公开(公告)号：WO2009029189A3

公开(公告)日：2009-07-02

申请号：PCT/US2008009895

申请日：2008-08-20

Applicant: CORNING INC ,  COBB JOSHUA M ,  DEWA PAUL G

Inventor： COBB JOSHUA M ,  DEWA PAUL G

IPC: H01S3/00 ,  B23K26/06 ,  G02B27/09 ,  G02B27/10 ,  G02F1/01 ,  G03F7/20 ,  H01S3/106 ,  H01S3/107 ,  H01S3/225

CPC classification number: G03F7/70583 ,  G02F1/01 ,  G03F7/70025 ,  G03F7/70041 ,  H01S3/005 ,  H01S3/0057 ,  H01S3/0085

Abstract: A light pulse conditioning.apparatus (30) has first and second curved reflective surfaces (12a, 12b) that share a common focus and a light-redirecting element (16) disposed between the first and second curved reflective surfaces to redirect a portion of an incident light beam (14) toward the second curved reflective surface (12b) as a delayed beam portion. A beam-shifting compensating element (24) is disposed between the first curved reflective surface (12a) and the light-redirecting element (16), for shifting the optical path of the delayed beam portion as it returns toward the light-redirecting element (16). Furthermore, the light conditioning apparatus (30) may have a measurement device (52) using a sensor (54) to detect the energy level of the light beam (14) from the pulset radiation source (38) and providing a signal to a controller (56) for a modulator element (34) of a modulator assembly (32). When the pulse power exceeds a value, the control loop (50) energizes the modulator element (34) to provide some level of attenuation.

Abstract translation: 光脉冲调节装置（30）具有共享共同焦点的第一和第二弯曲反射表面（12a，12b）和设置在第一和第二弯曲反射表面之间的光重定向元件（16），以重定向一部分 入射光束（14）作为延迟光束部分朝向第二弯曲反射表面（12b）。 光束移动补偿元件（24）设置在第一弯曲反射表面（12a）和光重定向元件（16）之间，用于当延迟光束部分的光路朝向光重定向元件 16）。 此外，光调节装置（30）可以具有使用传感器（54）的测量装置（52），以从脉冲辐射源（38）检测光束（14）的能级，并向控制器提供信号 （56）用于调制器组件（32）的调制器元件（34）。 当脉冲功率超过一个值时，控制回路（50）激励调制器元件（34）以提供一定程度的衰减。

公开(公告)号：WO2012030755A1

公开(公告)日：2012-03-08

申请号：PCT/US2011/049635

申请日：2011-08-30

Applicant: CORNING INCORPORATED ,  DEWA, Paul G ,  WIGGINS, Richard L.

Inventor： DEWA, Paul G ,  WIGGINS, Richard L.

IPC: G02B26/08 ,  G02B27/14

CPC classification number: G02B27/145 ,  G02B26/0833 ,  G02B27/1013

Abstract: A micro-electro-mechanical (MEMS) based surveillance system and a method for using the MEMS based surveillance system are described herein for imaging an object. In one example, the MEMS based surveillance system can record images of an object from four different wavelength regions including visible light, near- infrared light, infrared light, and far infrared light.

Abstract translation: 本文描述了基于微电机械（MEMS）的监视系统和使用基于MEMS的监视系统的方法来对物体进行成像。 在一个示例中，基于MEMS的监视系统可以记录来自四个不同波长区域的物体的图像，包括可见光，近红外光，红外光和远红外光。

公开(公告)号：WO2009029189A2

公开(公告)日：2009-03-05

申请号：PCT/US2008/009895

申请日：2008-08-20

Applicant: CORNING INCORPORATED ,  COBB, Joshua, M. ,  DEWA, Paul, G.

Inventor： COBB, Joshua, M. ,  DEWA, Paul, G.

IPC: H01S3/00 ,  G03F7/20 ,  B23K26/06

CPC classification number: G03F7/70583 ,  G02F1/01 ,  G03F7/70025 ,  G03F7/70041 ,  H01S3/005 ,  H01S3/0057 ,  H01S3/0085

Abstract: A light pulse conditioning apparatus has at least first and second curved reflective surfaces that share a common focus and a light-redirecting element disposed between the first and second curved reflective surfaces to redirect at least a portion of an incident light beam toward the second curved reflective surface as a delayed beam portion. A beam-shifting compensating element is disposed between the first curved reflective surface and the light-redirecting element and in the path of the delayed beam portion, for shifting the optical path of the delayed beam portion as it returns toward the light-redirecting element.

Abstract translation: 光脉冲调节装置具有共享共同焦点的至少第一和第二弯曲反射表面和设置在第一和第二弯曲反射表面之间的光重定向元件，以将至少一部分入射光束朝向第二弯曲反射 表面作为延迟光束部分。 光束移动补偿元件设置在第一弯曲反射表面和光重定向元件之间以及延迟光束部分的路径中，用于当延迟光束部分朝向光重定向元件返回时移动延迟光束部分的光路。

公开(公告)号：WO2008150422A1

公开(公告)日：2008-12-11

申请号：PCT/US2008/006797

申请日：2008-05-29

Applicant: CORNING INCORPORATED ,  COBB, Joshua, M. ,  DEWA, Paul, G. ,  KREUZER, Justin, L.

Inventor： COBB, Joshua, M. ,  DEWA, Paul, G. ,  KREUZER, Justin, L.

IPC: G03F7/20

CPC classification number: G03F7/70041

Abstract: An apparatus for providing a modulated pulsed radiation beam (20) has a radiation source (16) for providing a pulsed radiation beam (10) at a constant pulse repetition frequency and a number of beam intensity modulators (18a-18e). A beam-deflecting element (12) in the path of the pulsed radiation beam and rotatable about an axis redirects the pulsed radiation beam cyclically towards each of the plurality of beam intensity modulators in turn. A beam-recombining element rotatable about the axis in synchronization with the beam-deflecting element combines modulated light, from each of the beam intensity modulators in order to form the modulated pulsed radiation beam at the constant pulse repetition frequency. At least one beam-pointing correction apparatus optically conjugates the beam-deflecting element and the beam recombining element at at least one rotational position about the axis.

Abstract translation: 用于提供调制的脉冲辐射束（20）的装置具有用于以恒定的脉冲重复频率和多个束强度调制器（18a-18e）提供脉冲辐射束（10）的辐射源（16）。 脉冲辐射束的路径中的光束偏转元件（12）可以绕轴线转动，依次将脉冲辐射束周期性地引向多个光束强度调制器中的每一个。 可以与光束偏转元件同步地围绕轴旋转的光束重组元件组合来自每个光束强度调制器的调制光，以便以恒定脉冲重复频率形成调制的脉冲辐射束。 至少一个光束指向校正装置将光束偏转元件和光束重组元件在围绕轴线的至少一个旋转位置处光学共轭。

公开(公告)号：WO2006060592A3

公开(公告)日：2006-06-08

申请号：PCT/US2005/043501

申请日：2005-11-29

Applicant: CORNING INCORPORATED ,  SHUSTACK, Paul, J. ,  COYKENDALL, Kelsee, L. ,  DEWA, Paul, G. ,  SABIA, Robert ,  SAUER, David, C. ,  SONI, Kamal, K.

Inventor： SHUSTACK, Paul, J. ,  COYKENDALL, Kelsee, L. ,  DEWA, Paul, G. ,  SABIA, Robert ,  SAUER, David, C. ,  SONI, Kamal, K.

IPC: G02B1/10 ,  G02B1/12 ,  C09J149/00 ,  C09J109/00 ,  C09J121/00 ,  C09J119/00 ,  C09J113/00 ,  C09J107/00 ,  B32B27/00 ,  B32B27/04 ,  B32B27/16 ,  C08J3/28 ,  B32B25/00 ,  B32B25/04 ,  B32B25/08

Abstract: Disclosed are photo or electron beam curable polymerizable compositions, and preparation thereof and devices (101)containing such cured material. The composition contains completely or substantially completely hydrogenated hydrocarbon-based material completely free or substantially free of carbon-carbon double and triple bonds containing photo or electron beam curable terminal or pendant groups, low-outgassing photoinitiators, an optional viscosity adjustment component and an optional filler. The composition is visible light, UV or electron beam curable. It cures into a low-modulus, low outgassing polymer material. The composition can be used as an adhesive, sealant or lens potting material (103,107). It is ideal for use in lithographic tools and other optical devices involving deep or vacuum ultraviolet radiations, in particular, as lens potting materials (107,103) for 248 nm, 193 nm and 157 nm lithographic tools, as well as other optical devices involving using high fluence irradiation.

公开(公告)号：WO2008088397A3

公开(公告)日：2008-07-24

申请号：PCT/US2007/018869

申请日：2007-08-28

Applicant: CORNING INCORPORATED ,  COBB, Joshua, M ,  DEWA, Paul, G

Inventor： COBB, Joshua, M ,  DEWA, Paul, G

IPC: G02B26/08

Abstract: An apparatus for providing a pulsed radiation beam has a radiation source providing a pulsed radiation beam at a constant pulse repetition frequency. A beam deflector in the path of the pulsed radiation beam is actuable to redirect the pulsed radiation beam cyclically towards each of a plurality of beam intensity modulators in turn. A beam recombiner combines modulated light from each of the plurality of beam intensity modulators in order to form the modulated pulsed radiation beam at the constant pulse repetition frequency.

公开(公告)号：WO2008088397A2

公开(公告)日：2008-07-24

申请号：PCT/US2007018869

申请日：2007-08-28

Applicant: CORNING INC ,  COBB JOSHUA M ,  DEWA PAUL G

Inventor： COBB JOSHUA M ,  DEWA PAUL G

IPC: G03B27/00 ,  G03B27/42 ,  G03B27/54

CPC classification number: G03B27/42 ,  G03F7/70041

Abstract: An apparatus for providing a pulsed radiation beam has a radiation source providing a pulsed radiation beam at a constant pulse repetition frequency. A beam deflector in the path of the pulsed radiation beam is actuable to redirect the pulsed radiation beam cyclically towards each of a plurality of beam intensity modulators in turn. A beam recombiner combines modulated light from each of the plurality of beam intensity modulators in order to form the modulated pulsed radiation beam at the constant pulse repetition frequency.

Abstract translation: 用于提供脉冲辐射束的装置具有以恒定脉冲重复频率提供脉冲辐射束的辐射源。 在脉冲辐射束的路径中的光束偏转器可被致动以依次将脉冲辐射束循环地重定向到多个光束强度调制器中的每一个。 光束重组器组合来自多个光束强度调制器中的每一个的调制光，以便以恒定脉冲重复频率形成调制的脉冲辐射束。

公开(公告)号：WO2006060592A2

公开(公告)日：2006-06-08

申请号：PCT/US2005043501

申请日：2005-11-29

Applicant: CORNING INC ,  SHUSTACK PAUL J ,  COYKENDALL KELSEE L ,  DEWA PAUL G ,  SABIA ROBERT ,  SAUER DAVID C ,  SONI KAMAL K

Inventor： SHUSTACK PAUL J ,  COYKENDALL KELSEE L ,  DEWA PAUL G ,  SABIA ROBERT ,  SAUER DAVID C ,  SONI KAMAL K

IPC: H01L21/4763 ,  C08F255/02 ,  C08F279/02 ,  C08K3/00 ,  C08K5/00

CPC classification number: C08L15/00 ,  C08C19/02 ,  C08F255/00 ,  C08F255/02 ,  C08F279/02 ,  C08F290/06 ,  C08K3/013 ,  C08K5/0025 ,  C08L2666/02 ,  C09J4/06 ,  C09J123/02 ,  Y10T428/1059 ,  Y10T428/1082 ,  Y10T428/28 ,  Y10T428/2809 ,  Y10T428/2852 ,  Y10T428/287 ,  Y10T428/2878 ,  Y10T428/2883 ,  Y10T428/2891 ,  Y10T428/31855 ,  Y10T428/31938

Abstract: Disclosed are photo or electron beam curable polymerizable compositions, and preparation thereof and devices containing such cured material. The composition contains completely or substantially completely hydrogenated hydrocarbon-based material completely free or substantially free of carbon-carbon double and triple bonds containing photo or electron beam curable terminal or pendant groups, low-outgassing photoinitiators, an optional viscosity adjustment component and an optional filler. The composition is visible light, UV or electron beam curable. It cures into a low-modulus, low outgassing polymer material. The composition can be used as an adhesive, sealant or lens potting material. It is ideal for use in lithographic tools and other optical devices involving deep or vacuum ultraviolet radiations, in particular, as lens potting materials for 248 nm, 193 nm and 157 nm lithographic tools, as well as other optical devices involving using high fluence irradiation.

Abstract translation: 公开了光或可电子束固化的可聚合组合物及其制备方法和包含这种固化材料的装置。 该组合物包含完全或基本上完全氢化的烃基材料，其完全自由或基本上不含含有光或电子束可固化末端或侧基的碳 - 碳双键和三键，低脱气光引发剂，任选的粘度调节组分和任选的填料 。 组合物是可见光，UV或电子束可固化。 它固化成低模量，低脱气聚合物材料。 该组合物可用作粘合剂，密封剂或透镜灌封材料。 它非常适用于涉及深度或真空紫外线辐射的光刻工具和其他光学器件，特别是248 nm，193 nm和157 nm光刻工具的透镜灌封材料，以及涉及使用高能量照射的其他光学器件。