公开(公告)号：WO2009029189A2

公开(公告)日：2009-03-05

申请号：PCT/US2008/009895

申请日：2008-08-20

Applicant: CORNING INCORPORATED ,  COBB, Joshua, M. ,  DEWA, Paul, G.

Inventor： COBB, Joshua, M. ,  DEWA, Paul, G.

IPC: H01S3/00 ,  G03F7/20 ,  B23K26/06

CPC classification number: G03F7/70583 ,  G02F1/01 ,  G03F7/70025 ,  G03F7/70041 ,  H01S3/005 ,  H01S3/0057 ,  H01S3/0085

Abstract: A light pulse conditioning apparatus has at least first and second curved reflective surfaces that share a common focus and a light-redirecting element disposed between the first and second curved reflective surfaces to redirect at least a portion of an incident light beam toward the second curved reflective surface as a delayed beam portion. A beam-shifting compensating element is disposed between the first curved reflective surface and the light-redirecting element and in the path of the delayed beam portion, for shifting the optical path of the delayed beam portion as it returns toward the light-redirecting element.

Abstract translation: 光脉冲调节装置具有共享共同焦点的至少第一和第二弯曲反射表面和设置在第一和第二弯曲反射表面之间的光重定向元件，以将至少一部分入射光束朝向第二弯曲反射 表面作为延迟光束部分。 光束移动补偿元件设置在第一弯曲反射表面和光重定向元件之间以及延迟光束部分的路径中，用于当延迟光束部分朝向光重定向元件返回时移动延迟光束部分的光路。

公开(公告)号：WO2008150422A1

公开(公告)日：2008-12-11

申请号：PCT/US2008/006797

申请日：2008-05-29

Applicant: CORNING INCORPORATED ,  COBB, Joshua, M. ,  DEWA, Paul, G. ,  KREUZER, Justin, L.

Inventor： COBB, Joshua, M. ,  DEWA, Paul, G. ,  KREUZER, Justin, L.

IPC: G03F7/20

CPC classification number: G03F7/70041

Abstract: An apparatus for providing a modulated pulsed radiation beam (20) has a radiation source (16) for providing a pulsed radiation beam (10) at a constant pulse repetition frequency and a number of beam intensity modulators (18a-18e). A beam-deflecting element (12) in the path of the pulsed radiation beam and rotatable about an axis redirects the pulsed radiation beam cyclically towards each of the plurality of beam intensity modulators in turn. A beam-recombining element rotatable about the axis in synchronization with the beam-deflecting element combines modulated light, from each of the beam intensity modulators in order to form the modulated pulsed radiation beam at the constant pulse repetition frequency. At least one beam-pointing correction apparatus optically conjugates the beam-deflecting element and the beam recombining element at at least one rotational position about the axis.

Abstract translation: 用于提供调制的脉冲辐射束（20）的装置具有用于以恒定的脉冲重复频率和多个束强度调制器（18a-18e）提供脉冲辐射束（10）的辐射源（16）。 脉冲辐射束的路径中的光束偏转元件（12）可以绕轴线转动，依次将脉冲辐射束周期性地引向多个光束强度调制器中的每一个。 可以与光束偏转元件同步地围绕轴旋转的光束重组元件组合来自每个光束强度调制器的调制光，以便以恒定脉冲重复频率形成调制的脉冲辐射束。 至少一个光束指向校正装置将光束偏转元件和光束重组元件在围绕轴线的至少一个旋转位置处光学共轭。

公开(公告)号：WO2008106067A1

公开(公告)日：2008-09-04

申请号：PCT/US2008/002418

申请日：2008-02-25

Applicant: CORNING INCORPORATED ,  COBB, Joshua M

Inventor： COBB, Joshua M

IPC: G02B27/14 ,  H04N9/31 ,  G02B17/06

CPC classification number: G02B27/148 ,  H04N9/315

Abstract: An illumination apparatus has first and second optical condenser systems sharing a common aperture. The first optical condenser system has a first solid-state light source having a first spectral band and a first curved surface spaced apart from the first solid-state light source and treated to reflect the first spectral band along a first optical path to exit at the common aperture and to pass light outside the first spectral band. The second optical condenser system has a second solid-state light source having a second spectral band and a second curved surface disposed behind the first curved surface with respect to the first and second light sources and treated to reflect the second spectral band along a second optical path to exit at the common aperture.

Abstract translation: 照明装置具有共用公共孔径的第一和第二光学冷凝器系统。 第一光学冷凝器系统具有第一固态光源，其具有第一光谱带和与第一固态光源间隔开的第一弯曲表面，并被处理以沿着第一光路反射第一光谱带以在第 公共孔径并使第一光谱带外的光通过。 第二光学冷凝器系统具有第二固态光源，其具有第二光谱带和相对于第一和第二光源设置在第一弯曲表面后面的第二弯曲表面，并被处理以沿第二光学反射第二光谱带 在公共孔径处出口的路径。

公开(公告)号：WO2007078731A3

公开(公告)日：2007-08-30

申请号：PCT/US2006047407

申请日：2006-12-12

Applicant: CORNING INC ,  BRUNING JOHN H ,  COBB JOSHUA M ,  MICHALOSKI PAUL F

Inventor： BRUNING JOHN H ,  COBB JOSHUA M ,  MICHALOSKI PAUL F

IPC: H01L31/052

CPC classification number: H01L31/0549 ,  F24J2/06 ,  F24J2/12 ,  F24J2/18 ,  H01L31/0547 ,  Y02E10/44 ,  Y02E10/52

Abstract: An apparatus for obtaining radiant energy has first and second photovoltaic receivers. A primary curved reflective surface is disposed to reflect incident polychromatic radiation toward a first focal plane. A spectral separator is disposed between the first focal plane and the primary curved reflective surface. The spectral separator has a dichroic separating surface, convex with respect to the incident reflected polychromatic radiation and treated to reflect a first spectral band toward the first photovoltaic receiver and to transmit reflected polychromatic radiation outside the first spectral band. The spectral separator also has a curved separator reflective surface, convex with respect to the light transmitted through the dichroic separating surface and treated to reflect at least a portion of the light transmitted through the dichroic separating surface toward the second photovoltaic receiver.

Abstract translation: 用于获得辐射能的装置具有第一和第二光伏接收器。 设置初级弯曲反射表面以将入射的多色辐射朝向第一焦平面反射。 光谱分离器设置在第一焦平面和主弯曲反射表面之间。 光谱分离器具有二向色分离表面，相对于入射的反射多色辐射是凸的，并被处理以朝向第一光电接收器反射第一光谱带并且将第一光谱带外的反射多色辐射透射。 光谱分离器还具有弯曲的分隔件反射表面，相对于透射通过二向色分离表面的光是凸的，并被处理以将透射通过二向色分离表面的光的至少一部分反射朝向第二光电接收器。

公开(公告)号：WO2008088397A3

公开(公告)日：2008-07-24

申请号：PCT/US2007/018869

申请日：2007-08-28

Applicant: CORNING INCORPORATED ,  COBB, Joshua, M ,  DEWA, Paul, G

Inventor： COBB, Joshua, M ,  DEWA, Paul, G

IPC: G02B26/08

Abstract: An apparatus for providing a pulsed radiation beam has a radiation source providing a pulsed radiation beam at a constant pulse repetition frequency. A beam deflector in the path of the pulsed radiation beam is actuable to redirect the pulsed radiation beam cyclically towards each of a plurality of beam intensity modulators in turn. A beam recombiner combines modulated light from each of the plurality of beam intensity modulators in order to form the modulated pulsed radiation beam at the constant pulse repetition frequency.

公开(公告)号：WO2008088397A2

公开(公告)日：2008-07-24

申请号：PCT/US2007018869

申请日：2007-08-28

Applicant: CORNING INC ,  COBB JOSHUA M ,  DEWA PAUL G

Inventor： COBB JOSHUA M ,  DEWA PAUL G

IPC: G03B27/00 ,  G03B27/42 ,  G03B27/54

CPC classification number: G03B27/42 ,  G03F7/70041

Abstract: An apparatus for providing a pulsed radiation beam has a radiation source providing a pulsed radiation beam at a constant pulse repetition frequency. A beam deflector in the path of the pulsed radiation beam is actuable to redirect the pulsed radiation beam cyclically towards each of a plurality of beam intensity modulators in turn. A beam recombiner combines modulated light from each of the plurality of beam intensity modulators in order to form the modulated pulsed radiation beam at the constant pulse repetition frequency.

Abstract translation: 用于提供脉冲辐射束的装置具有以恒定脉冲重复频率提供脉冲辐射束的辐射源。 在脉冲辐射束的路径中的光束偏转器可被致动以依次将脉冲辐射束循环地重定向到多个光束强度调制器中的每一个。 光束重组器组合来自多个光束强度调制器中的每一个的调制光，以便以恒定脉冲重复频率形成调制的脉冲辐射束。

公开(公告)号：WO2007078731A2

公开(公告)日：2007-07-12

申请号：PCT/US2006/047407

申请日：2006-12-12

Applicant: CORNING INCORPORATED ,  BRUNING, John, H ,  COBB, Joshua, M ,  MICHALOSKI, Paul, F

Inventor： BRUNING, John, H ,  COBB, Joshua, M ,  MICHALOSKI, Paul, F

IPC: H01L31/052

CPC classification number: H01L31/0549 ,  F24S23/00 ,  F24S23/71 ,  F24S23/79 ,  H01L31/0547 ,  Y02E10/44 ,  Y02E10/52

Abstract: An apparatus for obtaining radiant energy has first and second photovoltaic receivers. A primary curved reflective surface is disposed to reflect incident polychromatic radiation toward a first focal plane. A spectral separator is disposed between the first focal plane and the primary curved reflective surface. The spectral separator has a dichroic separating surface, convex with respect to the incident reflected polychromatic radiation and treated to reflect a first spectral band toward the first photovoltaic receiver and to transmit reflected polychromatic radiation outside the first spectral band. The spectral separator also has a curved separator reflective surface, convex with respect to the light transmitted through the dichroic separating surface and treated to reflect at least a portion of the light transmitted through the dichroic separating surface toward the second photovoltaic receiver.

Abstract translation: 用于获得辐射能量的设备具有第一和第二光伏接收器。 主弯曲反射表面被设置为将入射多色辐射朝向第一焦平面反射。 光谱分离器设置在第一焦平面和主弯曲反射表面之间。 光谱分离器具有二向色分离表面，相对于入射反射多色辐射凸出并且被处理以朝着第一光伏接收器反射第一光谱带并且传输第一光谱带外的反射多色辐射。 光谱分离器还具有弯曲的分隔反射表面，其相对于透过二向色分离表面的光是凸起的，并被处理以将透过二向色分离表面的光的至少一部分反射向第二光伏接收器。

公开(公告)号：WO2013070485A1

公开(公告)日：2013-05-16

申请号：PCT/US2012/063007

申请日：2012-11-01

Applicant: CORNING INCORPORATED ,  COBB, Joshua M

Inventor： COBB, Joshua M

IPC: G01N21/64 ,  A61B5/00

CPC classification number: G01N21/645 ,  A61B5/0059 ,  A61B5/0068 ,  A61B5/0071 ,  A61B5/4504 ,  A61B5/4547 ,  G01N2021/6421

Abstract: A sensing apparatus for detecting light of first and second fluorescent wavelength bands has a light source to generate an excitation wavelength to a first collimator element. A dichroic multiplexer has a first coated surface oblique to the optical axis and treated to transmit the excitation wavelength and to reflect the second fluorescent wavelength band and a second coated surface treated to transmit the excitation wavelength and the second fluorescent wavelength band and to reflect the first fluorescent wavelength band. A focusing element focuses the excitation light toward a light guide and directs collimated light of the first and second fluorescent wavelength bands from the light guide to the dichroic multiplexer. A first detector element is in the path of reflected light of the first fluorescent wavelength band and a second detector element is in the path of reflected light of the second fluorescent wavelength band.

Abstract translation: 用于检测第一和第二荧光波长带的光的感测装置具有向第一准直器元件产生激发波长的光源。 二向色多路复用器具有与光轴倾斜的第一涂覆表面，并被处理以透射激发波长并反射第二荧光波长带，并且处理第二涂覆表面以透射激发波长和第二荧光波长带并反射第一荧光波长带 荧光波段。 聚焦元件将激发光聚焦到光导并将第一和第二荧光波长带的准直光从光导引导到二向色复用器。 第一检测元件位于第一荧光波长带的反射光的路径中，第二检测元件位于第二荧光波长带的反射光的路径中。

公开(公告)号：WO2009148547A3

公开(公告)日：2010-03-18

申请号：PCT/US2009003290

申请日：2009-05-29

Applicant: CORNING INC ,  COBB JOSHUA M ,  MICHALOSKI PAUL F

Inventor： COBB JOSHUA M ,  MICHALOSKI PAUL F

IPC: G03F7/20

CPC classification number: G03F7/70291 ,  G03F7/70091 ,  G03F7/70275

Abstract: An optical system for producing a pattern of focused spots, such as a maskless lithographic projection system, includes an illuminator (12), a pattern generator (14), and an imager (18). The illuminator (12) includes a light source (50) for generating a light beam, a homogenizer (60) for evenly dispersing light within the light beam, and a condenser (56) for coupling the light source to the homogenizer. The pattern generator (14) has individually addressable elements (16) illuminated by the light beam from the illuminator (12). The imager (18) images the addressable elements (16) of the pattern generator (14) onto corresponding focusing elements (26) for forming focused spots (34) that are conjugate to aperture stops in both the imager (18) and the illuminator (12). The illuminator (12) underfills the imager (18) aperture stop (46) for reducing the size of the focused spots. The condenser (56) underfills the illuminator aperture stop (44) for further controlling the size and shape of the focused spots.

Abstract translation: 用于产生聚焦点图案的光学系统，例如无掩模光刻投影系统，包括照明器（12），图案发生器（14）和成像器（18）。 照明器（12）包括用于产生光束的光源（50），用于在光束内均匀分散光的均质器（60），以及用于将光源耦合到均化器的冷凝器（56）。 图案发生器（14）具有由来自照明器（12）的光束照明的各自可寻址元件（16）。 成像器（18）将图案生成器（14）的可寻址元件（16）成像到相应的聚焦元件（26）上，用于形成与成像器（18）和照明器（20）中的孔径光阑共轭的聚焦点（34） 12）。 照明器（12）底部填充成像器（18）孔径光阑（46）以减小聚焦斑点的尺寸。 冷凝器（56）底部填充照明器孔径光阑（44），用于进一步控制聚焦斑点的尺寸和形状。

公开(公告)号：WO2008018986A3

公开(公告)日：2008-10-23

申请号：PCT/US2007016645

申请日：2007-07-24

Applicant: CORNING INC ,  BRUNING JOHN H ,  COBB JOSHUA M

Inventor： BRUNING JOHN H ,  COBB JOSHUA M

IPC: F24S23/00 ,  H01L25/00 ,  F24S23/79 ,  G02B5/08 ,  G02B26/08 ,  G02B27/00 ,  H01J3/14 ,  H01J5/16 ,  H01J40/14 ,  H01L31/00 ,  H01L31/042 ,  H02N6/00

CPC classification number: G02B19/0028 ,  F24J2/06 ,  F24J2/18 ,  G02B19/0042 ,  H01L31/0543 ,  H01L31/0547 ,  H01L31/0549 ,  Y02E10/52

Abstract: An apparatus for obtaining energy from a polychromatic radiant energy source has a light concentrator for concentrating and redirecting incident radiant energy, having an optical axis, and a spectral separator disposed along the optical axis, apart from the light concentrator and in the path of concentrated, redirected radiant energy. The spectral separator has a first planar surface treated to reflect a first spectral band of light toward a first focal region and to transmit a second spectral band and a second planar surface spaced apart from the first planar surface and oblique with respect to the first planar surface. The second planar surface is treated to reflect the second spectral band back through the first planar surface and toward a second focal region spaced apart from the first focal region. First and second light receivers are disposed nearest each respective focal region for receiving the first and second spectral bands.

Abstract translation: 用于从多色辐射能源获得能量的装置具有聚光器，用于将具有光轴的入射辐射能集中和重定向，并且沿着光轴设置的光谱分离器，远离光聚集器并且在集中的路径中， 重定向的辐射能量。 光谱分离器具有第一平面表面，被处理以朝向第一焦点区域反射光的第一光谱带，并且透射与第一平面表面间隔开的第二光谱带和第二平面，并且相对于第一平面倾斜 。 处理第二平坦表面以将第二光谱带反射穿过第一平面表面并朝向与第一焦点区域间隔开的第二焦点区域。 第一和第二光接收器被布置为最靠近各个聚焦区域以接收第一和第二光谱带。