H01L27/146 ,  H04N5/225

CPC classification number: H04N5/2254 ,  G02B3/0056 ,  H01L27/14627

Abstract: In a detector system for receiving incoming electromagnetic radiation having a range of chief ray angles (CRAs) that is limited by a stop of the imaging optics, an improvement includes a corrective element that cooperates with imaging optics to ensure that chief rays over the range of CRAs fall within a cone of acceptance angles of the detector. The corrective element may be a tilted lenslet, a diffractive element, a refractive element, a discretized refractive element or a subwavelength structure. A detector system collects a range of chief rays from imaging optics. The system includes an array of detectors, each having a cone of acceptance angles, and a corrective element having one of: an array of lenslets including at least one tilted lenslet; a diffractive element; a refractive element; a discretized refractive element; and subwavelength structures. The corrective element redirects each chief ray to within the cone of acceptance angles.

Abstract translation: 在用于接收具有由成像光学器件的停止限制的主射线角度（CRA）的范围的入射电磁辐射的检测器系统中，改进包括与成像光学器件配合的校正元件，以确保在 CRAs落在检测器的接受角的锥度内。 校正元件可以是倾斜小透镜，衍射元件，折射元件，离散折射元件或亚波长结构。 检测器系统从成像光学器件收集一系列主要射线。 该系统包括一个检测器阵列，每个检测器具有一个锥形的接受角度，以及一个校正元件，其具有以下之一：包括至少一个倾斜小透镜的小透镜阵列; 衍射元件; 折射元件 离散折射元件; 和亚波长结构。 校正元件将每个主射线重定向在接受角度的锥度内。

公开(公告)号：WO02052331A2

公开(公告)日：2002-07-04

申请号：PCT/US0144159

申请日：2001-11-14

Applicant: CDM OPTICS INC

Inventor： DOWSKI EDWARD RAYMOND JR

IPC: A61B3/10 ,  G02B5/00 ,  G02B27/00 ,  G02B27/46 ,  G02B27/44 ,  G02B21/00

CPC classification number: G02B27/0025 ,  G02B5/00 ,  G02B27/0012 ,  G02B27/46

Abstract: The present invention provides improved Wavefront Coding imaging apparatus (100, 800, 1100) and methods composed of optics (102, 802, 1102), wavefront coding (104, 806, 1110), detection (106), and processing (112, 810, 1112) of the detected image. The optics are constructed and arranged to have the characteristic that the transverse ray intercept curves form substantially straight, sloped lines. The wavefront coding corrects for known or unknown amounts of "misfocus-like" aberrations by altering the optical transfer function of the imaging apparatus in such a way that the altered optical transfer function is substantially insensitive to aberrations. Post processing then removes the effect of the coding, except for the invariance with regard to aberrations, producing clear images.

Abstract translation: 本发明提供了改进的波前编码成像设备（100,800,10000）以及由光学器件（102,802,1102），波前编码（104,806,1110），检测（106）和处理（112,810）组成的方法 ，1112）。 光学构造和布置成具有横向射线截距曲线形成基本上直的，倾斜的线的特征。 波前编码通过改变成像装置的光学传递函数以改变的光学传递函数对像差基本上不敏感来校正已知或未知量的“失焦”像差。 后处理然后除去编码的影响，除了关于像差的不变性，产生清晰的图像。

公开(公告)号：WO2009097552A1

公开(公告)日：2009-08-06

申请号：PCT/US2009/032683

申请日：2009-01-30

Applicant: OMNIVISION CDM OPTICS, INC. ,  DAGHER, Joseph, C. ,  ASHOK, Amit ,  TREMBLAY, David ,  KUBALA, Kenneth, S.

Inventor： DAGHER, Joseph, C. ,  ASHOK, Amit ,  TREMBLAY, David ,  KUBALA, Kenneth, S.

IPC: G06T5/00 ,  H04N5/232 ,  H04N5/262

CPC classification number: G06T5/50 ,  G06T5/004 ,  G06T2207/10148 ,  G06T2207/20221

Abstract: Systems and methods for image data fusion include providing first and second sets of image data corresponding to an imaged first and second scene respectively. The scenes at least partially overlap in an overlap region, defining a first collection of overlap image data as part of the first set of image data, and a second collection of overlap image data as part of the second set of image data. The second collection of overlap image data is represented as a plurality of image data subsets such that each of the subsets is based on at least one characteristic of the second collection, and each subset spans the overlap region. A fused set of image data is produced by an image processor, by modifying the first collection of overlap image data based on at least a selected one of, but less than all of, the image data subsets.

Abstract translation: 用于图像数据融合的系统和方法包括分别提供与成像的第一和第二场景对应的第一和第二组图像数据。 场景在重叠区域中至少部分地重叠，定义作为第一组图像数据的一部分的重叠图像数据的第一集合，以及作为第二组图像数据的一部分的重叠图像数据的第二集合。 重叠图像数据的第二集合被表示为多个图像数据子集，使得每个子集基于第二集合的至少一个特征，并且每个子集跨越重叠区域。 通过图像处理器产生融合的一组图像数据，通过基于图像数据子集中的至少一个但是小于所有图像数据子集来修改重叠图像数据的第一集合。

公开(公告)号：WO2009092000A2

公开(公告)日：2009-07-23

申请号：PCT/US2009/031283

申请日：2009-01-16

Applicant: OMNIVISION CDM OPTICS, INC. ,  LINNEN, Christopher, J. ,  FAN, Regis, S.

Inventor： LINNEN, Christopher, J. ,  FAN, Regis, S.

IPC: G02B3/00 ,  G02B7/02 ,  G02B13/00 ,  G02B26/08

CPC classification number: G02B3/0018 ,  G02B13/0085 ,  G02B26/0825

Abstract: Membrane suspended optical elements include a structured substrate including a plurality of apertmes defined therein and an array of optical elements, each of the optical elements being suspended by membiane within one of the apertures.

Abstract translation: 膜悬浮光学元件包括结构化基底，该基底包括限定在其中的多个开口和光学元件阵列，每个光学元件通过膜片悬挂在其中一个开口内。

公开(公告)号：WO2007103944A2

公开(公告)日：2007-09-13

申请号：PCT/US2007/063423

申请日：2007-03-06

Applicant: CDM OPTICS, INC. ,  DOWSKI, Edward, R. ,  TACHIHARA, Satoru ,  CORMACK, Robert, H.

Inventor： DOWSKI, Edward, R. ,  TACHIHARA, Satoru ,  CORMACK, Robert, H.

IPC: G02B13/00 ,  G02B15/00 ,  G02B15/04 ,  G02B27/00 ,  G02B27/46

CPC classification number: G02B27/0025 ,  G02B13/12 ,  G02B15/04 ,  G02B15/14 ,  G02B27/46 ,  G02B27/52

Abstract: Zoom lens systems and methods for imaging incoming rays over a range of ray angles are disclosed. The incoming rays are characterized by at least phase. The zoom lens system includes an optical axis and is characterized by a plurality of modulation transfer functions (MTFs) corresponding at least to the range of ray angles. The zoom lens system includes an optical group disposed along the optical axis, including at least one variable optical element that has a variable focal length selectable between at least two distinct focal length values. The optical group also includes a wavefront coding element. The wavefront coding element alters at least the phase of the incoming rays, such that the plurality of MTFs corresponding to the range of ray angles, for each one of the two distinct focal length values, are less sensitive to misfocus-like aberrations than a corresponding system without the wavefront coding element.

Abstract translation: 公开了用于在射线角度范围内成像入射光线的变焦透镜系统和方法。 入射光线的特征在于至少是相位。 变焦透镜系统包括光轴，其特征在于至少对应于射线角度范围的多个调制传递函数（MTF）。 变焦透镜系统包括沿着光轴设置的光学组，包括至少一个可变光学元件，该可变光学元件在至少两个不同焦距值之间可选择可变焦距。 光学组还包括波前编码元件。 波前编码元件至少改变入射光线的相位，使得对应于两个不同焦距值中的每个不同焦距值的光线角度范围的多个MTF对于与对应的焦点相似的像差不太敏感 系统没有波前编码元素。

公开(公告)号：WO2006001785A1

公开(公告)日：2006-01-05

申请号：PCT/US2004/017508

申请日：2004-06-01

Applicant: CDM OPTICS, INC. ,  DOWSKI, Edward, Raymond, Jr. ,  JOHNSON, Gregory, E. ,  KUBALA, Kenneth, Scott ,  WADE, Thomas, Cathey, Jr.

Inventor： DOWSKI, Edward, Raymond, Jr. ,  JOHNSON, Gregory, E. ,  KUBALA, Kenneth, Scott ,  WADE, Thomas, Cathey, Jr.

IPC: G21G5/00

CPC classification number: G03F7/705 ,  G02B27/0025 ,  G03F1/36 ,  G03F7/70125 ,  G03F7/70308

Abstract: An optical lithography system that has extended depth of focus exposes a photoresist coating on a wafer, and includes an illumination sub-system, a reticle, and an imaging lens that has a pupil plane function to form an aerial image of the reticle proximate to the photoresist. The pupil plane function provides the extended depth of focus such that the system may be manufactured or used with relaxed tolerance, reduced cost and/or increased throughput. The system may be used to form precise vias within integrated circuits even in the presence of misfocus or misalignment.

Abstract translation: 具有扩展焦点深度的光学光刻系统将光致抗蚀剂涂层暴露在晶片上，并且包括具有瞳孔平面功能的照明子系统，掩模版和成像透镜，以形成靠近该光刻胶的掩模版的空间图像 光致抗蚀剂。 瞳孔平面功能提供了扩展的焦点深度，使得可以以松弛的容忍度，降低的成本和/或增加的生产量来制造或使用该系统。 即使在存在失焦或未对准的情况下，该系统也可用于在集成电路内形成精确的通孔。

公开(公告)号：WO2005054927A3

公开(公告)日：2005-10-13

申请号：PCT/US2004040218

申请日：2004-12-01

Applicant: CDM OPTICS INC ,  DOWSKI EDWARD RAYMOND JR ,  JOHNSON GREGORY E ,  KUBELA KENNETH SCOTT ,  MACON KENNETH ASHLEY ,  RAUKER GORAN M

Inventor： DOWSKI EDWARD RAYMOND JR ,  JOHNSON GREGORY E ,  KUBELA KENNETH SCOTT ,  MACON KENNETH ASHLEY ,  RAUKER GORAN M

IPC: G02B27/00 ,  G06G7/48 ,  H04N5/225

CPC classification number: G02B27/0025 ,  G02B27/0012

Abstract: A system, method and software product to optimize optical and/or digital system designs. An optical model of the optical system design is generated. A digital model of the digital system design is generated. Simulated output of the optical and digital models is analyzed to produce a score. The score is processed to determine whether the simulated output achieves one or more goals. One or more properties of at least one of the optical model and the digital model is modified if the goals are not achieved. The analyzing, processing and modifying is repeated until the goals are achieved, and an optimized optical system design and optimized digital system design are generated from the optical and digital models.

Abstract translation: 一种用于优化光学和/或数字系统设计的系统，方法和软件产品。 生成光学系统设计的光学模型。 产生数字系统设计的数字模型。 对光学和数字模型的模拟输出进行分析，得出分数。 处理得分以确定模拟输出是否达到一个或多个目标。 如果没有实现目标，则修改光学模型和数字模型中的至少一个的一个或多个属性。 重复分析，处理和修改，直到实现目标，并从光学和数字模型生成优化的光学系统设计和优化的数字系统设计。

公开(公告)号：WO03009041A2

公开(公告)日：2003-01-30

申请号：PCT/US0209705

申请日：2002-03-28

Applicant: CDM OPTICS INC

Inventor： DOWSKI EDWARD RAYMOND JR ,  PRISCHEPA INGA

IPC: G02B15/00 ,  G02B27/00

CPC classification number: G02B27/0025 ,  G02B15/00

Abstract: A simple and inexpensive wide-angle zoom lens (305, 405) with as few as two plastic elements codes the wavefront that is produced by the imaging system such that the imaging system is invariant to aberrations that are related to misfocus. Signal processing (310, 410) is then used to decode the wavefront to form the final image. A first type of zoom lens configuration uses as few as two lens elements (302, 304). In these configurations, the image processing is modified to take into account the changing point spread function (PSF) of the system (307). A second type of zoom lens configuration that uses more than two lenses requires no modification of the processing.

Abstract translation: 具有少至两个塑料元件的简单且便宜的广角变焦透镜（305,405）编码由成像系统产生的波前，使得成像系统对与失焦相关的像差不变。 然后使用信号处理（310,410）来解码波阵面以形成最终图像。 第一类型的变焦镜头配置使用少至两个透镜元件（302,304）。 在这些配置中，修改图像处理以考虑系统的改变点扩散函数（PSF）（307）。 使用两个以上镜头的第二种类型的变焦镜头配置不需要修改处理。

公开(公告)号：WO02057832A2

公开(公告)日：2002-07-25

申请号：PCT/US0201095

申请日：2002-01-15

Applicant: CDM OPTICS INC

Inventor： DOWSKI EDWARD RAYMOND JR

IPC: G02B27/00 ,  G02B27/50 ,  G02B27/58

CPC classification number: G02B27/0025 ,  G02B27/50

Abstract: The present invention provides extended depth of field or focus to conventional Amplitude Contrast imaging systems (100). This is accomplished by including a Wavefront Coding element (422) in the system to apply phase variations to the wavefront transmitted by the Phase Object (408) being imaged. The phase variations induced by the Wavefront Coding mask code the wavefront and cause the optical transfer function to remain essentially constant within some range away from the in-focus position. This provides a coded image (418) at the detector (420). Post processing (424) decodes this coded image, resulting in an in-focus image over an increased depth of field.

Abstract translation: 本发明将扩展的景深或焦点提供给传统的幅度对比度成像系统（100）。 这通过在系统中包括波前编码元件（422）来实现，以将相位变化应用于被成像的相位对象（408）发送的波前。 由波前编码掩模引起的相位变化对波前进行编码，并使光学传递函数在远离对焦位置的某个范围内保持基本恒定。 这在检测器（420）处提供编码图像（418）。 后处理（424）解码该编码图像，导致在增加的景深上的对焦图像。