公开(公告)号：WO2021211345A1

公开(公告)日：2021-10-21

申请号：PCT/US2021/026274

申请日：2021-04-07

Applicant: CHIU, Kin-Chung Ray

Inventor： CHIU, Kin-Chung Ray

IPC: F04D17/16 ,  F04D19/04 ,  F01D1/34 ,  F01D1/36 ,  F04D17/161 ,  F04D17/168 ,  F04D21/00 ,  F05B2240/20 ,  F05B2260/60 ,  F05D2240/20

Abstract: A vacuum pump generally comprises a low pressure portion and a high pressure portion separated by a gas impermeable partition. Gas molecules exit the low pressure portion through an opening in the partition and passively impinge on a featureless rotatable surface in the high pressure portion. A drive rotates the rotatable surface with tangential velocity in the supersonic range at multiple times the most probable velocity of the impinging gas molecules. Impinging gas molecules are ejected outwardly from the periphery of the rotatable surface generating a substantial net outward flow of gas and reducing the pressure in the low pressure portion. The vacuum pump is effective to reduce the pressure in the low pressure portion to a target minimum pressure without using seals to prevent gas molecules from leaking back to the low pressure portion and without using blades or vanes to actively impact the gas molecules.

公开(公告)号：WO0182329A3

公开(公告)日：2002-02-07

申请号：PCT/US0109497

申请日：2001-03-23

Applicant: ELECTROCHEM TECH CORP ,  CHIU KIN CHUNG RAY

Inventor： CHIU KIN-CHUNG RAY

IPC: H05H1/24 ,  B01J19/08 ,  H01J37/32 ,  H01L21/3065

CPC classification number: H01J37/32541 ,  B01J19/088 ,  B01J2219/0813 ,  B01J2219/083 ,  B01J2219/0833 ,  B01J2219/0835 ,  B01J2219/0841 ,  B01J2219/0847 ,  B01J2219/0869 ,  B01J2219/0898 ,  H01J37/32009 ,  H01J37/32532 ,  H01J37/32568 ,  H05H1/46

Abstract: A compact capacitively coupled electrode structure for use in a gas plasma reactor/generator is disclosed. The electrode structure comprises a parallel plate type anode and cathode spaced to define a gas flow path or volume therebetween. A plurality of electrically conductive fin elements are interposed in the space between the anode and cathode. The fin elements substantially increase the ratio of electrode surface area to volume, and subdivide the gas flow path or volume, thereby substantially increasing the efficiency of plasma gas processing that is possible over a broad range of operating parameters, without substantially increasing the spacing between the anode and cathode. Static or closed operation is also disclosed. Also disclosed is a multi-anode/multi-cathode electrode assembly embodying the basic electrode structure and a highly efficient and compact gas plasma reactor/generator employing the assembly.

Abstract translation: 公开了一种用于气体等离子体反应器/发生器的紧凑的电容耦合电极结构。 电极结构包括平行板型阳极和阴极间隔开以限定其间的气体流动路径或体积。 多个导电鳍元件插入在阳极和阴极之间的空间中。 翅片元件大大增加了电极表面积与体积的比率，并且细分了气体流动路径或体积，从而基本上提高了在宽范围的操作参数中可能的等离子体气体处理的效率，而基本上不增加 阳极和阴极。 还公开了静态或闭合操作。 还公开了一种体现基本电极结构的多阳极/多阴极电极组件和采用该组件的高效紧凑的气体等离子体反应器/发生器。